Gan Microelectromechanical System Resonators
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| Author | : Harmeet Bhugra |
| Publisher | : Springer |
| Total Pages | : 423 |
| Release | : 2017-01-09 |
| Genre | : Technology & Engineering |
| ISBN | : 3319286889 |
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
| Author | : Reza Abdolvand |
| Publisher | : MDPI |
| Total Pages | : 147 |
| Release | : 2019-02-15 |
| Genre | : Science |
| ISBN | : 3038976261 |
This book is a printed edition of the Special Issue "Micro-Resonators: The Quest for Superior Performance" that was published in Micromachines
| Author | : Bharat Bhushan |
| Publisher | : Springer |
| Total Pages | : 1704 |
| Release | : 2017-11-05 |
| Genre | : Technology & Engineering |
| ISBN | : 3662543575 |
This comprehensive handbook has become the definitive reference work in the field of nanoscience and nanotechnology, and this 4th edition incorporates a number of recent new developments. It integrates nanofabrication, nanomaterials, nanodevices, nanomechanics, nanotribology, materials science, and reliability engineering knowledge in just one volume. Furthermore, it discusses various nanostructures; micro/nanofabrication; micro/nanodevices and biomicro/nanodevices, as well as scanning probe microscopy; nanotribology and nanomechanics; molecularly thick films; industrial applications and nanodevice reliability; societal, environmental, health and safety issues; and nanotechnology education. In this new edition, written by an international team of over 140 distinguished experts and put together by an experienced editor with a comprehensive understanding of the field, almost all the chapters are either new or substantially revised and expanded, with new topics of interest added. It is an essential resource for anyone working in the rapidly evolving field of key technology, including mechanical and electrical engineers, materials scientists, physicists, and chemists.
| Author | : Vikas Choudhary |
| Publisher | : CRC Press |
| Total Pages | : 481 |
| Release | : 2017-12-19 |
| Genre | : Medical |
| ISBN | : 135183228X |
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
| Author | : Nianjun Yang |
| Publisher | : Springer |
| Total Pages | : 524 |
| Release | : 2019-04-02 |
| Genre | : Technology & Engineering |
| ISBN | : 303012469X |
This book is in honor of the contribution of Professor Xin Jiang (Institute of Materials Engineering, University of Siegen, Germany) to diamond. The objective of this book is to familiarize readers with the scientific and engineering aspects of CVD diamond films and to provide experienced researchers, scientists, and engineers in academia and industry with the latest developments and achievements in this rapidly growing field. This 2nd edition consists of 14 chapters, providing an updated, systematic review of diamond research, ranging from its growth, and properties up to applications. The growth of single-crystalline and doped diamond films is included. The physical, chemical, and engineering properties of these films and diamond nanoparticles are discussed from theoretical and experimental aspects. The applications of various diamond films and nanoparticles in the fields of chemistry, biology, medicine, physics, and engineering are presented.
| Author | : Nava Setter |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 416 |
| Release | : 2006-03-30 |
| Genre | : Technology & Engineering |
| ISBN | : 0387233199 |
The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.
| Author | : Xuchun Liu |
| Publisher | : |
| Total Pages | : 316 |
| Release | : 2004 |
| Genre | : |
| ISBN | : |
| Author | : Henry Baltes |
| Publisher | : John Wiley & Sons |
| Total Pages | : 610 |
| Release | : 2013-03-26 |
| Genre | : Technology & Engineering |
| ISBN | : 352767506X |
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
| Author | : Ghenadii Korotcenkov |
| Publisher | : CRC Press |
| Total Pages | : 503 |
| Release | : 2020-01-24 |
| Genre | : Science |
| ISBN | : 1351056492 |
Because of unique water properties, humidity affects materials and many living organisms, including humans. Humidity control is important in various fields, from production management to creating a comfortable living environment. The range of materials that can be used in the development of humidity sensors is very broad, and the third volume of the Handbook of Humidity Measurement offers an analysis on various humidity-sensitive materials and sensor technologies used in the fabrication of humidity sensors and methods acceptable for their testing. Additional features include: numerous strategies for the fabrication and characterization of humidity-sensitive materials and sensing structures used in sensor applications, methods and properties to develop smaller, cheaper, more robust, and accurate devices with better sensitivity and stability, a guide to sensor selection and an overview of the humidity sensor market, and new technology solutions for integration, miniaturization, and specificity of the humidity sensor calibration. Handbook of Humidity Measurement, Volume 3: Sensing Materials and Technologies provides valuable information for practicing engineers, measurement experts, laboratory technicians, project managers in industries and national laboratories, and university students and professors interested in solutions to humidity measurement tasks. Despite the fact that this book is devoted to the humidity sensors, it can be used as a basis for understanding fundamentals of any gas sensor operation and development.
| Author | : Soumen Mandal |
| Publisher | : Springer Nature |
| Total Pages | : 530 |
| Release | : 2024 |
| Genre | : Diamonds, Industrial |
| ISBN | : 3031475569 |
This edited book covers a wide range of novel scientific and engineering aspects of diamond films produced from chemical vapor deposition. It focuses on the most recent developments and achievements in this rapidly growing field from scientists and engineers across the domains of chemistry, biology, medicine, physics, and semiconductor engineering. The latest volume of this consistently well-cited book brings an updated, systematic review of the latest developments in diamond research and application. Featuring contributed chapters from a mix of highly-active international researchers, this new edition presents recent research focusing on topics such as diamond for thermal management in high-power electronics, diamond MOSFETs, water treatment, application of machine learning for nanodiamonds, theoretical aspects of diamond growth, current trends in emerging diamond technologies, and the growth of doped single-crystal diamond. This book is especially appealing to interdisciplinary researchers and industry professionals working on advanced diamond devices and applications, as well as theoretical and computational methods for predicting and designing new diamond materials.
