Microlithography Fundamentals In Semiconductor Devices And Fabrication Technology
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| Author | : Saburo Nonogaki |
| Publisher | : CRC Press |
| Total Pages | : 336 |
| Release | : 2018-10-08 |
| Genre | : Technology & Engineering |
| ISBN | : 1482273764 |
"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
| Author | : Alberto Pique |
| Publisher | : Elsevier |
| Total Pages | : 754 |
| Release | : 2001-11-20 |
| Genre | : Technology & Engineering |
| ISBN | : 0080504647 |
Direct-Write Technologies covers applications, materials, and the techniques in using direct-write technologies. This book provides an overview of the different direct write techniques currently available, as well as a comparison between the strengths and special attributes for each of the techniques. The techniques described open the door for building prototypes and testing materials. The book also provides an overview of the state-of-the-art technology involved in this field. Basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications. Others in this or related fields will want the book to read the introductory material summarizing isuses common to all approaches, in order to compare and contrast different techniques. Everyday applications include electronic components and sensors, especially chemical and biosensors. There is a wide range of research and development problems requiring state-of-the-art direct write tools. This book will appeal to basic researchers and development engineers in university engineering departments and at industrial and national research laboratories. This text should appeal equally well in the United States, Asia, and Europe. Both basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications. - An overview of the different direct write techniques currently available - A comparison between the strengths and special attributes for each of the techniques - An overview of the state-of-the-art technology involved in this field
| Author | : Shubham Kumar |
| Publisher | : CRC Press |
| Total Pages | : 353 |
| Release | : 2021-04-28 |
| Genre | : Technology & Engineering |
| ISBN | : 1000396401 |
This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length course on integrated circuit fabrication. This text can also serve as a reference for practicing engineer and scientist in the semiconductor industry. IC Fabrication are ever demanding of technology in rapidly growing industry growth opportunities are numerous. A recent survey shows that integrated circuit currently outnumber humans in UK, USA, India and China. The spectacular advances in the development and application of integrated circuit technology have led to the emergence of microelectronic process engineering as an independent discipline. Integrated circuit fabrication text books typically divide the fabrication sequence into a number of unit processes that are repeated to form the integrated circuit. The effect is to give the book an analysis flavor: a number of loosely related topics each with its own background material. Note: T& F does not sell or distribute the Hardback in India, Pakistan, Nepal, Bhutan, Bangladesh and Sri Lanka.
| Author | : S. Narayanan |
| Publisher | : Alpha Science Int'l Ltd. |
| Total Pages | : 1112 |
| Release | : 2006 |
| Genre | : Social Science |
| ISBN | : 9788173197925 |
Presents state-of-the-art research and case studies from over 150 Design & Manufacturing professionals across the globe in the areas of CAD/CAM; Product Design; Rapid Prototyping and Tooling; Manufacturing Processes; Micromachining and Miniaturisation; Mechanism and Robotics; Artificial Intelligence; and Material Handling Systems.
| Author | : |
| Publisher | : Elsevier |
| Total Pages | : 636 |
| Release | : 2016-11-08 |
| Genre | : Science |
| ISBN | : 0081003587 |
As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. - Assembles up-to-date information from the world's premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation - Includes information on processing and metrology techniques - Brings together multiple approaches to litho pattern recording from academia and industry in one place
| Author | : M Feldman |
| Publisher | : Woodhead Publishing |
| Total Pages | : 599 |
| Release | : 2014-02-13 |
| Genre | : Technology & Engineering |
| ISBN | : 0857098756 |
Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next? and "How do we get there?Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. - Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions - Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography - Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics
| Author | : Bruce W. Smith |
| Publisher | : CRC Press |
| Total Pages | : 866 |
| Release | : 2018-10-03 |
| Genre | : Technology & Engineering |
| ISBN | : 1420051539 |
This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts. New in the Second Edition In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including: Immersion Lithography 157nm Lithography Electron Projection Lithography (EPL) Extreme Ultraviolet (EUV) Lithography Imprint Lithography Photoresists for 193nm and Immersion Lithography Scatterometry Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.
| Author | : Chunlei Guo |
| Publisher | : CRC Press |
| Total Pages | : 733 |
| Release | : 2021-06-23 |
| Genre | : Technology & Engineering |
| ISBN | : 131531083X |
This comprehensive handbook gives a fully updated guide to lasers and laser technologies, including the complete range of their technical applications. This third volume covers modern applications in engineering and technology, including all new and updated case studies spanning telecommunications and data storage to medicine, optical measurement, defense and security, nanomaterials processing and characterization. Key Features: • Offers a complete update of the original, bestselling work, including many brand-new chapters. • Deepens the introduction to fundamentals, from laser design and fabrication to host matrices for solid-state lasers, energy level diagrams, hosting materials, dopant energy levels, and lasers based on nonlinear effects. • Covers new laser types, including quantum cascade lasers, silicon-based lasers, titanium sapphire lasers, terahertz lasers, bismuth-doped fiber lasers, and diode-pumped alkali lasers. • Discusses the latest applications, e.g., lasers in microscopy, high-speed imaging, attosecond metrology, 3D printing, optical atomic clocks, time-resolved spectroscopy, polarization and profile measurements, pulse measurements, and laser-induced fluorescence detection. • Adds new sections on laser materials processing, laser spectroscopy, lasers in imaging, lasers in environmental sciences, and lasers in communications. This handbook is the ideal companion for scientists, engineers, and students working with lasers, including those in optics, electrical engineering, physics, chemistry, biomedicine, and other relevant areas.
| Author | : Fu-Kuo Chang |
| Publisher | : DEStech Publications, Inc |
| Total Pages | : 1397 |
| Release | : 2011 |
| Genre | : Technology & Engineering |
| ISBN | : 160595053X |
This 2-volume set of books, comprising over 2,700 total pages, presents 325 fully original presentations on recent advances in structural health monitoring, as applied to commercial and military aircraft (manned and unmanned), high-rise buildings, wind turbines, civil infrastructure, power plants and ships. One general theme of the books is how SHM can be used for condition-based maintenance, with the goal of developing prediction-based systems, designed to save money over the life of vehicles and structures. A second theme centers on technologies for developing systems comprising sensors, diagnostic data and decision-making, with a focus on intelligent materials able to respond to damage and in some cases repair it. Finally the books discuss the relation among data, data interpretation and decision-making in managing a wide variety of complex structures and vehicles. More recent technologies discussed in the books include SHM and environmental effects, energy harvesting, non-contact sensing, and intelligent networks.Material in these books was first presented in September, 2011 at a conference held at Stanford University and sponsored by the Air Force Office of Scientific Research, the Army Research Office, the Office of Naval Research and the National Science Foundation. Some of the highlights of the books include: SHM technologies for condition-based maintenance (CBM) and predictive maintenance Verification, validation, qualification, data mining, prognostics systems for decision-making Structural health, sensing and materials in closed-loop intelligent networks Military and aerospace, bioinspired sensors, wind turbines, monitoring with MEMS, damage sensing, hot spot monitoring, SHM and ships, high-rise structures Includes a fully-searchable CD-ROM displaying many figures and charts in full color
| Author | : Bansi D. Malhotra |
| Publisher | : iSmithers Rapra Publishing |
| Total Pages | : 492 |
| Release | : 2001-12-31 |
| Genre | : Science |
| ISBN | : 9781859572863 |
The Handbook of Polymers in Electronics has been designed to discuss the novel ways in which polymers can be used in the rapidly growing electronics industry. It provides discussion of the preparation and characterisation of suitable polymeric materials and their current and potential applications coupled with the fundamentals of electrical, optical and photophysical properties. It will thus serve the needs of those already active in the electronics field as well as new entrants to the industry.
