Pressure Sensor Arrays and Microactuators for Fluid Mechanics Research

Pressure Sensor Arrays and Microactuators for Fluid Mechanics Research
Author: Khalil Najafi
Publisher:
Total Pages: 22
Release: 1997
Genre:
ISBN:

A combined microactuator/microsensor system has been developed using silicon micromachining techniques for use in high speed jets and control of screech in these jets. The 14 microns-thick electrostatic microactuator was fabricated and tested at the exit of a supersonic axisymmetric jet for the introduction of perturbations into the convectively unstable supersonic shear layer. It can be forced into mechanical resonance at frequencies of 5/14 kHz at an amplitude of greater then 70 microns, thus generating significant disturbances into the macro scale jet flow, and survive operation at speeds of>210 m/s. These microactuators have survived hundreds of experiments in the harsh jet environment, and their performance matches or exceeds that of other macro actuators. An array of micromachined sound detectors for the detection of onset of jet screech has also been fabricated. The detectors use stress compensated PECVD silicon nitride/oxide membranes together with monocrystalline ion-implanted p++ silicon piezoresistors to achieve high sensitivity. They have a static sensitivity of 1.1 uV/VPa with a 2% nonlinearity over a pressure range of 10kPa. A chip has been fabricated that supports an array of microactuators and sound detectors. Ongoing investigations are aimed at developing a technique to modify, and ultimately control, the feedback loop responsible for the creation of screech.

Pressure Sensors

Pressure Sensors
Author: Duane Tandeske
Publisher: CRC Press
Total Pages: 316
Release: 1990-11-19
Genre: Technology & Engineering
ISBN: 9780824783655

This practical handbook provides the knowledge needed to specify and apply the best piezoresistive pressure sensors to interface with microprocessors and computers. Eliminating the details of semiconductor physics, it clarifies the three kinds of pressure measurement, explains silicon sensor design

Development and Testing of Bio-inspired MEMS Pressure Sensor Arrays for Increased Situational Awareness by Marine Vehicles

Development and Testing of Bio-inspired MEMS Pressure Sensor Arrays for Increased Situational Awareness by Marine Vehicles
Author: Jeff Ernest Dusek
Publisher:
Total Pages: 13
Release: 2013
Genre: Microelectromechanical systems
ISBN:

The lateral line found on most species of fish is a sensory organ without analog in humans. Using sensory feedback from the lateral line, fish are able to track prey, school, avoid obstacles, and detect vortical flow structures. Composed of both a superficial component, and a component contained within canals beneath the fish's skin, the lateral line acts in a similar fashion to an array of differential pressure sensors. In an effort to enhance the situational and environmental awareness of marine vehicles, lateral-line-inspired pressure sensor arrays were developed to mimic the enhanced sensory capabilities observed in fish. Three flexible and waterproof pressure sensor arrays were fabricated for use as a surface-mounted 'smart skin' on marine vehicles. Two of the sensor arrays were based around the use of commercially available piezoresistive sensor dies, with innovative packaging schemes to allow for flexibility and underwater operation. The sensor arrays employed liquid crystal polymer and flexible printed circuit board substrates with metallic circuits and silicone encapsulation. The third sensor array employed a novel nanocomposite material set that allowed for the fabrication of a completely flexible sensor array. All three sensors were surface mounted on the curved hull of an autonomous kayak vehicle, and tested in both pool and reservoir environments. Results demonstrated that all three sensors were operational while deployed on the autonomous vehicle, and provided an accurate means for monitoring the vehicle dynamics.

MEMS

MEMS
Author: Mohamed Gad-el-Hak
Publisher: CRC Press
Total Pages: 576
Release: 2005-11-29
Genre: Technology & Engineering
ISBN: 1420036556

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

Touch-at-a-distance

Touch-at-a-distance
Author: Jeffrey H. Lang
Publisher:
Total Pages: 13
Release: 2009
Genre: Microelectromechanical systems
ISBN:

Inspired by the lateral-line organ in fish, the ultimate objective of this project continues to be the development of a passive system for AUVs that can detect, classify and locate underwater objects. The lateral line sensory organ in fish enables some species to form three-dimensional maps of their surroundings. The canal subsystem of that organ acts as an array of pressure sensors. Interpreting spatial pressure gradients allows fish to perform a variety of actions from schooling, to tracking prey, to recognizing nearby objects. Similarly, by measuring pressure variations on a vehicle surface, an engineered dense pressure-sensor array could enable the identification and location of obstacles during navigation. Our navigation system is based upon two key technologies: (1) large arrays of very small pressure sensors that can be mounted on the surface of an AUV, and (2) the pressure signal processing algorithms through which object detection, classification and location is implemented. Correspondingly, this project is organized during its early years around the development of these two key technologies. The development of a passive system to detect, classify and locate underwater objects will benefit AUVs that navigate cluttered environments and surf zones. Of particular importance here is the expected low power consumption of a passive system. More generally, the marine industry, especially the ROV and AUV industry, will benefit from the pressure sensing system by having available detailed flow maps derived through the pressure measurements. These maps could facilitate the optimized maneuvering and handling of turbulent flows, as well as the development of morphing procedures to reduce drag and optimize agility. Other marine industries are expected to benefit as well. For example, the oil industry could use the sensor arrays in pipelines to sense and control flow, and competitive sailing teams could use the sensor arrays to guide sail arrangements to optimize lift production, particularly during maneuvering.

Micro Mechanical Transducers

Micro Mechanical Transducers
Author: Min-Hang Bao
Publisher: Elsevier Science Limited
Total Pages: 378
Release: 2000
Genre: Technology & Engineering
ISBN: 9780444505583

Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.

Design and Fabrication of a Microelectromechanical Systems-array Pressure Sensor System for Passive Underwater Navigation Inspired by the Lateral Line

Design and Fabrication of a Microelectromechanical Systems-array Pressure Sensor System for Passive Underwater Navigation Inspired by the Lateral Line
Author: Stephen Ming-Chang Hou
Publisher:
Total Pages: 241
Release: 2012
Genre: Microelectromechanical systems
ISBN:

An object within a fluid flow generates local pressure variations that are unique and characteristic to the object's shape and size. For example, a three-dimensional object or a wall-like obstacle obstructs flow and creates sharp pressure gradients nearby. Similarly, unsteady flow contains vortical patterns with associated unique pressure signatures. Detection of obstacles, as well as identification of unsteady flow features, is required for autonomous undersea vehicle (AUV) navigation. An array of passive underwater pressure sensors, with their ability to An object within a fluid flow generates local pressure variations that are unique and characteristic to the object's shape and size. For example, a three-dimensional object or a wall-like obstacle obstructs flow and creates sharp pressure gradients nearby. Similarly, unsteady flow contains vortical patterns with associated unique pressure signatures. Detection of obstacles, as well as identification of unsteady flow features, is required for autonomous undersea vehicle (AUV) navigation. An array of passive underwater pressure sensors, with their ability to "touch at a distance" with minimal power consumption, would be able to resolve the pressure signatures of obstacles in the near field and the wake of objects in the intermediate field. As an additional benefit, with proper design, pressure sensors can also be used to sample acoustic signals as well. Fish already have a biological version of such a pressure sensor system, namely the lateral line organ, a spatially-distributed set of sensors over a fish's body that allows the fish to monitor its hydrodynamic environment, influenced by the external disturbances. Through its ability to resolve the pressure signature of objects, the fish obtains "hydrodynamic pictures". Inspired by the fish lateral line, this thesis describes the development of a high-density array of microelectromechanical systems (MEMS) pressure sensors built in KOH-etched silicon and HF-etched Pyrex wafers. A novel strain-gauge resistor design is discussed, and standard CMOS/MEMS fabrication techniques were used to build sensors based on the strain-gauge resistors and thin silicon diphragms. Measurements of the diaphragm deflection and strain-gauge resistance changes in response to changes in applied external pressure confirm that the devices can be reliably calibrated for use as pressure sensors to enable passive navigation by AUVs. A set of sensors with millimeter-scale spacing, 2.1 to 2.5 [mu]V/Pa sensitivity, sub-pascal pressure resolution, and -2000 Pa to 2000 Pa pressure range has been demonstrated. Finally, an integrated circuit for array processing and signal amplification and to be fabricated with the pressure sensors is proposed.

Flow Control

Flow Control
Author: Mohamed Gad-el-Hak
Publisher: Cambridge University Press
Total Pages: 445
Release: 2000-08-15
Genre: Science
ISBN: 0521770068

A thorough treatment of the basics of flow control and flow control practices.