Microsystems Metrology And Inspection
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| Author | : Wolfgang Osten |
| Publisher | : CRC Press |
| Total Pages | : 524 |
| Release | : 2018-10-03 |
| Genre | : Science |
| ISBN | : 1420019163 |
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.
| Author | : Wolfgang Osten |
| Publisher | : CRC Press |
| Total Pages | : 692 |
| Release | : 2019-06-21 |
| Genre | : Technology & Engineering |
| ISBN | : 0429532652 |
Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS
| Author | : Dinesh K. Aswal |
| Publisher | : Springer Nature |
| Total Pages | : 2504 |
| Release | : 2023-08-23 |
| Genre | : Technology & Engineering |
| ISBN | : 9819920744 |
This handbook provides comprehensive and up-to-date information on the topic of scientific, industrial and legal metrology. It discusses the state-of-art review of various metrological aspects pertaining to redefinition of SI Units and their implications, applications of time and frequency metrology, certified reference materials, industrial metrology, industry 4.0, metrology in additive manufacturing, digital transformations in metrology, soft metrology and cyber security, optics in metrology, nano-metrology, metrology for advanced communication, environmental metrology, metrology in biomedical engineering, legal metrology and global trade, ionizing radiation metrology, advanced techniques in evaluation of measurement uncertainty, etc. The book has contributed chapters from world’s leading metrologists and experts on the diversified metrological theme. The internationally recognized team of editors adopt a consistent and systematic approach and writing style, including ample cross reference among topics, offering readers a user-friendly knowledgebase greater than the sum of its parts, perfect for frequent consultation. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only metrology but also mechanical/material science, optics, physics, chemistry, biomedical and more. This handbook is ideal for academic and professional readers in the traditional and emerging areas of metrology and related fields.
| Author | : Sergej Fatikow |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 360 |
| Release | : 2008 |
| Genre | : Computers |
| ISBN | : 1846289777 |
This book provides an introduction to robot-based nanohandling. It presents work on the development of a versatile microrobot-based nanohandling robot station inside a scanning electron microscope (SEM). Those unfamiliar with the subject will find the text, which is complemented throughout by the extensive use of illustrations, clear and simple to understand. The author has published two books and numerous papers in the field, and holds more than 50 patents.
| Author | : Anand Asundi |
| Publisher | : John Wiley & Sons |
| Total Pages | : 189 |
| Release | : 2011-07-05 |
| Genre | : Technology & Engineering |
| ISBN | : 1119972787 |
Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes. Addresses particle characterization where digital holography has proven capability for dynamic measurement of particles in 3D for sizing and shape characterization, with applications in microfluidics as well as crystallization and aerosol detection studies. Discusses digital reflection holography, digital transmission holography, digital in-line holography, and digital holographic tomography and applications. Covers other applications including micro-optical and diffractive optical systems and the testing of these components, and bio-imaging.
| Author | : Paolo Dario |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 620 |
| Release | : 2005-02-17 |
| Genre | : Technology & Engineering |
| ISBN | : 9783540232148 |
ISRR, the "International Symposium on Robotics Research", is one of robotics’ pioneering symposia, which has established some of the field's most fundamental and lasting contributions over the past two decades. This book presents the results of the eleventh edition of "Robotics Research" ISRR03, offering a broad range of topics in robotics. The contributions provide a wide coverage of the current state of robotics research: the advances and challenges in its theoretical foundation and technology basis, and the developments in its traditional and new emerging areas of applications. The diversity, novelty, and span of the work unfolding in these areas reveal the field's increased maturity and expanded scope, and define the state of the art of robotics and its future direction.
| Author | : Michael Huff |
| Publisher | : Springer Nature |
| Total Pages | : 531 |
| Release | : 2020-04-09 |
| Genre | : Technology & Engineering |
| ISBN | : 3030405605 |
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.
| Author | : William N. Sharpe, Jr. |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 1100 |
| Release | : 2008-12-04 |
| Genre | : Mathematics |
| ISBN | : 0387268839 |
The Springer Handbook of Experimental Solid Mechanics documents both the traditional techniques as well as the new methods for experimental studies of materials, components, and structures. The emergence of new materials and new disciplines, together with the escalating use of on- and off-line computers for rapid data processing and the combined use of experimental and numerical techniques have greatly expanded the capabilities of experimental mechanics. New exciting topics are included on biological materials, MEMS and NEMS, nanoindentation, digital photomechanics, photoacoustic characterization, and atomic force microscopy in experimental solid mechanics. Presenting complete instructions to various areas of experimental solid mechanics, guidance to detailed expositions in important references, and a description of state-of-the-art applications in important technical areas, this thoroughly revised and updated edition is an excellent reference to a widespread academic, industrial, and professional engineering audience.
| Author | : Toru Yoshizawa |
| Publisher | : CRC Press |
| Total Pages | : 866 |
| Release | : 2017-07-28 |
| Genre | : Technology & Engineering |
| ISBN | : 1351831844 |
Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.
| Author | : Tom R. Thomas |
| Publisher | : Université de Saint-Etienne |
| Total Pages | : 498 |
| Release | : 2005 |
| Genre | : |
| ISBN | : 9782862723891 |
