Modelling of Microfabrication Systems

Modelling of Microfabrication Systems
Author: Raja Nassar
Publisher: Springer Science & Business Media
Total Pages: 276
Release: 2013-03-09
Genre: Technology & Engineering
ISBN: 3662087928

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

Three-Dimensional Microfabrication Using Two-Photon Polymerization

Three-Dimensional Microfabrication Using Two-Photon Polymerization
Author: Tommaso Baldacchini
Publisher: William Andrew
Total Pages: 762
Release: 2019-10-31
Genre: Technology & Engineering
ISBN: 0128178280

Three-Dimensional Microfabrication Using Two-Photon Polymerization, Second Edition offers a comprehensive guide to TPP microfabrication and a unified description of TPP microfabrication across disciplines. It offers in-depth discussion and analysis of all aspects of TPP, including the necessary background, pros and cons of TPP microfabrication, material selection, equipment, processes and characterization. Current and future applications are covered, along with case studies that illustrate the book's concepts. This new edition includes updated chapters on metrology, synthesis and the characterization of photoinitiators used in TPP, negative- and positive-tone photoresists, and nonlinear optical characterization of polymers. This is an important resource that will be useful for scientists involved in microfabrication, generation of micro- and nano-patterns and micromachining. - Discusses the major types of nanomaterials used in the agriculture and forestry sectors, exploring how their properties make them effective for specific applications - Explores the design, fabrication, characterization and applications of nanomaterials for new Agri-products - Offers an overview of regulatory aspects regarding the use of nanomaterials for agriculture and forestry

Microsystem Technology in Chemistry and Life Sciences

Microsystem Technology in Chemistry and Life Sciences
Author: Andreas Manz
Publisher: Springer Science & Business Media
Total Pages: 269
Release: 2003-09-05
Genre: Science
ISBN: 3540695443

"WHAT DOES NOT NEED TO BE BIG, WILL BE SMALL", a word by an engineer at a recent conference on chips technology. This sentence is particularly true for chemistry. Microfabrication technology emerged from microelectronics into areas like mechanics and now chemistry and biology. The engineering of micron and submicron sized features on the surface of silicon, glass and polymers opens a whole new world. Micromotors smaller than human hair have been fabricated and they work fine. It is the declared goal of the authors to bring these different worlds together in this volume. Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.

Fabrication and Design of Resonant Microdevices

Fabrication and Design of Resonant Microdevices
Author: Behraad Bahreyni
Publisher: William Andrew
Total Pages: 234
Release: 2008-10-20
Genre: Technology & Engineering
ISBN: 0815519710

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. - Offers numerous academic and industrial examples of resonant MEMS - Provides an analytic model of device behaviour - Explains two-port systems in detail - Devotes ample space to excitation and signal detection methods - Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Levitation Micro-Systems

Levitation Micro-Systems
Author: Kirill Poletkin
Publisher: Springer Nature
Total Pages: 178
Release: 2020-11-19
Genre: Technology & Engineering
ISBN: 3030589080

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

Fundamentals of Microfabrication

Fundamentals of Microfabrication
Author: Marc J. Madou
Publisher: CRC Press
Total Pages: 764
Release: 2018-10-08
Genre: Technology & Engineering
ISBN: 1482274000

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

Micro Total Analysis Systems 2000

Micro Total Analysis Systems 2000
Author: Albert van den Berg
Publisher: Springer Science & Business Media
Total Pages: 639
Release: 2013-11-11
Genre: Science
ISBN: 9401722641

This volume contains the proceedings of the fourth international symposium on Micro Total Analysis Systems (muTAS 2000). Cutting-edge research of all invited and contributed papers presented by the world’s leading muTAS groups provides the state of the art of this electrifying, multidisciplinary field.

Nano- and Micro-Electromechanical Systems

Nano- and Micro-Electromechanical Systems
Author: Sergey Edward Lyshevski
Publisher: CRC Press
Total Pages: 752
Release: 2018-10-03
Genre: Technology & Engineering
ISBN: 1351835173

Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science. Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development. Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.

Resonant MEMS

Resonant MEMS
Author: Oliver Brand
Publisher: John Wiley & Sons
Total Pages: 512
Release: 2015-04-22
Genre: Technology & Engineering
ISBN: 352767635X

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.