On the 1/f Noise of Atomic-layer-deposition Metal Films

On the 1/f Noise of Atomic-layer-deposition Metal Films
Author: Xiawa Wang
Publisher:
Total Pages: 81
Release: 2011
Genre:
ISBN:

This thesis presents the measurement techniques and results of low-frequency noise for atomic-layer-deposition Pt films. Atomic-layer-deposition has been developed as an approach to make ultra-thin and conformal films. It has been employed to make detectors of bolometers. 1/f noise is a fundamental limit to the resolution. The experiments are designed to characterize the 1/f noise of the ALD fabricated Pt films. The measurement results show that for 7nm and 13nm ALD fabricated Pt films, 1/f noise is about two orders of magnitude larger than reported for continuous Pt films in literature. The thin film is also very likely to suffer from electromigration damage.

Atomic Layer Deposition for Semiconductors

Atomic Layer Deposition for Semiconductors
Author: Cheol Seong Hwang
Publisher: Springer Science & Business Media
Total Pages: 266
Release: 2013-10-18
Genre: Science
ISBN: 146148054X

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

'1/F' Noise in Thin Metal Films Interacting with Silicon Substrates

'1/F' Noise in Thin Metal Films Interacting with Silicon Substrates
Author: R. W. Bene
Publisher:
Total Pages: 12
Release: 1985
Genre:
ISBN:

In an effort to learn more about the microscopic variations in interfacial structures which lead to the previously observed systematics in first compound nucleation in metal-semiconductor systems, we have made measurements of 1/f noise in systems composed of thin metal films deposited onto semiconductor substrates as a function of film thickness or surface resistance. Near-noble metal films deposited onto silicon typically display semiconductor-metal transitions at room temperature as a function of film resistance or metal thickness. measurements of 1/f noise on thin metal films deposited onto silicon can thus be correlated with those observed electronic and structural transitions. Measurements of cobalt thin films r.f. sputtered onto silicon substrates at room temperature show a gradual increase in the magnitude of noise over five orders as the metal thickness is increased to near that of the critical value of crystallization at room temperature. This is followed by a sudden drop in magnitude over six orders after the semiconductor-metal transition has taken place and partial crystallization has occurred. The frequency exponent of the noise varies for these experiments from values near unity at high film resistance to a value approaching 2 near the critical thickness and then abruptly back to near unity when metallization has occurred. The results of nickel films show similar results but with significantly more scatter in the data and no clear trend for the frequency exponents.

Atomic Layer Deposition of Metal Films: From Precursor Synthesis to Film Deposition

Atomic Layer Deposition of Metal Films: From Precursor Synthesis to Film Deposition
Author: Zhengwen Li
Publisher:
Total Pages: 222
Release: 2007
Genre: Thin film devices
ISBN: 9780549040057

Low temperature ALD deposition is important for making thin and continuous metal films. Liquid, volatile and reactive amidinates of Co and Fe complexes were developed for ALD applications. The reactions were self-limiting at low temperature (100--250°C). The films were characterized as pure and conductive metals, using H2 as the reducing agent.

Noise and Fluctuations

Noise and Fluctuations
Author: Massimo Macucci
Publisher: American Institute of Physics
Total Pages: 692
Release: 2009-05-13
Genre: Science
ISBN:

The ICNF conference is a biennial event that brings together researchers interested in theoretical and experimental aspects of fluctuations across a wide spectrum of scientific and technological fields, ranging from heartbeat analysis to mesoscopic phsyics, to noise optimization of electron devices, to the variations of stock prices.

Computational Mathematics, Nanoelectronics, and Astrophysics

Computational Mathematics, Nanoelectronics, and Astrophysics
Author: Shaibal Mukherjee
Publisher: Springer Nature
Total Pages: 209
Release: 2021-03-23
Genre: Mathematics
ISBN: 9811597081

This book is a collection of original papers presented at the International Conference on Computational Mathematics in Nanoelectronics and Astrophysics (CMNA 2018) held at the Indian Institute of Technology Indore, India, from 1 to 3 November 2018. It aims at presenting recent developments of computational mathematics in nanoelectronics, astrophysics and related areas of space sciences and engineering. These proceedings discuss the most advanced innovations, trends and real-world challenges encountered and their solutions with the application of computational mathematics in nanoelectronics, astrophysics and space sciences. From focusing on nano-enhanced smart technological developments to the research contributions of premier institutes in India and abroad on ISRO’s future space explorations—this book includes topics from highly interdisciplinary areas of research. The book is of interest to researchers, students and practising engineers working in diverse areas of science and engineering, ranging from applied and computational mathematics to nanoelectronics, nanofabrications and astrophysics.

Copper Interconnect Technology

Copper Interconnect Technology
Author: Tapan Gupta
Publisher: Springer Science & Business Media
Total Pages: 433
Release: 2010-01-22
Genre: Technology & Engineering
ISBN: 1441900764

Since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit and system speed were focused on transistors as well. During the last decade, however, the parasitic resistance, capacitance, and inductance associated with interconnections began to influence circuit performance and will be the primary factors in the evolution of nanoscale ULSI technology. Because metallic conductivity and resistance to electromigration of bulk copper (Cu) are better than aluminum, use of copper and low-k materials is now prevalent in the international microelectronics industry. As the feature size of the Cu-lines forming interconnects is scaled, resistivity of the lines increases. At the same time electromigration and stress-induced voids due to increased current density become significant reliability issues. Although copper/low-k technology has become fairly mature, there is no single book available on the promise and challenges of these next-generation technologies. In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.

Noise and Fluctuations

Noise and Fluctuations
Author: Munecazu Tacano
Publisher: American Institute of Physics
Total Pages: 768
Release: 2007-08-14
Genre: Science
ISBN:

Tokyo, Japan, 9-14 September 2007