Pressure Sensor Arrays And Microactuators For Fluid Mechanics Research
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| Author | : Khalil Najafi |
| Publisher | : |
| Total Pages | : 22 |
| Release | : 1997 |
| Genre | : |
| ISBN | : |
A combined microactuator/microsensor system has been developed using silicon micromachining techniques for use in high speed jets and control of screech in these jets. The 14 microns-thick electrostatic microactuator was fabricated and tested at the exit of a supersonic axisymmetric jet for the introduction of perturbations into the convectively unstable supersonic shear layer. It can be forced into mechanical resonance at frequencies of 5/14 kHz at an amplitude of greater then 70 microns, thus generating significant disturbances into the macro scale jet flow, and survive operation at speeds of>210 m/s. These microactuators have survived hundreds of experiments in the harsh jet environment, and their performance matches or exceeds that of other macro actuators. An array of micromachined sound detectors for the detection of onset of jet screech has also been fabricated. The detectors use stress compensated PECVD silicon nitride/oxide membranes together with monocrystalline ion-implanted p++ silicon piezoresistors to achieve high sensitivity. They have a static sensitivity of 1.1 uV/VPa with a 2% nonlinearity over a pressure range of 10kPa. A chip has been fabricated that supports an array of microactuators and sound detectors. Ongoing investigations are aimed at developing a technique to modify, and ultimately control, the feedback loop responsible for the creation of screech.
| Author | : Chunchieh Huang |
| Publisher | : |
| Total Pages | : 380 |
| Release | : 1998 |
| Genre | : |
| ISBN | : |
| Author | : Mohamed Gad-el-Hak |
| Publisher | : CRC Press |
| Total Pages | : 576 |
| Release | : 2005-11-29 |
| Genre | : Technology & Engineering |
| ISBN | : 1420036556 |
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
| Author | : Massood Tabib-Azar |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 297 |
| Release | : 2013-11-27 |
| Genre | : Technology & Engineering |
| ISBN | : 1461554454 |
219 8. 2 Sensors 221 8. 3 Physical Sensors 222 8. 3. 1 Electrical Sensing Means 223 8. 3. 2 Magnetic Field Methods 231 8. 3. 3 Optical Methods 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4 Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsic Sensing 253 8. 4. 7 Optical Biosensors 256 8. 4. 8 Ultrasonic Gas and Chemical Sensors 257 8. 4. 9 Intelligent Sensors 258 8. 5 Connections/Links and Wiring 258 8. 5. 1 Optical Links 260 8. 5. 2 Requirement on the Processing Unit/Intelligence 262 8. 6 Actuators 263 8. 7 Signal Processing/Computing 264 8. 7. 1 Implicit Computation 266 8. 7. 2 Explicit Computation 267 8. 8 References 274 Subject Index 279 Micro-Actuators (Electrical, Magnetic, Thermal, Optical, Mechanical, and Chemical) It has become quite apparent that sensors and actuators are the main bottleneck of the modem information processing and control systems. Microprocessors and computers used to be the main limiting element in most information processing systems. But thanks to the enonnous progress in the microelectronics industry, most information analysis tasks can be processed in real time. The data has to be acquired by the processor in some form and processed and used to produce some useful function in the real world.
| Author | : |
| Publisher | : |
| Total Pages | : 974 |
| Release | : 1999 |
| Genre | : Aeronautics |
| ISBN | : |
| Author | : American Institute of Aeronautics and Astronautics |
| Publisher | : |
| Total Pages | : 960 |
| Release | : 2005 |
| Genre | : Aeronautics |
| ISBN | : |
| Author | : Shekhar Bhansali |
| Publisher | : Elsevier |
| Total Pages | : 511 |
| Release | : 2012-07-18 |
| Genre | : Technology & Engineering |
| ISBN | : 0857096273 |
The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy
| Author | : Alberto Corigliano |
| Publisher | : John Wiley & Sons |
| Total Pages | : 332 |
| Release | : 2018-04-02 |
| Genre | : Technology & Engineering |
| ISBN | : 1119053838 |
Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.
| Author | : |
| Publisher | : |
| Total Pages | : 2264 |
| Release | : 1992 |
| Genre | : Engineering |
| ISBN | : |
Since its creation in 1884, Engineering Index has covered virtually every major engineering innovation from around the world. It serves as the historical record of virtually every major engineering innovation of the 20th century. Recent content is a vital resource for current awareness, new production information, technological forecasting and competitive intelligence. The world?s most comprehensive interdisciplinary engineering database, Engineering Index contains over 10.7 million records. Each year, over 500,000 new abstracts are added from over 5,000 scholarly journals, trade magazines, and conference proceedings. Coverage spans over 175 engineering disciplines from over 80 countries. Updated weekly.
| Author | : North Atlantic Treaty Organization. Advisory Group for Aerospace Research and Development. Fluid Dynamics Panel. Symposium |
| Publisher | : |
| Total Pages | : 444 |
| Release | : 1998 |
| Genre | : Aerodynamics |
| ISBN | : |
The demands for higher performance for modern aircraft have led the wind tunnel community, which is an integral link in the design process, to develop more refined and cost effective measuring techniques. These technologies have gradually matured from laboratory novelties into instruments regularly used in aerodynamic testing. The development of these modern measurement techniques has greatly extended the capability and accuracy of the classical methods for measurement techniques and provided better insight into flow physics. This Symposium provided a forum for active researchers to address the state-of-the-art, to exchange experiences and ideas, and for the practitioners to obtain an overview of the technology and learn how to appy it.
