Advances in Rapid Thermal Processing
Author | : Fred Roozeboom |
Publisher | : The Electrochemical Society |
Total Pages | : 470 |
Release | : 1999 |
Genre | : Technology & Engineering |
ISBN | : 9781566772327 |
Download Rapid Thermal And Integrated Processing Iv Volume 470 full books in PDF, epub, and Kindle. Read online free Rapid Thermal And Integrated Processing Iv Volume 470 ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Author | : Fred Roozeboom |
Publisher | : The Electrochemical Society |
Total Pages | : 470 |
Release | : 1999 |
Genre | : Technology & Engineering |
ISBN | : 9781566772327 |
Author | : Materials Research Society |
Publisher | : |
Total Pages | : 432 |
Release | : 1998 |
Genre | : Chemical vapor deposition |
ISBN | : |
Author | : Fred Roozeboom |
Publisher | : The Electrochemical Society |
Total Pages | : 482 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9781566772747 |
The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.
Author | : Ron M. Anderson |
Publisher | : |
Total Pages | : 320 |
Release | : 1997 |
Genre | : Science |
ISBN | : |
Successful transmission electron microscopy (TEM) experimentation depends on many things, one being specimen preparation. Whereas TEM samples of bulk metallic or ceramic materials can be prepared in a straightforward manner, the need to examine nonbulk and/or other classes of materials creates a need for more specialized preparation methods. This book from MRS, the fourth in a successful series, pioneers novel methods or ways of characterizing the specimen preparation process. Contributions to the book are tutorial in nature, and therefore somewhat longer than usual. Papers cover both general and materials-specific specimen preparation methods. Metallic, polymer, plastic, semiconducting, ceramic and magnetic materials as found in bulk, thin-film, dispersed and powdered forms are discussed.
Author | : Electrochemical Society. Energy Technology Division |
Publisher | : The Electrochemical Society |
Total Pages | : 318 |
Release | : 1999 |
Genre | : Technology & Engineering |
ISBN | : 9781566772334 |
Author | : Prashant N. Kumta |
Publisher | : Mrs Proceedings |
Total Pages | : 496 |
Release | : 1998-08-03 |
Genre | : Technology & Engineering |
ISBN | : |
Containing 65 papers from the symposium titled Chemical Aspects of Electronic Ceramics Processing held in November- December 1997 in Boston, the contents of this volume are divided into five sections: chemical vapor deposition of oxide ceramics; chemical vapor deposition of nonoxide ceramics; solution routes to ceramic materials; characterization and application of ceramic materials; and process characterization as a form of novel processing of ceramic materials. Annotation copyrighted by Book News, Inc., Portland, OR
Author | : John R. Reynolds |
Publisher | : |
Total Pages | : 992 |
Release | : 1998-05-06 |
Genre | : Technology & Engineering |
ISBN | : |
This book shows that research involving electrical, optical and magnetic properties of organic solid-state materials continues to grow both in scope and technological importance. Early studies of charge transport in conducting polymers have evolved from the elucidation of fundamental structure/function relationships to applications such as batteries, simple electrical devices such as diodes, chemical sensors, antistatic coatings, microwave and millimeter wave-absorbing materials, and photochromic devices. A particularly exciting evolution has been the discovery and development of organic light-emitting diodes (OLEDs) which appear to be nearing commercialization in an amazingly short period of time. This application is of particular interest because both electrical and optical properties must be considered.. Topics include: organic light-emitting materials and devices; photonic materials and devices; conducting and electroactive polymers and materials; molecular and supramolecular engineering; organic metals and magnetic materials and poster presentations.
Author | : Scott T. Dunham |
Publisher | : |
Total Pages | : 296 |
Release | : 1998-10-02 |
Genre | : Technology & Engineering |
ISBN | : |
Highlights recent advances in technology computer-aided design (TCAD) and identifies critical areas for future emphasis. The 39 contributions from the December 1997 symposium cover four main topics--bulk process modeling, equipment modeling, topography modeling, and characterization and device modeling. Paper topics include arsenic deactivation in silicon; defect reactions induced by reactive ion etching; optimization of AMT barrel reactors for silicon epitaxy; grain structure evolution and the reliability of Al(Cu) thin film interconnects; and improved quantitative mobility spectrum analysis. Annotation copyrighted by Book News, Inc., Portland, OR
Author | : Peter A. Rosenthal |
Publisher | : Mrs Proceedings |
Total Pages | : 312 |
Release | : 1998-07-17 |
Genre | : Technology & Engineering |
ISBN | : |
Focuses on the rapidly developing field of sensor technology for process monitoring and control during the fabrication of advanced materials and structures. Of high interest among the 39 papers are sensor-driven, closed-loop control of the fabrication process and product-state monitoring. Among the processes considered are several forms of vapor deposition, molecular beam epitaxy, rapid thermal processing, reactive-ion and plasma etching, electron beam evaporation, and sputtering. Monitoring variable such as temperature, composition, and thickness are described for a range of materials including electronic and optical thin-films, particles, and nanostructures. Annotation copyrighted by Book News, Inc., Portland, OR