Ultra Clean Processing of Semiconductor Surfaces VIII

Ultra Clean Processing of Semiconductor Surfaces VIII
Author: Paul Mertens
Publisher: Trans Tech Publications Ltd
Total Pages: 383
Release: 2007-11-20
Genre: Technology & Engineering
ISBN: 3038131954

Selected, peer reviewed papers from the 8th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) held in Antwerp, Belgium, September 18-20, 2006

Ultra Clean Processing of Semiconductor Surfaces XIII

Ultra Clean Processing of Semiconductor Surfaces XIII
Author: Paul W. Mertens
Publisher: Trans Tech Publications Ltd
Total Pages: 395
Release: 2016-09-05
Genre: Technology & Engineering
ISBN: 3035730849

Selected, peer reviewed papers from the 13th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 12-14, 2016, Knokke, Belgium

Ultra Clean Processing of Semiconductor Surfaces XVI

Ultra Clean Processing of Semiconductor Surfaces XVI
Author: Paul Mertens
Publisher: Trans Tech Publications Ltd
Total Pages: 363
Release: 2023-08-14
Genre: Science
ISBN: 303641312X

Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023) Selected peer-reviewed full text papers from the 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 12-14, 2023, Brugge, Belgium

Ultra Clean Processing of Silicon Surfaces VII

Ultra Clean Processing of Silicon Surfaces VII
Author: Paul Mertens
Publisher: Trans Tech Publications Ltd
Total Pages: 383
Release: 2005-04-01
Genre: Technology & Engineering
ISBN: 3038130257

UCPSS 2004 Proceddings of the 7th International Symposium on Ultra Cleyn Processing of Silicon Surfaces (UCPSS), Brussels, Belgium, Sept. 20-22, 2004

Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10

Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10
Author: Takeshi Hattori
Publisher: The Electrochemical Society
Total Pages: 497
Release: 2007
Genre: Microelectronics
ISBN: 156677568X

This issue covers topics related to the removal of contaminants from and conditioning of Si (SOI), SiC, Ge, SiGe, and III-V semiconductor surfaces; cleaning media, including non-aqueous cleaning methods and tools; front- and back-end cleaning operations; integrated cleaning; cleaning of MEMS; photomasks (reticles); porous low-k dielectrics; post-CMP cleaning; wafer bevel cleaning and polishing; characterization, evaluation, and monitoring of cleaning; correlation with device performance as well as cleaning of equipment and storage and handling hardware. The hardcover edition includes a bonus CD-ROM of Cleaning Technology in Semiconductor Device Manufacturing 1989?2007: Proceedings from the ECS Semiconductor Cleaning Symposia 1?10. This bonus material is not available with the PDF edition.

Ultraclean Surface Processing of Silicon Wafers

Ultraclean Surface Processing of Silicon Wafers
Author: Takeshi Hattori
Publisher: Springer Science & Business Media
Total Pages: 634
Release: 2013-03-09
Genre: Technology & Engineering
ISBN: 3662035359

A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for the first time the secrets of these highly productive institutions. They describe the techniques and equipment necessary for the preparation of clean high-quality semiconductor surfaces as a first step in high-yield/high-quality device production. This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.

Power Semiconductor Devices and Circuits

Power Semiconductor Devices and Circuits
Author: A.A. Jaecklin
Publisher: Springer Science & Business Media
Total Pages: 401
Release: 2012-12-06
Genre: Science
ISBN: 1461533228

This symposium was the sCientific-technical event of the centennial celebration of the Asea Brown Boveri Switzerland. The purpose was to assess the present state of the art as well as shaping the basis for future progress in the area of power devices and related power circuits. The merger of Brown Boveri (BBC) with Asea to Asea Brown Boveri (ABB) three years ago gave new stimulus and enriched the technical substance of the symposium. By 1991, 100 years after the formation of BBC in Switzerland as a single company, this organization has been decentralized, forming 35 independent ABB companies. One of them - ABB Semiconductors Ltd. - directly deals with the power semiconductor business. These significant changes reflect the changes in the market place: increased competition and higher customer expectations have to be fulfilled. In line with the core business activities of ABB and with the concept of sustainable development, it is natural for ABB to be active in the area of power devices and circuits. Increased awareness towards energy conservation is one of the main drives for these activities. User friendliness is another drive: integration of intelligent functions, e.g. protection and/or increased direct computer interfacing of the power circuits. Therefore, also the R&D activities related to the subject of thIs symposium will in the future be characterized by an even stronger coupling with the market needs. For the members of the R&D Laboratories this means improved customer partnership beyond operational excellence.