ERDA Energy Research Abstracts

ERDA Energy Research Abstracts
Author: United States. Energy Research and Development Administration. Technical Information Center
Publisher:
Total Pages: 1680
Release: 1977
Genre: Force and energy
ISBN:

Particles in Gases and Liquids 1

Particles in Gases and Liquids 1
Author: K.L. Mittal
Publisher: Springer Science & Business Media
Total Pages: 298
Release: 2012-12-06
Genre: Science
ISBN: 1461307937

This book documents the proceedings of the Symposium on Particles in Fluids: Detection, Characterization and Control held as a part of the 18th Fine Particle Society meeting in Boston, August 3-7, 1987. This was the Premier symposium on this topic and the response was so good that we have decided to organize it on a biennial basis and the second symposium will be held under the rubric Particles in Gases and Liquids: Detection, Characterization and Control at the 20th Fine Particle Society meeting in Boston, August 22-26, 1989. In the modern manufacture of sophisticated and sensitive microelectronic components and other precision parts, there has been a great deal of concern about yield losses due to micrometer- and submicrometer-sized particles. These particles can originate from a number of sources including fluids, i. e. , gases and liquids used in the manufacturing process. So the detection, characterization and control or removal of these undesirable particles is of cardinal importance and this symposium was conceived and o~ganized with this in mind. The purposes of this symposium were to bring together those actively involved in all aspects of particles in fluids, to provide a forum for discussion of the latest techniques for the detection, characterization and control of particles, and to highlight areas which needed intensified R&D efforts. The printed program contained a total of 46 papers and a variety of topics dealing with various ramifications of particles in fluids were presented.

ERDA Research Abstracts

ERDA Research Abstracts
Author: United States. Energy Research and Development Administration
Publisher:
Total Pages: 716
Release: 1976
Genre: Power resources
ISBN:

Particle Control for Semiconductor Manufacturing

Particle Control for Semiconductor Manufacturing
Author: Donovan
Publisher: Routledge
Total Pages: 484
Release: 2018-05-04
Genre: Science
ISBN: 1351425749

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In