Understanding MEMS

Understanding MEMS
Author: Luis Castañer
Publisher: John Wiley & Sons
Total Pages: 330
Release: 2015-12-14
Genre: Technology & Engineering
ISBN: 1119055423

The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise. Understanding MEMS: Principles and Applications provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds. Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field. Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also benefit from this consolidated overview, source of relevant equations and extensive solutions to problems. Key features: Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale. Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices. Self-contained study aid featuring problems and solutions. Book companion website hosts Matlab and PSpice codes and viewgraphs.

An Introduction to Microelectromechanical Systems Engineering

An Introduction to Microelectromechanical Systems Engineering
Author: Nadim Maluf
Publisher: Artech House
Total Pages: 312
Release: 2004
Genre: Technology & Engineering
ISBN: 9781580535915

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

Understanding Nanoelectromechanical Quantum Circuits and Systems (NEMX) for the Internet of Things (IoT) Era

Understanding Nanoelectromechanical Quantum Circuits and Systems (NEMX) for the Internet of Things (IoT) Era
Author: Héctor J. De Los Santos
Publisher: CRC Press
Total Pages: 182
Release: 2022-09-01
Genre: Technology & Engineering
ISBN: 100079637X

The operational theme permeating most definitions of the IoT concept, is the wireless communication of networked objects, in particular, smart sensing devices and machines, exchanging data a la Internet. In this book, a detailed look is taken at the fundamental principles of devices and techniques whose exploitation will facilitate the development of compact, power-efficient, autonomous, smart, networked sensing nodes underlying and encompassing the emerging IoT era.The book provides an understanding of nanoelectromechanical quantum circuits and systems (NEMX), as exemplified by firstly the uncovering of their origins, impetus and motivation, and secondly by developing an understanding of their device physics, including, the topics of actuation, mechanical vibration and sensing. Next the fundamentals of key devices, namely, MEMS/NEMS switches, varactors and resonators are covered, including a wide range of implementations. The book then looks at their energy supply via energy harvesting, as derived from wireless energy and mechanical vibrations. Finally, after an introduction to the fundamentals of IoT networks and nodes, the book concludes with an exploration of how the NEMX components are encroaching in a variety of emerging IoT applications.

Analysis and Design Principles of MEMS Devices

Analysis and Design Principles of MEMS Devices
Author: Minhang Bao
Publisher: Elsevier
Total Pages: 327
Release: 2005-04-12
Genre: Technology & Engineering
ISBN: 008045562X

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.

MEMS Reliability

MEMS Reliability
Author: Allyson L. Hartzell
Publisher: Springer Science & Business Media
Total Pages: 300
Release: 2010-11-02
Genre: Technology & Engineering
ISBN: 144196018X

The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

Sensor Technologies for Civil Infrastructures

Sensor Technologies for Civil Infrastructures
Author: Jerome P. Lynch
Publisher: Woodhead Publishing
Total Pages: 678
Release: 2022-07-19
Genre: Technology & Engineering
ISBN: 0081026978

Sensor Technologies for Civil Infrastructure, Volume 1: Sensing Hardware and Data Collection Methods for Performance Assessment, Second Edition, provides an overview of sensor hardware and its use in data collection. The first chapters provide an introduction to sensing for structural performance assessment and health monitoring, and an overview of commonly used sensors and their data acquisition systems. Further chapters address different types of sensor including piezoelectric transducers, fiber optic sensors, acoustic emission sensors, and electromagnetic sensors, and the use of these sensors for assessing and monitoring civil infrastructures. The new edition now includes chapters on machine learning methods and reliability analysis for structural health monitoring. All chapters have been revised to include the latest advances in materials (such as piezoelectric and mechanoluminescent materials), technologies (such as LIDAR), and applications. - Describes sensing hardware and data collection, covering a variety of sensors including LIDAR - Examines fiber optic systems, acoustic emission, piezoelectric sensors, electromagnetic sensors, terahertz technologies, ultrasonic methods, and radar and millimeter wave technology - Covers strain gauges, micro-electro-mechanical systems (MEMS), multifunctional materials and nanotechnology for sensing, and vision-based sensing and lasers - Includes new chapters on machine learning methods and reliability analysis

Modeling MEMS and NEMS

Modeling MEMS and NEMS
Author: John A. Pelesko
Publisher: CRC Press
Total Pages: 382
Release: 2002-11-25
Genre: Mathematics
ISBN: 1420035290

Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

Practical MEMS

Practical MEMS
Author: Ville Kaajakari
Publisher:
Total Pages: 478
Release: 2009
Genre: Technology & Engineering
ISBN: 9780982299104

Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered. Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications. MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.

Piezoelectric MEMS Resonators

Piezoelectric MEMS Resonators
Author: Harmeet Bhugra
Publisher: Springer
Total Pages: 423
Release: 2017-01-09
Genre: Technology & Engineering
ISBN: 3319286889

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

The Selfish Gene

The Selfish Gene
Author: Richard Dawkins
Publisher: Oxford University Press, USA
Total Pages: 372
Release: 1989
Genre: Medical
ISBN: 9780192860927

Science need not be dull and bogged down by jargon, as Richard Dawkins proves in this entertaining look at evolution. The themes he takes up are the concepts of altruistic and selfish behaviour; the genetical definition of selfish interest; the evolution of aggressive behaviour; kinshiptheory; sex ratio theory; reciprocal altruism; deceit; and the natural selection of sex differences. 'Should be read, can be read by almost anyone. It describes with great skill a new face of the theory of evolution.' W.D. Hamilton, Science