Micromachined Mirrors

Micromachined Mirrors
Author: Robert Conant
Publisher: Springer Science & Business Media
Total Pages: 150
Release: 2013-04-17
Genre: Technology & Engineering
ISBN: 1475737645

Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.

Photonic Microsystems

Photonic Microsystems
Author: Olav Solgaard
Publisher: Springer Science & Business Media
Total Pages: 641
Release: 2009-04-05
Genre: Science
ISBN: 0387683518

This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics. The book shows how the characteristics of MEMS enable practical implementations of a variety of applications, including projection displays, fiber switches, interferometers, and spectrometers. The authors conclude with an up-to-date discussion of the need for the combination of MEMS and Photonic crystals.

Innovative ASEAN

Innovative ASEAN
Author:
Publisher: Yayasan Obor Indonesia
Total Pages: 490
Release: 2006
Genre: Science
ISBN: 9789792624281

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators
Author: Gerhard Lammel
Publisher: Springer Science & Business Media
Total Pages: 278
Release: 2013-03-09
Genre: Technology & Engineering
ISBN: 1475760833

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly. An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component. The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.

Optomechatronic Systems III

Optomechatronic Systems III
Author: Society of Photo-optical Instrumentation Engineers
Publisher: SPIE-International Society for Optical Engineering
Total Pages: 768
Release: 2002
Genre: Technology & Engineering
ISBN:

Device and Process Technologies for MEMS, Microelectronics, and Photonics III

Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Author: Jung-Chih Chiao
Publisher: SPIE-International Society for Optical Engineering
Total Pages: 612
Release: 2004
Genre: Art
ISBN: 9780819451699

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.