Ion Beam Processing Of Advanced Electronic Materials
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Author | : B. R. Appleton |
Publisher | : |
Total Pages | : 426 |
Release | : 1985-08-30 |
Genre | : Technology & Engineering |
ISBN | : |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author | : |
Publisher | : |
Total Pages | : 1044 |
Release | : 1990 |
Genre | : Power resources |
ISBN | : |
Author | : |
Publisher | : |
Total Pages | : 704 |
Release | : 1995 |
Genre | : Aeronautics |
ISBN | : |
Author | : Federal Coordinating Council for Science, Engineering, and Technology. Committee on Industry and Technology |
Publisher | : |
Total Pages | : 60 |
Release | : 1994 |
Genre | : Materials science |
ISBN | : |
Author | : |
Publisher | : |
Total Pages | : 228 |
Release | : 1992 |
Genre | : Materials science |
ISBN | : |
Author | : Isao Yamada |
Publisher | : CRC Press |
Total Pages | : 258 |
Release | : 2015-08-20 |
Genre | : Science |
ISBN | : 1498711766 |
Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, f
Author | : Richard B. Fair |
Publisher | : Academic Press |
Total Pages | : 441 |
Release | : 2012-12-02 |
Genre | : Technology & Engineering |
ISBN | : 0323139809 |
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Author | : P.L.F. Hemment |
Publisher | : Newnes |
Total Pages | : 630 |
Release | : 2012-12-02 |
Genre | : Technology & Engineering |
ISBN | : 0444596313 |
Containing the proceedings of three symposia in the E-MRS series this book is divided into two parts. Part one is concerned with ion beam processing, a particularly powerful and versatile technology which can be used both to synthesise and modify materials, including metals, semiconductors, ceramics and dielectrics, with great precision and excellent control. Furthermore it also deals with the correlated effects in atomic and cluster ion bombardment and implantation.Part two deals with the deposition techniques, characterization and applications of advanced ceramic, metallic and polymeric coatings or thin films for surface protection against corrosion, erosion, abrasion, diffusion and for lubrication of contracting surfaces in relative motion.
Author | : Ram Kossowsky |
Publisher | : CRC Press |
Total Pages | : 348 |
Release | : 1989-07-31 |
Genre | : Technology & Engineering |
ISBN | : 9780849347696 |
These volumes present the general parctitioners in engineering with a comprehensive discussion of technological surfaces, their interactions with environments, and the various modification techniques available to improve their performance. In each subject, applications to metals, ceramics, and polymers are emphasized. The interactions with the environment are described: corrosion (chemical), friction and waer (mechanical), and bioreactivity (physiological). Reviews of major modification schemes such as chemical vapor deposition, physical vapor deposition, laser beam interactions, chemical infusion, and ion implantation are presented. In summary, reviews of applications of the modification techniques to optimize the performances of structural components, tools, electronic devices, and implantable medical devices, manufactured out of metals, ceramic, and polymers, are described.
Author | : G. R. Srinivasan |
Publisher | : |
Total Pages | : 826 |
Release | : 1991 |
Genre | : Semiconductors |
ISBN | : |