Handbook of Critical Dimension Metrology and Process Control

Handbook of Critical Dimension Metrology and Process Control
Author: Kevin M. Monahan
Publisher: SPIE-International Society for Optical Engineering
Total Pages: 376
Release: 1994
Genre: Electronic industries
ISBN:

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.