Silicon Micromachined Sensors and Actuators for Fluid Mechanics Applications
Author | : Chang Liu |
Publisher | : |
Total Pages | : 320 |
Release | : 1996 |
Genre | : Electronic dissertations |
ISBN | : |
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Author | : Chang Liu |
Publisher | : |
Total Pages | : 320 |
Release | : 1996 |
Genre | : Electronic dissertations |
ISBN | : |
Author | : M. Elwenspoek |
Publisher | : Springer Science & Business Media |
Total Pages | : 306 |
Release | : 2012-12-06 |
Genre | : Technology & Engineering |
ISBN | : 3662043211 |
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
Author | : Khalil Najafi |
Publisher | : |
Total Pages | : 22 |
Release | : 1997 |
Genre | : |
ISBN | : |
A combined microactuator/microsensor system has been developed using silicon micromachining techniques for use in high speed jets and control of screech in these jets. The 14 microns-thick electrostatic microactuator was fabricated and tested at the exit of a supersonic axisymmetric jet for the introduction of perturbations into the convectively unstable supersonic shear layer. It can be forced into mechanical resonance at frequencies of 5/14 kHz at an amplitude of greater then 70 microns, thus generating significant disturbances into the macro scale jet flow, and survive operation at speeds of>210 m/s. These microactuators have survived hundreds of experiments in the harsh jet environment, and their performance matches or exceeds that of other macro actuators. An array of micromachined sound detectors for the detection of onset of jet screech has also been fabricated. The detectors use stress compensated PECVD silicon nitride/oxide membranes together with monocrystalline ion-implanted p++ silicon piezoresistors to achieve high sensitivity. They have a static sensitivity of 1.1 uV/VPa with a 2% nonlinearity over a pressure range of 10kPa. A chip has been fabricated that supports an array of microactuators and sound detectors. Ongoing investigations are aimed at developing a technique to modify, and ultimately control, the feedback loop responsible for the creation of screech.
Author | : Cornelius T. Leondes |
Publisher | : Springer Science & Business Media |
Total Pages | : 2142 |
Release | : 2007-10-08 |
Genre | : Technology & Engineering |
ISBN | : 0387257861 |
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author | : Yoseph Bar-Cohen |
Publisher | : SPIE Press |
Total Pages | : 790 |
Release | : 2004 |
Genre | : Artificial organs |
ISBN | : 9780819452979 |
Covers the field of EAP with attention to all aspects and full infrastructure, including the available materials, analytical models, processing techniques, and characterization methods. This second edition covers advances in EAP in electric EAP, electroactive polymer gels, ionomeric polymer-metal composites, and carbon nanotube actuators.
Author | : Stephen Beeby |
Publisher | : Artech House |
Total Pages | : 282 |
Release | : 2004 |
Genre | : Technology & Engineering |
ISBN | : 1580535364 |
Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
Author | : Miko Elwenspoek |
Publisher | : Springer |
Total Pages | : 295 |
Release | : 2012-11-28 |
Genre | : Technology & Engineering |
ISBN | : 9783662043226 |
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
Author | : Cornelius T. Leondes |
Publisher | : Springer |
Total Pages | : 418 |
Release | : 2006-09-06 |
Genre | : Technology & Engineering |
ISBN | : 9780387245201 |
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author | : Mohamed Gad-el-Hak |
Publisher | : CRC Press |
Total Pages | : 576 |
Release | : 2005-11-29 |
Genre | : Technology & Engineering |
ISBN | : 1420036556 |
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection