Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Author | : Vikram J. Kapoor |
Publisher | : |
Total Pages | : 570 |
Release | : 1987 |
Genre | : Electric and insulation |
ISBN | : |
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Author | : Vikram J. Kapoor |
Publisher | : |
Total Pages | : 570 |
Release | : 1987 |
Genre | : Electric and insulation |
ISBN | : |
Author | : M. Jamal Deen |
Publisher | : The Electrochemical Society |
Total Pages | : 610 |
Release | : 1997 |
Genre | : Science |
ISBN | : 9781566771375 |
Author | : Electrochemical Society. Meeting |
Publisher | : The Electrochemical Society |
Total Pages | : 652 |
Release | : 2003 |
Genre | : Science |
ISBN | : 9781566773478 |
Author | : Vikram J. Kapoor |
Publisher | : The Electrochemical Society |
Total Pages | : 644 |
Release | : 1994 |
Genre | : Science |
ISBN | : 9781566770484 |
Author | : Electrochemical Society. Dielectric Science and Technology Division |
Publisher | : The Electrochemical Society |
Total Pages | : 304 |
Release | : 2001 |
Genre | : Science |
ISBN | : 9781566773133 |
Author | : Ram Ekwal Sah |
Publisher | : The Electrochemical Society |
Total Pages | : 606 |
Release | : 2005 |
Genre | : Nature |
ISBN | : 9781566774598 |
Author | : K. B. Sundaram |
Publisher | : The Electrochemical Society |
Total Pages | : 300 |
Release | : 1999 |
Genre | : Science |
ISBN | : 9781566772280 |
Author | : Ram Ekwal Sah |
Publisher | : The Electrochemical Society |
Total Pages | : 863 |
Release | : 2007 |
Genre | : Dielectric films |
ISBN | : 1566775523 |
This issue of ECS Transactions contains the papers presented in the symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectics held May 6-11, 2007 in Chicago. Papers were presented on deposition, characterization and applications of the dielectrics including high- and low-k dielectrics, as well as interface states, device characterization, reliabiliy and modeling.
Author | : R. Ekwal Sah |
Publisher | : The Electrochemical Society |
Total Pages | : 871 |
Release | : 2009 |
Genre | : Dielectric films |
ISBN | : 1566777100 |
The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.