Dielectric Films for Advanced Microelectronics

Dielectric Films for Advanced Microelectronics
Author: Mikhail Baklanov
Publisher: John Wiley & Sons
Total Pages: 508
Release: 2007-04-04
Genre: Technology & Engineering
ISBN: 0470065419

The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.

Interlayer Dielectrics for Semiconductor Technologies

Interlayer Dielectrics for Semiconductor Technologies
Author: Shyam P Muraka
Publisher: Elsevier
Total Pages: 459
Release: 2003-10-13
Genre: Science
ISBN: 0080521959

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume* written by renowned experts in the field* Provides an up-to-date starting point in this young research field.

Thin Films and Heterostructures for Oxide Electronics

Thin Films and Heterostructures for Oxide Electronics
Author: Satishchandra B. Ogale
Publisher: Springer Science & Business Media
Total Pages: 416
Release: 2005-11-21
Genre: Technology & Engineering
ISBN: 0387260897

Oxides form a broad subject area of research and technology development which encompasses different disciplines such as materials science, solid state chemistry, physics etc. The aim of this book is to demonstrate the interplay of these fields and to provide an introduction to the techniques and methodologies involving film growth, characterization and device processing. The literature in this field is thus fairly scattered in different research journals covering one or the other aspect of the specific activity. This situation calls for a book that will consolidate this information and thus enable a beginner as well as an expert to get an overall perspective of the field, its foundations, and its projected progress.

Optical Properties of Thin Solid Films

Optical Properties of Thin Solid Films
Author: O. S. Heavens
Publisher: Courier Corporation
Total Pages: 276
Release: 1991-01-01
Genre: Science
ISBN: 0486669246

Authoritative reference treats the formation, structure, optical properties, and uses of thin solid films, emphasizing causes of their unusual qualities. 162 figures. 19 tables. 1955 edition.

Thin Film Metal-Oxides

Thin Film Metal-Oxides
Author: Shriram Ramanathan
Publisher: Springer Science & Business Media
Total Pages: 344
Release: 2009-12-03
Genre: Technology & Engineering
ISBN: 1441906649

Thin Film Metal-Oxides provides a representative account of the fundamental structure-property relations in oxide thin films. Functional properties of thin film oxides are discussed in the context of applications in emerging electronics and renewable energy technologies. Readers will find a detailed description of deposition and characterization of metal oxide thin films, theoretical treatment of select properties and their functional performance in solid state devices, from leading researchers. Scientists and engineers involved with oxide semiconductors, electronic materials and alternative energy will find Thin Film Metal-Oxides a useful reference.

Low Dielectric Constant Materials for IC Applications

Low Dielectric Constant Materials for IC Applications
Author: Paul S. Ho
Publisher: Springer Science & Business Media
Total Pages: 323
Release: 2012-12-06
Genre: Technology & Engineering
ISBN: 3642559085

Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for

Thin Film Processes

Thin Film Processes
Author: John L. Vossen
Publisher: Elsevier
Total Pages: 577
Release: 2012-12-02
Genre: Technology & Engineering
ISBN: 0323138985

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.

The Materials Science of Thin Films

The Materials Science of Thin Films
Author: Milton Ohring
Publisher: Academic Press
Total Pages: 744
Release: 1992
Genre: Science
ISBN: 9780125249904

Prepared as a textbook complete with problems after each chapter, specifically intended for classroom use in universities.

Ferroelectric Materials for Energy Harvesting and Storage

Ferroelectric Materials for Energy Harvesting and Storage
Author: Deepam Maurya
Publisher: Woodhead Publishing
Total Pages: 374
Release: 2020-10-14
Genre: Technology & Engineering
ISBN: 0081028792

The need to more efficiently harvest energy for electronics has spurred investigation into materials that can harvest energy from locally abundant sources. Ferroelectric Materials for Energy Harvesting and Storage is the first book to bring together fundamental mechanisms for harvesting various abundant energy sources using ferroelectric and piezoelectric materials. The authors discuss strategies of designing materials for efficiently harvesting energy sources like solar, wind, wave, temperature fluctuations, mechanical vibrations, biomechanical motion, and stray magnetic fields. In addition, concepts of the high density energy storage using ferroelectric materials is explored. Ferroelectric Materials for Energy Harvesting and Storage is appropriate for those working in materials science and engineering, physics, chemistry and electrical engineering disciplines. - Reviews wide range of energy harvesting including solar, wind, biomechanical and more - Discusses ferroelectric materials and their application to high energy density capacitors - Includes review of fundamental mechanisms of energy harvesting and energy solutions, their design and current applications, and future trends and challenges