Nanolithography By Direct Write Ambient
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Micro/Nanolithography
Author | : Jagannathan Thirumalai |
Publisher | : BoD – Books on Demand |
Total Pages | : 136 |
Release | : 2018-05-02 |
Genre | : Technology & Engineering |
ISBN | : 1789230306 |
The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is concomitant with the lithographic ways and means of deposition, optimization parameters and their wide technological applications. This book consists of six chapters comprehending with eminence of lithography, fabrication and reproduction of periodic nanopyramid structures using UV nanoimprint lithography for solar cell applications, large-area nanoimprint lithography and applications, micro-/nanopatterning on polymers, OPC under immersion lithography associated to novel luminescence applications, achromatic Talbot lithography (ATL) and the soft X-ray interference lithography. Individual chapters provide a base for a wide range of readers from different fiels, students and researchers, who may be doing research pertinent to the topics discussed in this book and find basic as well as advanced principles of designated subjects related to these phenomena explained plainly. The book contains six chapters by experts in different fields of lithographic fabrication and technology from over 15 research institutes across the globe.
Nanolithography
Author | : M Feldman |
Publisher | : Woodhead Publishing |
Total Pages | : 599 |
Release | : 2014-02-13 |
Genre | : Technology & Engineering |
ISBN | : 0857098756 |
Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next? and "How do we get there?Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. - Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions - Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography - Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics
Materials and Processes for Next Generation Lithography
Author | : |
Publisher | : Elsevier |
Total Pages | : 636 |
Release | : 2016-11-08 |
Genre | : Science |
ISBN | : 0081003587 |
As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. - Assembles up-to-date information from the world's premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation - Includes information on processing and metrology techniques - Brings together multiple approaches to litho pattern recording from academia and industry in one place
Nanostructures & Nanomaterials
Author | : Guozhong Cao |
Publisher | : Imperial College Press |
Total Pages | : 452 |
Release | : 2004 |
Genre | : Science |
ISBN | : 9781860944802 |
This important book focuses on the synthesis and fabrication of nanostructures and nanomaterials, but also includes properties and applications of nanostructures and nanomaterials, particularly inorganic nanomaterials. It provides balanced and comprehensive coverage of the fundamentals and processing techniques with regard to synthesis, characterization, properties, and applications of nanostructures and nanomaterials. Both chemical processing and lithographic techniques are presented in a systematic and coherent manner for the synthesis and fabrication of 0-D, 1-D, and 2-D nanostructures, as well as special nanomaterials such as carbon nanotubes and ordered mesoporous oxides. The book will serve as a general introduction to nanomaterials and nanotechnology for teaching and self-study purposes.
Integrated Nanoelectronics
Author | : Vinod Kumar Khanna |
Publisher | : Springer |
Total Pages | : 471 |
Release | : 2016-09-16 |
Genre | : Technology & Engineering |
ISBN | : 8132236254 |
Keeping nanoelectronics in focus, this book looks at interrelated fields namely nanomagnetics, nanophotonics, nanomechanics and nanobiotechnology, that go hand-in-hand or are likely to be utilized in future in various ways for backing up or strengthening nanoelectronics. Complementary nanosciences refer to the alternative nanosciences that can be combined with nanoelectronics. The book brings students and researchers from multiple disciplines (and therefore with disparate levels of knowledge, and, more importantly, lacunae in this knowledge) together and to expose them to the essentials of integrative nanosciences. The central idea is that the five identified disciplines overlap significantly and arguably cohere into one fundamental nanotechnology discipline. The book caters to interdisciplinary readership in contrast to many of the existing nanotechnology related books that relate to a specific discipline. The book lays special emphasis on nanoelectronics since this field has advanced most rapidly amongst all the nanotechnology disciplines and with significant commercial pervasion. In view of the significant impact that nanotechnology is predicted to have on society, the topics and their interrelationship in this book are of considerable interest and immense value to students, professional engineers, and reserachers.
Nanostructured Thin Films and Surfaces
Author | : |
Publisher | : John Wiley & Sons |
Total Pages | : 453 |
Release | : 2010-03-08 |
Genre | : Technology & Engineering |
ISBN | : 3527321551 |
The book series Nanomaterials for the Life Sciences, provides an in-depth overview of all nanomaterial types and their uses in the life sciences. Each volume is dedicated to a specific material class and covers fundamentals, synthesis and characterization strategies, structure-property relationships and biomedical applications. The series brings nanomaterials to the Life Scientists and life science to the Materials Scientists so that synergies are seen and developed to the fullest. Written by international experts of various facets of this exciting field of research, the series is aimed at scientists of the following disciplines: biology, chemistry, materials science, physics, bioengineering, and medicine, together with cell biology, biomedical engineering, pharmaceutical chemistry, and toxicology, both in academia and fundamental research as well as in pharmaceutical companies. VOLUME 5 - Nanostructured Thin Films and Surfaces
Introductory Nanoelectronics
Author | : Vinod Kumar Khanna |
Publisher | : CRC Press |
Total Pages | : 911 |
Release | : 2020-07-21 |
Genre | : Science |
ISBN | : 1351204653 |
This introductory text develops the reader’s fundamental understanding of core principles and experimental aspects underlying the operation of nanoelectronic devices. The author makes a thorough and systematic presentation of electron transport in quantum-confined systems such as quantum dots, quantum wires, and quantum wells together with Landauer-Büttiker formalism and non-equilibrium Green’s function approach. The coverage encompasses nanofabrication techniques and characterization tools followed by a comprehensive exposition of nanoelectronic devices including resonant tunneling diodes, nanoscale MOSFETs, carbon nanotube FETs, high-electron-mobility transistors, single-electron transistors, and heterostructure optoelectronic devices. The writing throughout is simple and straightforward, with clearly drawn illustrations and extensive self-study exercises for each chapter. Introduces the basic concepts underlying the operation of nanoelectronic devices. Offers a broad overview of the field, including state-of-the-art developments. Covers the relevant quantum and solid-state physics and nanoelectronic device principles. Written in lucid language with accessible mathematical treatment. Includes extensive end-of-chapter exercises and many insightful diagrams.
Low-Dimensional Materials
Author | : Hui-Ming Cheng |
Publisher | : Elsevier |
Total Pages | : 405 |
Release | : 2024-10-05 |
Genre | : Technology & Engineering |
ISBN | : 0443290474 |
Low Dimensional Materials: Bridging the Fundamental Principles to Practice Applications provides an overview of research on low-dimensional materials, devices, and their applications. There are seven chapters in the book, starting from the basic quantum theory in chapter one, to the control and characterization of the unique structures (chapters two and four), to the relation of the physical and chemical properties with structures (chapter five), and to the practical and promising applications in energy, information, and health (chapter six), before conclusions and future outlook in chapter seven. - Discusses the whole field of low-dimensional materials, from quantum mechanics and low dimensional effects to structure-property relations, various methods of fabrication and assembly techniques, and a characterization of atomic and interface structures - Covers a wide range of topics, making it a 'map' for readers to understand the fundamentals of low-dimensional materials - Written with a 'bottom-up approach, with a solid foundation of quantum mechanics, thermodynamics, and energy transport in low-dimensional systems
Nanomaterials and Nanocomposites
Author | : Rajendra Kumar Goyal |
Publisher | : CRC Press |
Total Pages | : 462 |
Release | : 2017-10-30 |
Genre | : Technology & Engineering |
ISBN | : 1351649310 |
The main aims of this book are to summarize the fundamentals, synthesis methods, properties and applications of nanomaterials, so as to provide readers with a systematic knowledge on nanomaterials. In addition, the book covers most commonly used characterization tools pertaining to nanomaterials. Further, it deals with relevant aspects of nanocomposites which contains dispersion of nano-sized particulates, and carbon nanotubes (CNTs) in the matrices (polymer, metal and ceramic). It also discusses development of smart nano textiles (intelligent textiles), self-cleaning glass, sensors, actuators, ferro-fluids, and wear resistant nano coatings. Aimed at senior undergraduate and graduate students, the key features on this book include: Top-down and bottom-up approaches for the synthesis of nanomaterials included Illustrates sample preparation and basic principle of characterization tools for nanomaterials Explains calculation of ratios of surface area to volume and surface atoms to bulk atoms Reviews synthesis, properties and applications of carbon nanotubes and magnetic nanomaterials Discusses size effect on thermal, mechanical, optical, magnetic and electrical properties