The work performed for this contract focused on the saturation of light-induced effects, hydrogen-mediated metastability and growth, defects and electronic properties, and remote hydrogen plasma growth. This work included research on hydrogen chemical reactions, hydrogen density-of-states model and metastability, hydrogen bonding configurations, a model for the role of hydrogen complexes in the metastability, and hydrogen chemical potential and growth structure. This document also covers research on thermal generation currents in p-i-n diodes, field dependence of the generation current, metastability effects at contacts, and potential fluctuations in compensated a-Si:H. Information is included on plasma diagnostics using electron spin resonance and nuclear magnetic resonance measurements of remote hydrogen plasma films.