Silicon Based Material And Devices
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| Author | : Markku Tilli |
| Publisher | : Elsevier |
| Total Pages | : 670 |
| Release | : 2009-12-08 |
| Genre | : Technology & Engineering |
| ISBN | : 0815519885 |
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
| Author | : Jerzy J. Chruściel |
| Publisher | : Walter de Gruyter GmbH & Co KG |
| Total Pages | : 428 |
| Release | : 2022-03-07 |
| Genre | : Technology & Engineering |
| ISBN | : 3110643677 |
Silicon based materials and polymers are made of silicon containing polymers, mainly macromolecular siloxanes (silicones). This book covers the different kinds of siliconbased polymers: silicones, silsesquioxanes (POSS), and silicon-based copolymers. Other silicon containig polymers: polycarbosilanes, polysilazanes, siloxane-organic copolymers, silicon derived high-tech ceramics: silicon carbide and oxycarbide, silicon nitride, etc. have also a very important practical meaning and a hudge number of practical applications. These materials make up products in a variety of industries and products, including technical and medical applicatons. Polycrystalline silicon is the basic material for large scale photovoltaic (PV) applications as solar cells. Technical applications of crystalline (c-Si) and amorphous (a-Si) silicon (fully inorganic materials), silicon nanowires are still quickly growing, especially in the fi eld of microelectronics, optoelectronics, photonics. and photovoltaics, catalysts, and different electronic devices (e.g. sensors, thermoelectric devices). This book is ideal for researchers and as such covers the industrial perspective of using each class of silicon based materials. Discusses silanes, silane coupling agents (SCA), silica, silicates, silane modified fillers, silsesquioxanes, silicones, and other silicon polymers and copolymers for practical applications as polymeric materials and very useful ingredients in materials science.
| Author | : Sorin Cristoloveanu |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 414 |
| Release | : 1995-06-30 |
| Genre | : Technology & Engineering |
| ISBN | : 9780792395485 |
Silicon on Insulator is more than a technology, more than a job, and more than a venture in microelectronics; it is something different and refreshing in device physics. This book recalls the activity and enthu siasm of our SOl groups. Many contributing students have since then disappeared from the SOl horizon. Some of them believed that SOl was the great love of their scientific lives; others just considered SOl as a fantastic LEGO game for adults. We thank them all for kindly letting us imagine that we were guiding them. This book was very necessary to many people. SOl engineers will certainly be happy: indeed, if the performance of their SOl components is not always outstanding, they can now safely incriminate the relations given in the book rather than their process. Martine, Gunter, and Y. S. Chang can contemplate at last the amount of work they did with the figures. Our SOl accomplices already know how much we borrowed from their expertise and would find it indecent to have their detailed contri butions listed. Jean-Pierre and Dimitris incited the book, while sharing their experience in the reliability of floating bodies. Our families and friends now realize the SOl capability of dielectrically isolating us for about two years in a BOX. Our kids encouraged us to start writing. Our wives definitely gave us the courage to stop writing. They had a hard time fighting the symptoms of a rapidly developing SOl allergy.
| Author | : Jo Nijs |
| Publisher | : CRC Press |
| Total Pages | : 490 |
| Release | : 2021-05-30 |
| Genre | : Science |
| ISBN | : 1000447790 |
One of the first books to cover advanced silicon-based technologies, Advanced Silicon and Semiconducting Silicon Alloy-Based Materials and Devices presents important directions for research into silicon, its alloy-based semiconducting devices, and its development in commercial applications. The first section deals with single/mono crystalline silicon, focusing on the effects of heavy doping; the structure and electronic properties of defects and their impact on devices; the MBE of silicon, silicon alloys, and metals; CVD techniques for silicon and silicon germanium; the material properties of silicon germanium strained layers; silicon germanium heterojunction bipolar applications; FETs, IR detectors, and resonant tunneling devices in silicon, silicon germanium, and d-doped silicon; and the fascinating properties of crystalline silicon carbide and its applications. The second section explores polycrystalline silicon. It examines large grain polysilicon substrates for solar cells; the properties, analysis, and modeling of polysilicon TFTs; the technology of polysilicon TFTs in LCD displays; and the use of polycrystalline silicon and its alloys in VLSI applications. With contributors from leading academic and industrial research centers, this book provides wide coverage of fabrication techniques, material properties, and device applications.
| Author | : Stephen E. Saddow |
| Publisher | : Elsevier |
| Total Pages | : 496 |
| Release | : 2011-11-14 |
| Genre | : Technology & Engineering |
| ISBN | : 0123859077 |
Silicon Carbide (SiC) is a wide-band-gap semiconductor biocompatible material that has the potential to advance advanced biomedical applications. SiC devices offer higher power densities and lower energy losses, enabling lighter, more compact and higher efficiency products for biocompatible and long-term in vivo applications ranging from heart stent coatings and bone implant scaffolds to neurological implants and sensors. The main problem facing the medical community today is the lack of biocompatible materials that are also capable of electronic operation. Such devices are currently implemented using silicon technology, which either has to be hermetically sealed so it cannot interact with the body or the material is only stable in vivo for short periods of time. For long term use (permanent implanted devices such as glucose sensors, brain-machine-interface devices, smart bone and organ implants) a more robust material that the body does not recognize and reject as a foreign (i.e., not organic) material is needed. Silicon Carbide has been proven to be just such a material and will open up a whole new host of fields by allowing the development of advanced biomedical devices never before possible for long-term use in vivo. This book not only provides the materials and biomedical engineering communities with a seminal reference book on SiC that they can use to further develop the technology, it also provides a technology resource for medical doctors and practitioners who are hungry to identify and implement advanced engineering solutions to their everyday medical problems that currently lack long term, cost effective solutions. - Discusses Silicon Carbide biomedical materials and technology in terms of their properties, processing, characterization, and application, in one book, from leading professionals and scientists - Critical assesses existing literature, patents and FDA approvals for clinical trials, enabling the rapid assimilation of important data from the current disparate sources and promoting the transition from technology research and development to clinical trials - Explores long-term use and applications in vivo in devices and applications with advanced sensing and semiconducting properties, pointing to new product devekipment particularly within brain trauma, bone implants, sub-cutaneous sensors and advanced kidney dialysis devices
| Author | : Pio Capezzuto |
| Publisher | : Elsevier |
| Total Pages | : 339 |
| Release | : 1995-10-10 |
| Genre | : Science |
| ISBN | : 0080539106 |
Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced. - Focuses on the plasma chemistry of amorphous silicon-based materials - Links fundamental growth kinetics with the resulting semiconductor film properties and performance of electronic devices produced - Features an international group of contributors - Provides the first comprehensive coverage of the subject, from deposition technology to materials characterization to applications and implementation in state-of-the-art devices
| Author | : Sabu Thomas |
| Publisher | : Elsevier |
| Total Pages | : 391 |
| Release | : 2021-09-24 |
| Genre | : Technology & Engineering |
| ISBN | : 012824254X |
Silicon-Based Hybrid Nanoparticles: Fundamentals, Properties, and Applications focuses on the fundamental principles and promising applications of silicon-based hybrid nanoparticles in nanoelectronics, energy storage/conversion, catalysis, sensors, biomedicine, environment and imaging. This book is an important reference source for materials scientists and engineers who are seeking to understand more about the major properties and applications of silicon-based hybrid nanoparticles. As the hybridization of silicon nanoparticles with other semiconductors or metal oxides nanoparticles may exhibit superior features, when compared to lone, individual nanoparticles, this book provides the latest insights. In addition, the silicon/iron oxide hybrid nanoparticles also possess excellent fluorescence, super-paramagnetism, and biocompatibility that can be effectively used for the diagnostic imaging system in vivo. Similarly, gold-silicon nanohybrids could be used as highly efficient near-infrared hyperthermia agents for cancer cell destruction. - Outlines the major thermal, electrical, optical, magnetic and toxic properties of silicon-based hybrid nanoparticles - Describes major applications in energy, environmental science and catalysis - Assesses the major challenges to manufacturing silicon-based nanostructured materials on an industrial scale
| Author | : E. Kasper |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 367 |
| Release | : 2005-12-11 |
| Genre | : Technology & Engineering |
| ISBN | : 3540263829 |
Quantum size effects are becoming increasingly important in microelectronics, as the dimensions of the structures shrink laterally towards 100 nm and vertically towards 10 nm. Advanced device concepts will exploit these effects for integrated circuits with novel or improved properties. Keeping in mind the trend towards systems on chip, this book deals with silicon-based quantum devices and focuses on room-temperature operation. The basic physical principles, materials, technological aspects, and fundamental device operation are discussed in an interdisciplinary manner. It is shown that silicon-germanium (SiGe) heterostructure devices will play a key role in realizing silicon-based quantum electronics.
| Author | : François Ganachaud |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 285 |
| Release | : 2008-08-09 |
| Genre | : Technology & Engineering |
| ISBN | : 1402085281 |
Silicon Based Polymers presents highlights in advanced research and technological innovations using macromolecular organosilicon compounds and systems, as presented in the 2007 ISPO congress. Silicon-containing materials and polymers are used all over the world and in a variety of industries, domestic products and high technology applications. Among them, silicones are certainly the most well–known, however there are still new properties discovered and preparative processes developed all the time, therefore adding to their potential. Less known, but in preparation for the future, are other silicon containing-polymers which are now close to maturity and in fact some are already available like polysilsesquioxanes and polysilanes. All these silicon based materials can adopt very different structures like chains, dendrimers, hyperbranched and networks, physical and chemical gels. The result is a vast array of materials with applications in various areas such as optics, electronics, ionic electrolytes, liquid crystals, biomaterials, ceramics and concrete, paints and coatings ... all needed to face the environmental, energetical and technological issues of today. Some industrial aspects of the applications of these materials will also be presented.
| Author | : Markku Tilli |
| Publisher | : William Andrew |
| Total Pages | : 827 |
| Release | : 2015-09-02 |
| Genre | : Technology & Engineering |
| ISBN | : 0323312233 |
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures - Geared towards practical applications rather than theory
