Two And Three Dimensional Ultrananocrystalline Diamond Uncd Structures For A High Resolution Diamond Based Mems Technology
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Author | : |
Publisher | : |
Total Pages | : 9 |
Release | : 2000 |
Genre | : |
ISBN | : |
Silicon is currently the most commonly used material for the fabrication of microelectromechanical systems (MEMS). However, silicon-based MEMS will not be suitable for long-endurance devices involving components rotating at high speed, where friction and wear need to be minimized, components such as 2-D cantilevers that may be subjected to very large flexural displacements, where stiction is a problem, or components that will be exposed to corrosive environments. The mechanical, thermal, chemical, and tribological properties of diamond make it an ideal material for the fabrication of long-endurance MEMS components. Cost-effective fabrication of these components could in principle be achieved by coating Si with diamond films and using conventional lithographic patterning methods in conjunction with e. g. sacrificial Ti or SiO2 layers. However, diamond coatings grown by conventional chemical vapor deposition (CVD) methods exhibit a coarse-grained structure that prevents high-resolution patterning, or a fine-grained microstructure with a significant amount of intergranular non-diamond carbon. The authors demonstrate here the fabrication of 2-D and 3-D phase-pure ultrananocrystalline diamond (UNCD) MEMS components by coating Si with UNCD films, coupled with lithographic patterning methods involving sacrificial release layers. UNCD films are grown by microwave plasma CVD using C60-Ar or CH4-Ar gas mixtures, which result in films that have 3--5 nm grain size, are 10--20 times smoother than conventionally grown diamond films, are extremely resistant to corrosive environments, and are predicted to have a brittle fracture strength similar to that of single crystal diamond.
Author | : Olga A. Shenderova |
Publisher | : William Andrew |
Total Pages | : 581 |
Release | : 2012-12-31 |
Genre | : Science |
ISBN | : 1437734669 |
Ultrananocrystalline Diamond: Synthesis, Properties, and Applications is a unique practical reference handbook. Written by the leading experts worldwide it introduces the science of UNCD for both the R&D community and applications developers using UNCD in a diverse range of applications from macro to nanodevices, such as energy-saving ultra-low friction and wear coatings for mechanical pump seals and tools, high-performance MEMS/NEMS-based systems (e.g. in telecommunications), the next generation of high-definition flat panel displays, in-vivo biomedical implants, and biosensors. This work brings together the basic science of nanoscale diamond structures, with detailed information on ultra-nanodiamond synthesis, properties, and applications. The book offers discussion on UNCD in its two forms, as a powder and as a chemical vapor deposited film. Also discussed are the superior mechanical, tribological, transport, electrochemical, and electron emission properties of UNCD for a wide range of applications including MEMS/ NEMS, surface acoustic wave (SAW) devices, electrochemical sensors, coatings for field emission arrays, photonic and RF switching, biosensors, and neural prostheses, etc. - Ultrananocrystalline Diamond summarises the most recent developments in the nanodiamond field, and presents them in a way that will be useful to the R&D community in both academic and corporate sectors - Coverage of both nanodiamond particles and films make this a valuable resource for both the nanotechnology community and the field of thin films / vacuum deposition - Written by the world's leading experts in nanodiamond, this second edition builds on its predecessor's reputation as the most up-to-date resource in the field
Author | : Orlando Auciello |
Publisher | : Cambridge University Press |
Total Pages | : 297 |
Release | : 2022-07-21 |
Genre | : Technology & Engineering |
ISBN | : 1009213431 |
A comprehensive guide to the science of a transformational ultrananocrystalline-diamond (UNCDTM) thin film technology enabling a new generation of high-tech and external and implantable medical devices. Edited and co-authored by a co-originator and pioneer in the field, it describes the synthesis and material properties of UNCDTM coatings and multifunctional oxide/nitride thin films and nanoparticles, and how these technologies can be integrated into the development of implantable and external medical devices and treatments of human biological conditions. Bringing together contributions from experts around the world, it covers a range of clinical applications, including ocular implants, glaucoma treatment devices, implantable prostheses, scaffolds for stem cell growth and differentiation, Li-ion batteries for defibrillators and pacemakers, and drug delivery and sensor devices. Technology transfer and regulatory issues are also covered. This is essential reading for researchers, engineers and practitioners in the field of high-tech and medical device technologies across materials science and biomedical engineering.
Author | : Maarten De Boer |
Publisher | : Mrs Proceedings |
Total Pages | : 344 |
Release | : 2000-10-02 |
Genre | : Science |
ISBN | : |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author | : ConferenceSeries |
Publisher | : ConferenceSeries |
Total Pages | : 150 |
Release | : 2018-08-29 |
Genre | : Technology & Engineering |
ISBN | : |
September 04-06, 2018 Zurich, Switzerland Key Topics: Advanced Functional Materials, Advanced Optical Materials, Advanced Bio-Materials & Bio-devices, Polymers Science and Engineering, Emerging Areas of Materials Science, Advanced Ceramics and Composite Materials, Advancement in Nanomaterials Science and Nanotechnology, Carbon Based Materials, Materials Science and Engineering, Metals & Metallurgy, Entrepreneurs Investment Meet, Energy Materials and Harvesting, Advanced Computational Materials, Constructional and Engineering Materials, Environmental and Green Materials, Structural Materials, Biosensor and Bio-electronic Materials, Materials Physics, Materials Chemistry, Advanced Materials Engineering, Coatings and Surface Engineering,
Author | : |
Publisher | : |
Total Pages | : 14 |
Release | : 2000 |
Genre | : |
ISBN | : |
MEMS devices are currently fabricated primarily in silicon because of the available surface machining technology. However, Si has poor mechanical and tribological properties, and practical MEMS devices are currently limited primarily to applications involving only bending and flexural motion, such as cantilever accelerometers and vibration sensors, However, because of the poor flexural strength and fracture toughness of Si, and the tendency of Si to adhere to hydrophyllic surfaces, even these simple devices have limited dynamic range. Future MEMS applications that involve significant rolling or sliding contact will require the use of new materials with significantly improved mechanical and tribological properties, and the ability to perform well in harsh environments. Diamond is a superhard material of high mechanical strength, exceptional chemical inertness, and outstanding thermal stability. The brittle fracture strength is 23 times that of Si, and the projected wear life of diamond MEMS moving mechanical assemblies (MEMS-MMAS) is 10,000 times greater than that of Si MMAs. However, as the hardest known material, diamond is notoriously difficult to fabricate. Conventional CVD thin film deposition methods offer an approach to the fabrication of ultra-small diamond structures, but the films have large grain size, high internal stress, poor intergranular adhesion, and very rough surfaces, and are consequently ill-suited for MEMS-MMA applications. A thin film deposition process has been developed that produces phase-pure ultrananocrystalline diamond (UNCD) with morphological and mechanical properties that are ideally suited for MEMS applications in general, and MMA use in particular. We have developed lithographic techniques for the fabrication of diamond microstructure including cantilevers and multi-level devices, acting as precursors to micro-bearings and gears, making UNCD a promising material for the development of high performance MEMS devices.
Author | : Orlando Auciello |
Publisher | : Cambridge University Press |
Total Pages | : 297 |
Release | : 2022-07-21 |
Genre | : Technology & Engineering |
ISBN | : 1107088739 |
A comprehensive guide to ultrananocrystalline-diamond (UNCDTM) and thin film technology for implantable and external medical devices, edited by a pioneer in the field. Covering synthesis and properties, clinical applications, and regulation, it is essential reading for researchers and practitioners in materials science and biomedical engineering.
Author | : |
Publisher | : |
Total Pages | : 508 |
Release | : 2001 |
Genre | : Micromechanics |
ISBN | : |
Author | : Olga A. Shenderova |
Publisher | : Noyes Publications |
Total Pages | : 600 |
Release | : 2006 |
Genre | : Technology & Engineering |
ISBN | : 9780815515241 |
This unique, practical reference brings together the basic science of nanoscale carbon structures, particularly its diamond phase, with detailed information on nanodiamond synthesis, properties, and applications. Readers learn about the superior mechanical, tribological, transport, electrochemical, and electron emission properties of UNCD for a wide range of applications.
Author | : Y-C. Chen |
Publisher | : Elsevier Inc. Chapters |
Total Pages | : 23 |
Release | : 2013-03-19 |
Genre | : Technology & Engineering |
ISBN | : 0128088044 |
Diamond films have been considered as ideal candidates for protective coatings on bioimplants, as bioimplants themselves or as a guide for neural differentiation, because of their excellent mechanical properties, functional amenability, biocompatibility, and unique nanostructures. We separate nanocrystalline diamond films into two categories based on growth chemistries, nanostructure, and properties: nanocrystalline diamond (NCD) and ultrananocrystalline diamond (UNCD). UNCD is suitable for application as a hermetic coating for protection of implantable artificial retina medical devices, and also contributes to improvement of neural stem cell (NSC)-based cell transplantation, tissue engineering for neural tissue repair and regeneration and study of neural cell differentiation.