Physics and Technology of High-k Gate Dielectrics II

Physics and Technology of High-k Gate Dielectrics II
Author: Samares Kar
Publisher: The Electrochemical Society
Total Pages: 512
Release: 2004
Genre: Science
ISBN: 9781566774055

"This volume is the proceedings of The Second International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues ... and was held during [the] 204th Meeting [of the Electrochemical Society] ..."--P. v.

High-k Gate Dielectrics for CMOS Technology

High-k Gate Dielectrics for CMOS Technology
Author: Gang He
Publisher: John Wiley & Sons
Total Pages: 560
Release: 2012-08-10
Genre: Technology & Engineering
ISBN: 3527646361

A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies. Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.

Physics and Technology of High-k Gate Dielectrics 6

Physics and Technology of High-k Gate Dielectrics 6
Author: S. Kar
Publisher: The Electrochemical Society
Total Pages: 550
Release: 2008-10
Genre: Dielectrics
ISBN: 1566776511

The issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, novel and still higher permittivity dielectric materials, CMOS processing with high-K layers, metals for gate electrodes, interface issues, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

Physics and Technology of High-k Gate Dielectrics 4

Physics and Technology of High-k Gate Dielectrics 4
Author: Samares Kar
Publisher: The Electrochemical Society
Total Pages: 565
Release: 2006
Genre: Dielectrics
ISBN: 1566775035

This issue covers, in detail, all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

Physics and Technology of High-k Gate Dielectrics 5

Physics and Technology of High-k Gate Dielectrics 5
Author: Samares Kar
Publisher: The Electrochemical Society
Total Pages: 676
Release: 2007
Genre: Dielectrics
ISBN: 1566775701

This issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

High Permittivity Gate Dielectric Materials

High Permittivity Gate Dielectric Materials
Author: Samares Kar
Publisher: Springer Science & Business Media
Total Pages: 515
Release: 2013-06-25
Genre: Technology & Engineering
ISBN: 3642365353

"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects." .

High k Gate Dielectrics

High k Gate Dielectrics
Author: Michel Houssa
Publisher: CRC Press
Total Pages: 614
Release: 2003-12-01
Genre: Science
ISBN: 1420034146

The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be requ