Micro Deformable Mirrors
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MEMS Mirrors
Author | : Huikai Xie |
Publisher | : MDPI |
Total Pages | : 217 |
Release | : 2018-05-04 |
Genre | : Technology & Engineering |
ISBN | : 3038428671 |
This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines
Foundry Microfabrication of Deformable Mirrors for Adaptive Optics
Author | : William D. Cowan |
Publisher | : |
Total Pages | : 285 |
Release | : 1998-04-01 |
Genre | : Founding |
ISBN | : 9781423560623 |
Microelectromechanical Systems (MEMS) is a rapidly emerging field of research in which batch fabrication processes are used to construct miniature devices. MEMS devices are particularly well suited to optical applications. Foundry microfabrication offers a substantial cost advantage for prototype system development. In this research, foundry MEMS processes are used to fabricate low-cost deformable mirror systems (MEM-DMs) for adaptive optics. The challenges and design trades associated with fabrication of continuous and segmented deformable mirrors in foundry processes are examined in detail. Micromirror surface figure is shown to be critically important. Beam steering and optical aberration correction experiments conclusively demonstrate the potential of low-cost MEM-DMs. The prototype MEM-DM systems are approximately 1/ 500th the cost of conventionally manufactured deformable mirrors. An innovative direct digital control scheme further reduces adaptive optic system cost by eliminating the digital to analog converter typically required for each controlled element. In addition to the MEM-DMs, other MEMS devices are shown. The thermally actuated piston micromirrors offer greater deflections for operation at longer optical wavelengths. Other MEMS devices examined include a series of tilting mirrors, pressure gauges, test structures, electrostatic scratch drive actuated rotors, and a new type of electrostatic cantilever motor with lateral motion output.
MEMS Deformable Mirrors for Adaptive Optics
Author | : Raji Krishnamoorthy Mali |
Publisher | : |
Total Pages | : 294 |
Release | : 1999 |
Genre | : Microelectromechanical systems |
ISBN | : |
High Actuator Count MEMS Deformable Mirrors for Space Telescopes
Author | : |
Publisher | : |
Total Pages | : 23 |
Release | : 2010 |
Genre | : |
ISBN | : |
Micro Electro Mechanical Systems (MEMS) deformable mirrors are capable of correcting aberrations in space-based optical imaging systems. The small size, weight, and power requirements are ideal for space based adaptive optics. However, the yield, number of actuators, and surface accuracies can be improved. Yield is the proportion of the mirror segments that work. A low-power driver is also needed. The impact of microscopic manufacturing defects and substrate bowing were investigated. To reduce power consumption in the drive electronics, a multiplexed driver was investigated. A prototype of the multiplexed driver was constructed and will be used for future tests on a deformable mirror.
Industrial Assessment on Deformable Mirrors (Without Proprietary Information).
Author | : |
Publisher | : |
Total Pages | : 72 |
Release | : 1998 |
Genre | : |
ISBN | : |
The deformable mirror subtier task was part of the larger industrial study that the Institute for Defense Analyses (IDA) conducted during FY 1997-1998. The objective of the study was to determine if there were more potential deformable mirror suppliers than the one company that was identified and to identify possible alternatives to the present state of the art for deformable mirrors. Possible component suppliers who could produce actuators or the flexible optical surfaces for the deformable mirrors were also assessed. Because of time constraints, the scope of the task was limited to unclassified systems and U.S. deformable mirror producers. The overall assessment identified three deformable mirror producers: Xinetics, Thermotrex, and Raytheon. Several deformable mirror component suppliers were also determined in this study. New technologies including Microelectromechanical Systems (MEMS) mirrors and magnetostrictive materials for actuators showed potential in replacing or augmenting the current deformable mirror technology. It was also determined that vertical integration was not an issue in the deformable mirror area because of the current number of deformable mirror suppliers and the component industries available. However, it was concluded that the deformable mirror market was "thin" and could change rapidly. The final recommendation was that the deformable mirror area be reexamined as the Department of Defense (DoD) and Department of Energy (DOE) funding environment, the demand for deformable mirrors, and manufacturing capability of the deformable mirror suppliers change.