Annealing Of Sputtered Beta Silicon Carbide
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Author | : Irvin Berman |
Publisher | : |
Total Pages | : 8 |
Release | : 1974 |
Genre | : |
ISBN | : |
Using an RF sputtering and etching module silicon carbide was deposited upon the surface of (100) and (111) silicon, (111) (110) (100) tungsten, and (0001) alpha SiC. Almost all deposits were amorphous initially but after thermal annealing, the thin films on the (100) silicon and on (0001) alpha became single crystal layers. Silicodes of tungsten were formed on the tungsten substrates after annealing. (Author).
Author | : Irvin Berman |
Publisher | : |
Total Pages | : 24 |
Release | : 1972 |
Genre | : Annealing of crystals |
ISBN | : |
Thin films of beta silicon carbide were prepared on alpha silicon carbide substrates by the chemical vapor deposition (CVD) technique involving the hydrogen reduction of silane and propane. The films were prepared under a variety of conditions and subsequently subjected to thermal annealing cycles between 1600 degrees C and 2000 degrees C. It is shown that the single crystallinity of the beta films improved with continued annealing. The beta polytype was found to be stable over the entire range of temperatures studied.
Author | : Irvin Berman |
Publisher | : |
Total Pages | : 0 |
Release | : 1972 |
Genre | : Annealing of crystals |
ISBN | : |
Thin films of beta silicon carbide were prepared on alpha silicon carbide substrates by the chemical vapor deposition (CVD) technique involving the hydrogen reduction of silane and propane. The films were prepared under a variety of conditions and subsequently subjected to thermal annealing cycles between 1600 degrees C and 2000 degrees C. It is shown that the single crystallinity of the beta films improved with continued annealing. The beta polytype was found to be stable over the entire range of temperatures studied.
Author | : Jaesok Ryu |
Publisher | : |
Total Pages | : 464 |
Release | : 1986 |
Genre | : |
ISBN | : |
Author | : John Adam Edmond |
Publisher | : |
Total Pages | : 222 |
Release | : 1987 |
Genre | : |
ISBN | : |
Author | : Tiong Yew Ong |
Publisher | : |
Total Pages | : 296 |
Release | : 1998 |
Genre | : Semiconductors |
ISBN | : |
Author | : |
Publisher | : |
Total Pages | : 456 |
Release | : 1995 |
Genre | : Aeronautics |
ISBN | : |
Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Author | : |
Publisher | : |
Total Pages | : 964 |
Release | : 1976 |
Genre | : Nuclear energy |
ISBN | : |
Author | : Robert C. Marshall |
Publisher | : |
Total Pages | : 714 |
Release | : 1974 |
Genre | : Science |
ISBN | : |
Author | : |
Publisher | : |
Total Pages | : 834 |
Release | : 1990 |
Genre | : Power resources |
ISBN | : |