Modeling Mechanical Distortions In X Ray Masks
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Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
| Author | : P. Rai-Choudhury |
| Publisher | : SPIE Press |
| Total Pages | : 780 |
| Release | : 1997 |
| Genre | : Technology & Engineering |
| ISBN | : 9780819423788 |
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.
