In Line Characterization Techniques For Performance And Yield Enhancement In Microelectronic Manufacturing Ii
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| Author | : Sergio Ajuria |
| Publisher | : SPIE-International Society for Optical Engineering |
| Total Pages | : 258 |
| Release | : 1998 |
| Genre | : Computers |
| ISBN | : |
A collection of papers on in-line characterization techniques for performance and yield enhancement in microelectronic manufacturing. They cover: electrical/field emission techniques; optical and em-wave techniques; and surface photovoltage techniques.
| Author | : Damon DeBusk |
| Publisher | : SPIE-International Society for Optical Engineering |
| Total Pages | : 186 |
| Release | : 1997-01-01 |
| Genre | : Integrated circuits |
| ISBN | : |
| Author | : |
| Publisher | : |
| Total Pages | : 266 |
| Release | : 1998 |
| Genre | : Integrated circuits |
| ISBN | : |
| Author | : |
| Publisher | : |
| Total Pages | : 266 |
| Release | : 2001 |
| Genre | : Integrated circuits |
| ISBN | : |
| Author | : |
| Publisher | : |
| Total Pages | : 360 |
| Release | : 1999 |
| Genre | : Integrated circuits |
| ISBN | : |
| Author | : Bernd O. Kolbesen (Chemiker.) |
| Publisher | : The Electrochemical Society |
| Total Pages | : 568 |
| Release | : 1999 |
| Genre | : Technology & Engineering |
| ISBN | : 9781566772396 |
| Author | : Gudrun Kissinger |
| Publisher | : Society of Photo Optical |
| Total Pages | : 242 |
| Release | : 2001 |
| Genre | : Technology & Engineering |
| ISBN | : 9780819441072 |
| Author | : Sergio Ajuria |
| Publisher | : SPIE-International Society for Optical Engineering |
| Total Pages | : 352 |
| Release | : 1999 |
| Genre | : Science |
| ISBN | : |
These conference proceedings consist of 47 papers addressing a variety of issues concerning in-line methods and monitors for process and yield improvement.
| Author | : |
| Publisher | : |
| Total Pages | : 166 |
| Release | : 2002 |
| Genre | : Engineering |
| ISBN | : |
| Author | : |
| Publisher | : |
| Total Pages | : 218 |
| Release | : 1997 |
| Genre | : Integrated circuits |
| ISBN | : |
