Photomask and Next-generation Lithography Mask Technology XVIII

Photomask and Next-generation Lithography Mask Technology XVIII
Author: Toshio Konishi
Publisher: SPIE-International Society for Optical Engineering
Total Pages: 240
Release: 2011
Genre: Integrated circuits
ISBN: 9780819486738

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.