Mems And Moems Technology And Applications
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Author | : P. Rai-Choudhury |
Publisher | : SPIE Press |
Total Pages | : 544 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9780819437167 |
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Author | : Richard A. Crocombe |
Publisher | : John Wiley & Sons |
Total Pages | : 608 |
Release | : 2021-04-28 |
Genre | : Science |
ISBN | : 1119636434 |
The most comprehensive resource available on the many applications of portable spectrometers, including material not found in any other published work Portable Spectroscopy and Spectrometry: Volume Two is an authoritative and up-to-date compendium of the diverse applications for portable spectrometers across numerous disciplines. Whereas Volume One focuses on the specific technologies of the portable spectrometers themselves, Volume Two explores the use of portable instruments in wide range of fields, including pharmaceutical development, clinical research, food analysis, forensic science, geology, astrobiology, cultural heritage and archaeology. Volume Two features contributions by a multidisciplinary team of experts with hands-on experience using portable instruments in their respective areas of expertise. Organized both by instrumentation type and by scientific or technical discipline, 21 detailed chapters cover various applications of portable ion mobility spectrometry (IMS), infrared and near-infrared (NIR) spectroscopy, Raman and x-ray fluorescence (XRF) spectroscopy, smartphone spectroscopy, and many others. Filling a significant gap in literature on the subject, the second volume of Portable Spectroscopy and Spectrometry: Features a significant amount of content published for the first time, or not available in existing literature Brings together work by authors with assorted backgrounds and fields of study Discusses the central role of applications in portable instrument development Covers the algorithms, calibrations, and libraries that are of critical importance to successful applications of portable instruments Includes chapters on portable spectroscopy applications in areas such as the military, agriculture and feed, hazardous materials (HazMat), art conservation, and environmental science Portable Spectroscopy and Spectrometry: Volume Two is an indispensable resource for developers of portable instruments in universities, research institutes, instrument companies, civilian and government purchasers, trainers, operators of portable instruments, and educators and students in portable spectroscopy courses.
Author | : M. Edward Motamedi |
Publisher | : SPIE Press |
Total Pages | : 640 |
Release | : 2005 |
Genre | : Technology & Engineering |
ISBN | : 9780819450210 |
This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.
Author | : Prosenjit Rai-Choudhury |
Publisher | : |
Total Pages | : 528 |
Release | : 2000-12-30 |
Genre | : |
ISBN | : 9780819495983 |
Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). It is useful as a professional reference, technology user's guide, and as a textbook.
Author | : Cornelius T. Leondes |
Publisher | : Springer Science & Business Media |
Total Pages | : 2142 |
Release | : 2007-10-08 |
Genre | : Technology & Engineering |
ISBN | : 0387257861 |
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author | : Mark A. Mentzer |
Publisher | : CRC Press |
Total Pages | : 368 |
Release | : 2017-12-19 |
Genre | : Medical |
ISBN | : 143982908X |
How does the field of optical engineering impact biotechnology? Perhaps for the first time, Applied Optics Fundamentals and Device Applications: Nano, MOEMS, and Biotechnology answers that question directly by integrating coverage of the many disciplines and applications involved in optical engineering, and then examining their applications in nanobiotechnology. Written by a senior U.S. Army research scientist and pioneer in the field of optical engineering, this book addresses the exponential growth in materials, applications, and cross-functional relevance of the many convergent disciplines making optical engineering possible, including nanotechnology, MEMS, (MOEMS), and biotechnology. Integrates Coverage of MOEMS, Optics, and Nanobiotechnology—and Their Market Applications Providing an unprecedented interdisciplinary perspective of optics technology, this book describes everything from core principles and fundamental relationships, to emerging technologies and practical application of devices and systems—including fiber-optic sensors, integrated and electro-optics, and specialized military applications. The author places special emphasis on: Fiber sensor systems Electro-optics and acousto-optics Optical computing and signal processing Optical device performance Thin film magnetic memory MEMS, MOEMS, nano- and bionanotechnologies Optical diagnostics and imaging Integrated optics Design constraints for materials, manufacturing, and application space Bridging the technology gaps between interrelated fields, this reference is a powerful tool for students, engineers and scientists in the electrical, chemical, mechanical, biological, aerospace, materials, and optics fields. Its value also extends to applied physicists and professionals interested in the relationships between emerging technologies and cross-disciplinary opportunities. Author Mark A. Mentzer is a pioneer in the field of optical engineering. He is a senior research scientist at the U.S. Army Research Laboratory in Maryland. Much of his current work involves extending the fields of optical engineering and solid state physics into the realm of biochemistry and molecular biology, as well as structured research in biophotonics.
Author | : Shekhar Bhansali |
Publisher | : Elsevier |
Total Pages | : 511 |
Release | : 2012-07-18 |
Genre | : Technology & Engineering |
ISBN | : 0857096273 |
The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy
Author | : Zhuoqing Yang |
Publisher | : Springer Nature |
Total Pages | : 312 |
Release | : 2021-10-12 |
Genre | : Technology & Engineering |
ISBN | : 303079749X |
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Author | : Huikai Xie |
Publisher | : MDPI |
Total Pages | : 176 |
Release | : 2019-08-06 |
Genre | : Technology & Engineering |
ISBN | : 3039213032 |
This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines
Author | : Mario N. Armenise |
Publisher | : Springer Science & Business Media |
Total Pages | : 123 |
Release | : 2010-11-22 |
Genre | : Technology & Engineering |
ISBN | : 3642154948 |
This monograph collects and critically reviews the main results obtained by the scientific community in gyroscope technologies research field. It describes architectures, design techniques and fabrication technology of angular rate sensors proposed in literature. MEMS, MOEMS, optical and mechanical technologies are discussed together with achievable performance. The book also consideres future research trends aimed to cover special applications. The book is intended for researchers and Ph.D. students interested in modelling, design and fabrication of gyros. The book may be a useful education support in some university courses focused on gyro technologies.