Integrated Circuit Metrology, Inspection, and Process Control V
| Author | : William H. Arnold |
| Publisher | : SPIE-International Society for Optical Engineering |
| Total Pages | : 648 |
| Release | : 1991 |
| Genre | : Technology & Engineering |
| ISBN | : |
Integrated Circuit Metrology Inspection And Process Control V
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Integrated Circuit Metrology, Inspection, and Process Control VI
| Author | : Michael T. Postek |
| Publisher | : SPIE-International Society for Optical Engineering |
| Total Pages | : 716 |
| Release | : 1992 |
| Genre | : Technology & Engineering |
| ISBN | : |
Integrated Circuit Metrology, Inspection, and Process Control
| Author | : Kevin M. Monahan |
| Publisher | : |
| Total Pages | : 340 |
| Release | : 1987 |
| Genre | : Technology & Engineering |
| ISBN | : |
Integrated Circuit Metrology, Inspection, and Process Control II
| Author | : Kevin M. Monahan |
| Publisher | : |
| Total Pages | : 476 |
| Release | : 1988 |
| Genre | : Mathematics |
| ISBN | : |
Integrated Circuit Metrology, Inspection, and Process Control III
| Author | : Kevin M. Monahan |
| Publisher | : |
| Total Pages | : 556 |
| Release | : 1989 |
| Genre | : Technology & Engineering |
| ISBN | : |
National Semiconductor Metrology Program
| Author | : National Institute of Standards and Technology (U.S.) |
| Publisher | : |
| Total Pages | : 160 |
| Release | : 2000 |
| Genre | : Semiconductors |
| ISBN | : |
Handbook of Silicon Semiconductor Metrology
| Author | : Alain C. Diebold |
| Publisher | : CRC Press |
| Total Pages | : 703 |
| Release | : 2001-06-29 |
| Genre | : Technology & Engineering |
| ISBN | : 0203904540 |
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
National Semiconductor Metrology Program
| Author | : National Semiconductor Metrology Program (U.S.) |
| Publisher | : |
| Total Pages | : 136 |
| Release | : 1998 |
| Genre | : Semiconductors |
| ISBN | : |
