Microchip Fabrication A Practical Guide To Semiconductor Processing Sixth Edition
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Author | : Peter Van Zant |
Publisher | : McGraw Hill Professional |
Total Pages | : 658 |
Release | : 2004-06-09 |
Genre | : Technology & Engineering |
ISBN | : 0071501398 |
The #1 book in the industry for more than 15 years! Utilizing a straightforward, math-free pathology, this is a novice-friendly guide to the semiconductor fabrication process from raw materials through shipping the finished, packaged device. Challenging quizzes and review summaries make this the perfect learning guide for technicians in training. * NEW chapter on nanotechnology * NEW sections on 300mm wafer processing * Processes and devices, and Green processing * Every chapter updated to reflect the latest processing techniques
Author | : Peter Van Zant |
Publisher | : McGraw Hill Professional |
Total Pages | : 577 |
Release | : 2013-10-22 |
Genre | : Technology & Engineering |
ISBN | : 0071821023 |
The most complete, current guide to semiconductor processing Fully revised to cover the latest advances in the field, Microchip Fabrication, Sixth Edition explains every stage of semiconductor processing, from raw material preparation to testing to packaging and shipping the finished device. This practical resource provides easy-to-understand information on the physics, chemistry, and electronic fundamentals underlying the sophisticated manufacturing materials and processes of modern semiconductors. State-of-the-art processes and cutting-edge technologies used in the patterning, doping, and layering steps are discussed in this new edition. Filled with detailed illustrations and real-world examples, this is a comprehensive, up-to-date introduction to the technological backbone of the high-tech industry. COVERAGE INCLUDES: The semiconductor industry Properties of semiconductor materials and chemicals Crystal growth and silicon wafer preparation Wafer fabrication and packaging Contamination control Productivity and process yields Oxidation The ten-step patterning process--surface preparation to exposure; developing to final inspection Next generation lithography Doping Layer deposition Metallization Process and device evaluation The business of wafer fabrication Devices and integrated circuit formation Integrated circuits Packaging
Author | : Peter Van Zant |
Publisher | : McGraw-Hill Education |
Total Pages | : 576 |
Release | : 2014-01-07 |
Genre | : Technology & Engineering |
ISBN | : 9780071821018 |
Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. The most complete, current guide to semiconductor processing Fully revised to cover the latest advances in the field, Microchip Fabrication, Sixth Edition explains every stage of semiconductor processing, from raw material preparation to testing to packaging and shipping the finished device. This practical resource provides easy-to-understand information on the physics, chemistry, and electronic fundamentals underlying the sophisticated manufacturing materials and processes of modern semiconductors. State-of-the-art processes and cutting-edge technologies used in the patterning, doping, and layering steps are discussed in this new edition. Filled with detailed illustrations and real-world examples, this is a comprehensive, up-to-date introduction to the technological backbone of the high-tech industry. COVERAGE INCLUDES: The semiconductor industry Properties of semiconductor materials and chemicals Crystal growth and silicon wafer preparation Wafer fabrication and packaging Contamination control Productivity and process yields Oxidation The ten-step patterning process--surface preparation to exposure; developing to final inspection Next generation lithography Doping Layer deposition Metallization Process and device evaluation The business of wafer fabrication Devices and integrated circuit formation Integrated circuits Packaging
Author | : Gary S. May |
Publisher | : John Wiley & Sons |
Total Pages | : 428 |
Release | : 2006-05-26 |
Genre | : Technology & Engineering |
ISBN | : 0471790273 |
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Author | : Chris Mack |
Publisher | : John Wiley & Sons |
Total Pages | : 503 |
Release | : 2011-08-10 |
Genre | : Technology & Engineering |
ISBN | : 1119965071 |
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Author | : Grant McFarland |
Publisher | : McGraw Hill Professional |
Total Pages | : 432 |
Release | : 2010-04-23 |
Genre | : Technology & Engineering |
ISBN | : 0071492127 |
Gain a Working Knowledge of the Entire Microprocessor Design Flow This unique step-by-step guide is a complete introduction to modern microprocessor design, explained in simple nontechnical language without complex mathematics. An ideal primer for those working in or studying the semiconductor industry, Microprocessor Design explains all the key concepts, terms, and acronyms needed to understand the steps required to design and manufacture a microprocessor. Developed from a successful corporate training course, this hands-on learning guide walks readers through every step of microprocessor design. You'll follow a new processor product from initial planning through design to production. In Microprocessor Design, the author converts his real-world design and teaching experience into an easy-to-follow reference employing an on-the-job-training approach to cover: The evolution of microprocessors Microprocessor design planning Architecture and microarchitecture Logic design and circuit design Semiconductor manufacturing Processor packaging and test This authoritative reference is an excellent introduction for students or engineers new to processor design and can show industry veterans how their specialty fits into the overall design flow. This accessible and practical guide will provide the reader with a broad working knowledge of the concepts of microprocessor design, as well as an understanding of the individual steps in the process and the jargon used by the industry.
Author | : Hwaiyu Geng |
Publisher | : McGraw Hill Professional |
Total Pages | : 915 |
Release | : 2005-05-18 |
Genre | : Technology & Engineering |
ISBN | : 0071445595 |
WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems
Author | : Stephen A. Campbell |
Publisher | : OUP USA |
Total Pages | : 0 |
Release | : 2008-01-10 |
Genre | : Technology & Engineering |
ISBN | : 9780195320176 |
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.
Author | : George G. Harman |
Publisher | : McGraw Hill Professional |
Total Pages | : 290 |
Release | : 1997 |
Genre | : Technology & Engineering |
ISBN | : 9780070326194 |
The first edition of this work is considered a classic reference in the field. This new edition updates the entire work and adds 100 pages of information covering new materials and techniques such as fine pitch
Author | : George Gilder |
Publisher | : Simon and Schuster |
Total Pages | : 436 |
Release | : 1990-07-15 |
Genre | : Science |
ISBN | : 067170592X |
From Simon & Schuster, Microcosm is the provocative national bestseller by the author of Wealth and Poverty. George Gilder's Microcosm is the crystal ball of the next technological era. Leading scientists, engineers, and entrepreneurs provide vivid accounts of the latest inventions, revealing how the new international balance of power really lies in information technology.