Silicon Micromachining with Applications in Sensors and Actuators
Author | : Lars Tenerz |
Publisher | : |
Total Pages | : 34 |
Release | : 1989 |
Genre | : Anisotropy |
ISBN | : 9789155424183 |
Download Silicon Micromachining With Applications In Sensors And Actuators full books in PDF, epub, and Kindle. Read online free Silicon Micromachining With Applications In Sensors And Actuators ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Author | : Lars Tenerz |
Publisher | : |
Total Pages | : 34 |
Release | : 1989 |
Genre | : Anisotropy |
ISBN | : 9789155424183 |
Author | : P. Rai-Choudhury |
Publisher | : SPIE Press |
Total Pages | : 544 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9780819437167 |
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Author | : Prem Pal |
Publisher | : CRC Press |
Total Pages | : 315 |
Release | : 2017-04-07 |
Genre | : Science |
ISBN | : 1315341271 |
Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
Author | : Benedetto Vigna |
Publisher | : Springer Nature |
Total Pages | : 988 |
Release | : 2022-04-12 |
Genre | : Technology & Engineering |
ISBN | : 3030801357 |
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
Author | : Cornelius T. Leondes |
Publisher | : Springer Science & Business Media |
Total Pages | : 2142 |
Release | : 2007-10-08 |
Genre | : Technology & Engineering |
ISBN | : 0387257861 |
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author | : Markku Tilli |
Publisher | : Elsevier |
Total Pages | : 1028 |
Release | : 2020-04-17 |
Genre | : Technology & Engineering |
ISBN | : 012817787X |
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author | : Chang Liu |
Publisher | : |
Total Pages | : 320 |
Release | : 1996 |
Genre | : Electronic dissertations |
ISBN | : |
Author | : H.S. Tzou |
Publisher | : Springer Science & Business Media |
Total Pages | : 478 |
Release | : 2012-12-06 |
Genre | : Technology & Engineering |
ISBN | : 9401118183 |
Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life. This book presents a unique overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc. These are four essential subjects emphasized in the book: 1. Survey of the (current) research and development; 2. Fundamental theories and tools; 3. Practical applications. 4. Outlining future research and development.
Author | : M. Elwenspoek |
Publisher | : Springer Science & Business Media |
Total Pages | : 306 |
Release | : 2012-12-06 |
Genre | : Technology & Engineering |
ISBN | : 3662043211 |
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).