Silicon Sensors On Membranes
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The Comprehensive Integration of Microdialysis Membranes and Silicon Sensors
Author | : Sebastian Böhm |
Publisher | : |
Total Pages | : 176 |
Release | : 2000 |
Genre | : |
ISBN | : 9789036514620 |
Silicon Sensors and Actuators
Author | : Benedetto Vigna |
Publisher | : Springer Nature |
Total Pages | : 988 |
Release | : 2022-04-12 |
Genre | : Technology & Engineering |
ISBN | : 3030801357 |
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
Silicon Nanomembranes
Author | : John A. Rogers |
Publisher | : John Wiley & Sons |
Total Pages | : 365 |
Release | : 2016-04-08 |
Genre | : Technology & Engineering |
ISBN | : 3527690999 |
Edited by the leaders in the fi eld, with chapters from highly renowned international researchers, this is the fi rst coherent overview of the latest in silicon nanomembrane research. As such, it focuses on the fundamental and applied aspects of silicon nanomembranes, ranging from synthesis and manipulation to manufacturing, device integration and system level applications, including uses in bio-integrated electronics, three-dimensional integrated photonics, solar cells, and transient electronics. The first part describes in detail the fundamental physics and materials science involved, as well as synthetic approaches and assembly and manufacturing strategies, while the second covers the wide range of device applications and system level demonstrators already achieved, with examples taken from electronics and photonics and from biomedicine and energy.
Micromachining of Monocrystalline Silicon Membranes for Sensor Applications Using Porous Silicon
Author | : Simon Armbruster |
Publisher | : |
Total Pages | : 150 |
Release | : 2005 |
Genre | : |
ISBN | : 9783899594072 |
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Author | : Jean Laconte |
Publisher | : Springer Science & Business Media |
Total Pages | : 293 |
Release | : 2006-10-11 |
Genre | : Technology & Engineering |
ISBN | : 0387288430 |
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Silicon Nanomembranes
Author | : John A. Rogers |
Publisher | : John Wiley & Sons |
Total Pages | : 365 |
Release | : 2016-04-25 |
Genre | : Technology & Engineering |
ISBN | : 3527691014 |
Edited by the leaders in the fi eld, with chapters from highly renowned international researchers, this is the fi rst coherent overview of the latest in silicon nanomembrane research. As such, it focuses on the fundamental and applied aspects of silicon nanomembranes, ranging from synthesis and manipulation to manufacturing, device integration and system level applications, including uses in bio-integrated electronics, three-dimensional integrated photonics, solar cells, and transient electronics. The first part describes in detail the fundamental physics and materials science involved, as well as synthetic approaches and assembly and manufacturing strategies, while the second covers the wide range of device applications and system level demonstrators already achieved, with examples taken from electronics and photonics and from biomedicine and energy.
Handbook of Chemical and Biological Sensors
Author | : R.F Taylor |
Publisher | : CRC Press |
Total Pages | : 1248 |
Release | : 1996-01-01 |
Genre | : Science |
ISBN | : 9781420050486 |
The Handbook of Chemical and Biological Sensors focuses on the development of sensors to recognize substances rather than physical quantities. This fully inclusive book examines devices that use a biological sensing element to detect and measure chemical and biological species as well as those that use a synthetic element to achieve a similar result. A first port of call for anyone with a specific interest, question, or problem relating to this area, this comprehensive source of reference serves as a guide for practicing scientists and as a text for many graduate courses. It presents relevant physics to chemists, chemistry to materials scientists, materials science to electronic engineers, and fabrication technology to all of the above. In addition, the handbook is useful both to newcomers and to experienced researchers who wish to broaden their knowledge of the constituent disciplines of this wide-ranging field.