Wavelength Selective and 3D Stacked Microbolometers for Multispectral Infrared Detection

Wavelength Selective and 3D Stacked Microbolometers for Multispectral Infrared Detection
Author: Jong Yeon Park
Publisher:
Total Pages: 232
Release: 2012
Genre:
ISBN:

Development of wavelength selective detection, tunable multi-spectral capability with functionality in the infrared spectral region is highly desirable for a variety of applications such as thermography, chemical processing and environmental monitoring, spectroradiometry, medical diagnosis, Fourier transform infrared spectroscopy, night vision, mine detection, military defense and astronomy. Infrared detector with wavelength selective functionality have emerged as next generation infrared detectors. This study presents fabrication and characterization of wavelength selective Germanium dielectric coated Salisbury screen and novel 3D stacked microbolometer for multispectral infrared detection. This novel fabrication process helps produce much flatter, more robust device structure by using an un-patterned sacrificial layer to produce device legs that hold the central structural layer above the reflective mirror supported by a completely flat sacrificial layer with sufficient thermal isolation to allow microbolometer operation. For the fabricated wavelength selective Germanium dielectric coated Salisbury screen microbolometer using self aligned process, the FTIR measured spectral responses and numerical simulation results show excellent agreement with wavelength selectivity (9[mu]m, 10[mu]m, 11[mu]m) in long wave infrared (LWIR) region. To achieve multicolor infrared detection, recently a few device concepts using uncooled detectors have been reported. However, none of the proposed device designs have demonstrated fabrication. Moreover, Commercial Fabry-perot resonant cavity based uncooled microbolometers (Air gap: 2 to 2.5[mu]m) have limited design parameters due to multicolor narrow band spectral response. In this study, a feasible device fabrication method for novel 3D stacked microbolometer is demonstrated for multispectral uncooled infrared detector that can achieve tunable narrowband absorption in mid-wave infrared (MWIR) and long-wave infrared (LWIR) spectral regions.

Handbook of Infrared Detection Technologies

Handbook of Infrared Detection Technologies
Author: M. Henini
Publisher: Elsevier
Total Pages: 536
Release: 2002-12-11
Genre: Science
ISBN: 9781856173889

Introduction -- Comparison of Photon and Thermal Detectors Performance -- GaAs/AIGaAs Based Quantum Well Intra-red Photodetector Focal Plane Arrays -- GaInAs(P) Based Qwips on GaAs, InP and Si Substrates for Focal Plane Arrays -- InAs/(Galn)Sb Superlattices: A Promising Material System for Infra-red Detection -- GaSb/InAs Superlattices for Infra-red FPAs -- MCT Properties, Growth Methods and Characterization -- HgCdTe 2D Arrays -- Technology and Performance Limits -- Status of HgCdTe MBE Technology -- Silicon Infra-red Focal Plane Arrays -- PolySiGe Uncooled Microbolometers for Thermal Infra-red Detection -- Infra-red Silicon/Germanium Detectors -- Fundamentals of Spin Filtering in Ferromagnetic Metals with Application to Spin Sensors.

Microbolometers

Microbolometers
Author: Nuggehalli Ravindra
Publisher: Woodhead Publishing
Total Pages: 352
Release: 2021-12-01
Genre: Technology & Engineering
ISBN: 008102813X

Microbolometers: Fundamentals, Materials, and Recent Developments describes the fundamentals of microbolometers, their historic evolution, operational principles and material choices. It also explains the impact of materials on the processing and development of device characteristics. Sections address various aspects of optical properties and recommend models of properties of materials of interest for the fabrication of the uncooled microbolometers. In addition, the book presents two case studies, Honeywell and Texas Instruments, that focus on the design and manufacture of microbolometers. Finally, recent developments, applications, patents and future trends are presented. The chapter on patents will summarize the strengths and weaknesses of each of the technologies. “Please note that there is an error on the Dedication page, it should read: “To my sister, Math. G.Y. Premalatha, and my brother-in-law, the late Professor G.N. Yoganarasimhan, Professor of Water Resources Engineering and Management, for showing me the direction Describes the fundamentals of uncooled infrared detectors, operational principles and material approaches Includes case studies based on Honeywell and Texas Instruments’ work on microbolometers Provides analyses of current patents with a look towards their strengths and weaknesses

Fundamentals of Infrared and Visible Detector Operation and Testing

Fundamentals of Infrared and Visible Detector Operation and Testing
Author: John David Vincent
Publisher: John Wiley & Sons
Total Pages: 584
Release: 2015-10-26
Genre: Technology & Engineering
ISBN: 1119011884

Presents a comprehensive introduction to the selection,operation, and testing of infrared devices, including adescription of modern detector assemblies and theiroperation This book discusses how to use and test infrared and visibledetectors. The book provides a convenient reference for thoseentering the field of IR detector design, test or use, those whowork in the peripheral areas, and those who teach and train othersin the field. Chapter 1 contains introductory material. Radiometry is coveredin Chapter 2. The author examines Thermal detectors in Chapter 3;the “Classical” photon detectors – simplephotoconductors and photovoltaics in Chapter 4; and “ModernPhoton Detectors” in Chapter 5. Chapters 6 through 8consider respectively individual elements and small arrays ofelements the “readouts” (ROICs) used with large imagingarrays; and Electronics for FPA Operation and Testing. The Test Setand The Testing Process are analyzed in Chapters 9 and 10, withemphasis on uncertainty and trouble shooting. Chapters 11 through15 discuss related skills, such as Uncertainty, Cryogenics, Vacuum,Optics, and the use of Fourier Transforms in the detector business.Some highlights of this new edition are that it Discusses radiometric nomenclature and calculations, detectormechanisms, the associated electronics, how these devices aretested, and real-life effects and problems Examines new tools in Infrared detector operations,specifically: selection and use of ROICs, electronics for FPAoperation, operation of single element and very small FPAs,microbolometers, and multi-color FPAs Contains five chapters with frequently sought-after informationon related subjects, such as uncertainty, optics, cryogenics,vacuum, and the use of Fourier mathematics for detectoranalyses Fundamentals of Infrared and Visible Detector Operation andTesting, Second Edition, provides the background and vocabularynecessary to help readers understand the selection, operation, andtesting of modern infrared devices.

Infrared Detectors

Infrared Detectors
Author: Antonio Rogalski
Publisher: CRC Press
Total Pages: 900
Release: 2010-11-15
Genre: Science
ISBN: 1420076728

Completely revised and reorganized while retaining the approachable style of the first edition, Infrared Detectors, Second Edition addresses the latest developments in the science and technology of infrared (IR) detection. Antoni Rogalski, an internationally recognized pioneer in the field, covers the comprehensive range of subjects necessary to un

Infrared Detectors and Emitters: Materials and Devices

Infrared Detectors and Emitters: Materials and Devices
Author: Peter Capper
Publisher: Springer Science & Business Media
Total Pages: 500
Release: 2013-11-27
Genre: Technology & Engineering
ISBN: 1461516072

An up-to-date view of the various detector/emitter materials systems currently in use or being actively researched. The book is aimed at newcomers and those already working in the IR industry. It provides both an introductory text and a valuable overview of the entire field.

Uncooled Infrared Imaging Arrays and Systems

Uncooled Infrared Imaging Arrays and Systems
Author:
Publisher: Academic Press
Total Pages: 364
Release: 1997-11-24
Genre: Science
ISBN: 0080864449

This is the first book to describe an emerging but already growing technology of thermal imaging based on uncooled infrared imaging arrays and systems, which are the most exciting new developments in infrared technology today. This technology is of great importance to developers and users of thermal images for military and commercial applications. The chapters, prepared by world leaders in the technology, describe not only the mainstream efforts, but also exciting new approaches and fundamental limits applicable to all. Unified approach to technology development based on fundamental limits Individual chapters written by world leaders in each technology Novel potential approaches, allowing for the reduction of costs, described in detail Descriptive and analytical Provides details of the mainstream approaches--resistive bolometric, pyroelectric/field enhanced pyroelectric, thermoelectric Provides insight into a unified approach to development of all types of thermal imaging arrays Features state-of-the-art and selected new developments