Wafer Bonding

Wafer Bonding
Author: Marin Alexe
Publisher: Springer Science & Business Media
Total Pages: 524
Release: 2004-05-14
Genre: Science
ISBN: 9783540210498

During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

Semiconductor Wafer Bonding 11: Science, Technology, and Applications - In Honor of Ulrich Gösele

Semiconductor Wafer Bonding 11: Science, Technology, and Applications - In Honor of Ulrich Gösele
Author: C. Colinge
Publisher: The Electrochemical Society
Total Pages: 656
Release: 2010-10
Genre: Science
ISBN: 1566778239

Semiconductor wafer bonding continues to evolve as a crucial technology extending new integration schemes and disseminating new product architectures in such diverse areas as high quality silicon-on-insulator (SOI) materials for electronic applications, Si-Ge strained layers, Germanium-on-Insulator (GeOI), 3D device integration, Si on quartz or glass for thin film displays, compound semiconductor-on-Si heterostructures and Micro-Electro-Mechanical Systems.

Semiconductor Wafer Bonding 10: Science, Technology, and Applications

Semiconductor Wafer Bonding 10: Science, Technology, and Applications
Author:
Publisher: The Electrochemical Society
Total Pages: 588
Release: 2008-10
Genre: Microelectromechanical systems
ISBN: 1566776546

This issue of ECS Transactions on Semiconductor Wafer Bonding will cover the state-of-the-art R&D results of the last 2 years in the field of semiconductor wafer bonding technology. Wafer Bonding is an Enabling Technology that can be used to create novel composite materials systems and devices that would otherwise be unattainable. Wafer Bonding today is rapidly expanding into new applications in such diverse fields as photonics, sensors, MEMS. X-ray optics, non-electronic microstructures, high performance CMOS platforms for high end servers, Si-Ge, strained SOI, Germanium-on-Insulator (GeOI) and Nanotechnologies.

Semiconductor Wafer Bonding 9: Science, Technology, and Applications

Semiconductor Wafer Bonding 9: Science, Technology, and Applications
Author: Helmut Baumgart
Publisher: The Electrochemical Society
Total Pages: 398
Release: 2006
Genre: Microelectromechanical systems
ISBN: 156677506X

This issue of ECS Transactions covers state-of-the-art R&D results of the last 1.5 years in the field of semiconductor wafer bonding technology. Wafer Bonding Technology can be used to create novel composite materials systems and devices what would otherwise be unattainable. Wafer bonding today is rapidly expanding applications in such diverse fields as photonics, sensors, MEMS, X-ray optics, non-electronic microstructures, high performance CMOS platforms for high end servers, Si-Ge, strained SOI, Germanium-on-Insulator (GeOI), and Nanotechnologies.

Wafer Bonding

Wafer Bonding
Author: Marin Alexe
Publisher: Springer Science & Business Media
Total Pages: 510
Release: 2013-03-09
Genre: Science
ISBN: 3662108275

The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

Semiconductor Wafer Bonding

Semiconductor Wafer Bonding
Author: H. Baumgart
Publisher: The Electrochemical Society
Total Pages: 310
Release: 2002
Genre: Technology & Engineering
ISBN: 9781566773607