Micro System Technologies 90
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| Author | : Herbert Reichl |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 843 |
| Release | : 2012-12-06 |
| Genre | : Technology & Engineering |
| ISBN | : 3642456782 |
On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities.
| Author | : Wolfgang Menz |
| Publisher | : John Wiley & Sons |
| Total Pages | : 512 |
| Release | : 2008-07-11 |
| Genre | : Technology & Engineering |
| ISBN | : 3527613013 |
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
| Author | : Sergej Fatikow |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 420 |
| Release | : 2013-04-17 |
| Genre | : Computers |
| ISBN | : 3662034506 |
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
| Author | : Andreas Manz |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 269 |
| Release | : 2003-09-05 |
| Genre | : Science |
| ISBN | : 3540695443 |
"WHAT DOES NOT NEED TO BE BIG, WILL BE SMALL", a word by an engineer at a recent conference on chips technology. This sentence is particularly true for chemistry. Microfabrication technology emerged from microelectronics into areas like mechanics and now chemistry and biology. The engineering of micron and submicron sized features on the surface of silicon, glass and polymers opens a whole new world. Micromotors smaller than human hair have been fabricated and they work fine. It is the declared goal of the authors to bring these different worlds together in this volume. Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.
| Author | : Hans-Peter Saluz |
| Publisher | : Birkhäuser |
| Total Pages | : 592 |
| Release | : 2012-12-06 |
| Genre | : Science |
| ISBN | : 3034888171 |
Biomolecular studies are the trial of Man to understand how Nature manages information at the molecular level. The understanding of molecular informa tion handling in nature is essential for the molecular optimization in chem istry, molecular biology, molecular pharmacology and therefore - as an ex ample - for the development of specifically acting drugs. The famous recent method of technical information management is digital electronics. Over the past few years, evidence has arisen that computerized and molecular information managements have many similar and overlapping aspects. For example, both technology and nature use digitized information and both use small structures for the efficient handling of information. Furthermore, they optimize their processes in order to gain a maximum of information with a minimum of invested energy. During the last two decades, novel experimental techniques in biomolec ular sciences have paved the way for artificial biomolecular optimization. In the same time interval, the progress of micro system technology has been extended from the field of digital electronics and sensing to micro liquid hand ling, and the field of chip-supported substance handling began. It appears that the "marriage" of physical micro technology and molecular processing will be consummated soon. The contact of both fields has been realized in for ex ample DNA chips. Such connections will also become relevant in additional fields in the near future. Biomolecular investigations are the first to profit from these fast growing scientific and technical connections between micro systems and molecular sciences.
| Author | : Alberto Pique |
| Publisher | : Academic Press |
| Total Pages | : 756 |
| Release | : 2002 |
| Genre | : Computers |
| ISBN | : 9780121742317 |
Direct-Write Technologies covers applications, materials, and the techniques in using direct-write technologies. This book provides an overview of the different direct write techniques currently available, as well as a comparison between the strengths and special attributes for each of the techniques. The techniques described open the door for building prototypes and testing materials. The book also provides an overview of the state-of-the-art technology involved in this field. Basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications. Others in this or related fields will want the book to read the introductory material summarizing isuses common to all approaches, in order to compare and contrast different techniques. Everyday applications include electronic components and sensors, especially chemical and biosensors. There is a wide range of research and development problems requiring state-of-the-art direct write tools. This book will appeal to basic researchers and development engineers in university engineering departments and at industrial and national research laboratories. This text should appeal equally well in the United States, Asia, and Europe. Both basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications. An overview of the different direct write techniques currently available A comparison between the strengths and special attributes for each of the techniques An overview of the state-of-the-art technology involved in this field
| Author | : Rudolf Albrecht |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 320 |
| Release | : 2012-12-06 |
| Genre | : Computers |
| ISBN | : 3709164516 |
There is hardly a science that is without the notion of "system". We have systems in mathematics, formal systems in logic, systems in physics, electrical and mechanical engineering, architectural-, operating-, infonnation-, programming systems in computer science, management-and PJoduction systems in industrial applications, economical-, ecological-, biological systems, and many more. In many of these disciplines formal tools for system specification, construction, verification, have been developed as well as mathematical concepts for system modeling and system simulation. Thus it is quite natural to expect that systems theory as an interdisciplinary and well established science offering general concepts and methods for a wide variety of applications is a subject in its own right in academic education. However, as can be seen from the literature and from the curricula of university studies -at least in Central Europe-, it is subordinated and either seen as part of mathematics with the risk that mathematicians, who may not be familiar with applications, define it in their own way, or it is treated separately within each application field focusing on only those aspects which are thought to be needed in the particular application. This often results in uneconomical re-inventing and re-naming of concepts and methods within one field, while the same concepts and methods are already well introduced and practiced in other fields. The fundamentals on general systems theory were developed several decades ago. We note the pioneering work of M. A. Arbib, R. E. Kalman, G. 1. Klir, M. D.
| Author | : Marc J. Madou |
| Publisher | : CRC Press |
| Total Pages | : 1983 |
| Release | : 2018-12-14 |
| Genre | : Technology & Engineering |
| ISBN | : 1482274663 |
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
| Author | : Mohamed Gad-el-Hak |
| Publisher | : CRC Press |
| Total Pages | : 1386 |
| Release | : 2001-09-27 |
| Genre | : Technology & Engineering |
| ISBN | : 9781420050905 |
The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.
| Author | : Marc J. Madou |
| Publisher | : CRC Press |
| Total Pages | : 652 |
| Release | : 2011-06-13 |
| Genre | : Technology & Engineering |
| ISBN | : 142005516X |
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology
