Micromachining and Microfabrication Process Technology and Devices
Author | : Norman C. Tien |
Publisher | : |
Total Pages | : 440 |
Release | : 2001 |
Genre | : Electromechanical devices |
ISBN | : |
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Author | : Norman C. Tien |
Publisher | : |
Total Pages | : 440 |
Release | : 2001 |
Genre | : Electromechanical devices |
ISBN | : |
Author | : Norman C. Tien |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 460 |
Release | : 2001 |
Genre | : Technology & Engineering |
ISBN | : |
Author | : P. Rai-Choudhury |
Publisher | : IET |
Total Pages | : 716 |
Release | : 1997 |
Genre | : Technology & Engineering |
ISBN | : 9780852969113 |
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Author | : Karen W. Markus |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 352 |
Release | : 1995 |
Genre | : Technology & Engineering |
ISBN | : |
Author | : Society of Photo-optical Instrumentation Engineers |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 0 |
Release | : 1997 |
Genre | : Science |
ISBN | : 9780819426550 |
Author | : Jean-Michel Karam |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 0 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9780819438300 |
Author | : Stella W. Pang |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 366 |
Release | : 1996 |
Genre | : Electromechanical devices |
ISBN | : 9780819422774 |
Author | : Marc J. Madou |
Publisher | : CRC Press |
Total Pages | : 672 |
Release | : 2011-06-13 |
Genre | : Technology & Engineering |
ISBN | : 1420055194 |
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.