Structural, Optical and Electrical Properties of WOxNy Filmsdeposited by Reactive Dual Magnetron Sputtering

Structural, Optical and Electrical Properties of WOxNy Filmsdeposited by Reactive Dual Magnetron Sputtering
Author:
Publisher:
Total Pages:
Release: 2006
Genre:
ISBN:

Thin films of tungsten oxynitride were prepared by dual magnetron sputtering of tungsten using argon/oxygen/nitrogen gas mixtures with various nitrogen/oxygen ratios. The presence of even small amounts of oxygen had a great effect not only on the composition but on the structure of WOxNy films, as shown by Rutherford backscattering and x-ray diffraction, respectively. Significant incorporation of nitrogen occurred only when the nitrogen partial pressure exceeded 89 percent of the total reactive gas pressure. Sharp changes in the stoichiometry, deposition rate, room temperature resistivity, electrical activation energy and optical band gap were observed when the nitrogen/oxygen ratio was high. The deposition rate increased from 0.31 to 0.89 nm/s, the room temperature resistivity decreased from 1.65 x 108 to 1.82 x 10-2?cm, the electrical activation energy decreased from 0.97 to 0.067 eV, and the optical band gap decreased from 3.19 to 2.94 eV upon nitrogen incorporation into the films. WOxNy films were highly transparent as long as the nitrogen incorporation was low, and were brownish (absorbing) and partially reflecting as nitrogen incorporation became significant.

Pulsed Laser Deposition of Thin Films

Pulsed Laser Deposition of Thin Films
Author: Douglas B. Chrisey
Publisher: Wiley-Interscience
Total Pages: 0
Release: 1994-06-21
Genre: Technology & Engineering
ISBN: 9780471592181

A comprehensive overview of what is required to set up and begin research in this newly developing technology and understand the basics of the process. Internationally recognized experts in their fields cover such fundamentals as history, theory, film characteristics, surface modification, laser technology, materials and applications including excellent reviews regarding the entire areas of semiconductor buffer layers, thin-film ferroelectrics and ferrites along with the work involving films deposited by PLD.

Ferroelectricity in Doped Hafnium Oxide

Ferroelectricity in Doped Hafnium Oxide
Author: Uwe Schroeder
Publisher: Woodhead Publishing
Total Pages: 570
Release: 2019-03-27
Genre: Technology & Engineering
ISBN: 0081024312

Ferroelectricity in Doped Hafnium Oxide: Materials, Properties and Devices covers all aspects relating to the structural and electrical properties of HfO2 and its implementation into semiconductor devices, including a comparison to standard ferroelectric materials. The ferroelectric and field-induced ferroelectric properties of HfO2-based films are considered promising for various applications, including non-volatile memories, negative capacitance field-effect-transistors, energy storage, harvesting, and solid-state cooling. Fundamentals of ferroelectric and piezoelectric properties, HfO2 processes, and the impact of dopants on ferroelectric properties are also extensively discussed in the book, along with phase transition, switching kinetics, epitaxial growth, thickness scaling, and more. Additional chapters consider the modeling of ferroelectric phase transformation, structural characterization, and the differences and similarities between HFO2 and standard ferroelectric materials. Finally, HfO2 based devices are summarized. Explores all aspects of the structural and electrical properties of HfO2, including processes, modelling and implementation into semiconductor devices Considers potential applications including FeCaps, FeFETs, NCFETs, FTJs and more Provides comparison of an emerging ferroelectric material to conventional ferroelectric materials with insights to the problems of downscaling that conventional ferroelectrics face

Halide Perovskites

Halide Perovskites
Author: Tze-Chien Sum
Publisher: John Wiley & Sons
Total Pages: 312
Release: 2019-03-25
Genre: Technology & Engineering
ISBN: 3527341110

Real insight from leading experts in the field into the causes of the unique photovoltaic performance of perovskite solar cells, describing the fundamentals of perovskite materials and device architectures. The authors cover materials research and development, device fabrication and engineering methodologies, as well as current knowledge extending beyond perovskite photovoltaics, such as the novel spin physics and multiferroic properties of this family of materials. Aimed at a better and clearer understanding of the latest developments in the hybrid perovskite field, this is a must-have for material scientists, chemists, physicists and engineers entering or already working in this booming field.

Dielectric Phenomena in Solids

Dielectric Phenomena in Solids
Author: Kwan Chi Kao
Publisher: Elsevier
Total Pages: 601
Release: 2004-05-11
Genre: Technology & Engineering
ISBN: 0080470165

In general, a dielectric is considered as a non-conducting or insulating material (such as a ceramic or polymer used to manufacture a microelectronic device). This book describes the laws governing all dielectric phenomena. · A unified approach is used in describing each of the dielectric phenomena, with the aim of answering "what?", "how?" and "why" for the occurrence of each phenomenon;· Coverage unavailable in other books on ferroelectrics, piezoelectrics, pyroelectrics, electro-optic processes, and electrets;· Theoretical analyses are general and broadly applicable;· Mathematics is simplified and emphasis is placed on the physical insight of the mechanisms responsible for the phenomena;· Truly comprehensive coverage not available in the current literature.

Spillover and Mobility of Species on Solid Surfaces

Spillover and Mobility of Species on Solid Surfaces
Author: A. Guerrero-Ruiz
Publisher: Elsevier
Total Pages: 501
Release: 2001-08-02
Genre: Technology & Engineering
ISBN: 0080539742

"Spillover and Mobility of Species and Solid Surfaces" collects the papers which were presented at the Fifth International Conference Spillover, either as oral or poster contributions, as well as the summaries of the invited lectures. This congress and its publication in the Studies on Surface Science and Catalysis series follow the tradition of previous conferences on spillover, initiated in Lyon, 1983, and continued in Leipzig, 1989, Kyoto 1993 and Dalian, 1997. For the fifth conference, held in S.L. el Escorial (Madrid), the organising committee has attempted to compile representative contributions which illustrate the advances in understanding the spillover phenomenon since 1997. Spillover is a process taking place during the interface of gas reactant molecules (mainly hydrogen and oxygen) on solid surfaces. However, different contributions to the more general area of the chemistry at surfaces, related with the mobility and migration of species, diffusion through membranes, fuel cell catalysts, etc., have also been included. In fact the title of the present volume summarizes this attempt to extend the conference topics towards dynamics at surfaces.Among the 70 contributions received, the 56 accepted papers were selected on the basis of the reports of at least two international reviewers, according to standards comparable to those applied for other specialised journals. These papers are from 21 different countries.

Interfacial Electrochemistry

Interfacial Electrochemistry
Author: Wolfgang Schmickler
Publisher: Springer Science & Business Media
Total Pages: 273
Release: 2010-08-26
Genre: Science
ISBN: 3642049370

Electrochemistry is an old branch of physical chemistry. Due to the development of surface sensitive techniques, and a technological interest in fuel cells and batteries, it has recently undergone a rapid development. This textbook treats the field from a modern, atomistic point of view while integrating the older, macroscopic concepts. The increasing role of theory is reflected in the presentation of the basic ideas in a way that should appeal to experimentalists and theorists alike. Special care is taken to make the subject comprehensible to scientists from neighboring disciplines, especially from surface science. The book is suitable for an advanced course at the master or Ph.D. level, but should also be useful for practicing electrochemists, as well as to any scientist who wants to understand modern electrochemistry.