MEMS and MOEMS Technology and Applications

MEMS and MOEMS Technology and Applications
Author: P. Rai-Choudhury
Publisher: SPIE Press
Total Pages: 544
Release: 2000
Genre: Technology & Engineering
ISBN: 9780819437167
GET BOOK

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

Portable Spectroscopy and Spectrometry, Applications

Portable Spectroscopy and Spectrometry, Applications
Author: Richard A. Crocombe
Publisher: John Wiley & Sons
Total Pages: 608
Release: 2021-04-28
Genre: Science
ISBN: 1119636434
GET BOOK

The most comprehensive resource available on the many applications of portable spectrometers, including material not found in any other published work Portable Spectroscopy and Spectrometry: Volume Two is an authoritative and up-to-date compendium of the diverse applications for portable spectrometers across numerous disciplines. Whereas Volume One focuses on the specific technologies of the portable spectrometers themselves, Volume Two explores the use of portable instruments in wide range of fields, including pharmaceutical development, clinical research, food analysis, forensic science, geology, astrobiology, cultural heritage and archaeology. Volume Two features contributions by a multidisciplinary team of experts with hands-on experience using portable instruments in their respective areas of expertise. Organized both by instrumentation type and by scientific or technical discipline, 21 detailed chapters cover various applications of portable ion mobility spectrometry (IMS), infrared and near-infrared (NIR) spectroscopy, Raman and x-ray fluorescence (XRF) spectroscopy, smartphone spectroscopy, and many others. Filling a significant gap in literature on the subject, the second volume of Portable Spectroscopy and Spectrometry: Features a significant amount of content published for the first time, or not available in existing literature Brings together work by authors with assorted backgrounds and fields of study Discusses the central role of applications in portable instrument development Covers the algorithms, calibrations, and libraries that are of critical importance to successful applications of portable instruments Includes chapters on portable spectroscopy applications in areas such as the military, agriculture and feed, hazardous materials (HazMat), art conservation, and environmental science Portable Spectroscopy and Spectrometry: Volume Two is an indispensable resource for developers of portable instruments in universities, research institutes, instrument companies, civilian and government purchasers, trainers, operators of portable instruments, and educators and students in portable spectroscopy courses.

MOEMS

MOEMS
Author: M. Edward Motamedi
Publisher: SPIE Press
Total Pages: 640
Release: 2005
Genre: Technology & Engineering
ISBN: 9780819450210
GET BOOK

This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.

Mems/Nems

Mems/Nems
Author: Cornelius T. Leondes
Publisher: Springer Science & Business Media
Total Pages: 2142
Release: 2007-10-08
Genre: Technology & Engineering
ISBN: 0387257861
GET BOOK

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Mems for Biomedical Applications

Mems for Biomedical Applications
Author: Shekhar Bhansali
Publisher: Elsevier
Total Pages: 511
Release: 2012-07-18
Genre: Technology & Engineering
ISBN: 0857096273
GET BOOK

The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

Advanced MEMS/NEMS Fabrication and Sensors

Advanced MEMS/NEMS Fabrication and Sensors
Author: Zhuoqing Yang
Publisher: Springer Nature
Total Pages: 312
Release: 2021-10-12
Genre: Technology & Engineering
ISBN: 303079749X
GET BOOK

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

Optical MEMS

Optical MEMS
Author: Huikai Xie
Publisher: MDPI
Total Pages: 176
Release: 2019-08-06
Genre: Technology & Engineering
ISBN: 3039213032
GET BOOK

This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines

Advances in Gyroscope Technologies

Advances in Gyroscope Technologies
Author: Mario N. Armenise
Publisher: Springer Science & Business Media
Total Pages: 123
Release: 2010-11-22
Genre: Technology & Engineering
ISBN: 3642154948
GET BOOK

This monograph collects and critically reviews the main results obtained by the scientific community in gyroscope technologies research field. It describes architectures, design techniques and fabrication technology of angular rate sensors proposed in literature. MEMS, MOEMS, optical and mechanical technologies are discussed together with achievable performance. The book also consideres future research trends aimed to cover special applications. The book is intended for researchers and Ph.D. students interested in modelling, design and fabrication of gyros. The book may be a useful education support in some university courses focused on gyro technologies.

Micromanufacturing Engineering and Technology

Micromanufacturing Engineering and Technology
Author: Yi Qin
Publisher: William Andrew
Total Pages: 429
Release: 2010-07-02
Genre: Technology & Engineering
ISBN: 081551980X
GET BOOK

Micromanufacturing Engineering and Technology presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. - Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control - Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication - Outlines system engineering issues pertaining to handling, metrology, testing, integration and software - Explains widely used micro parts in bio / medical industry, information technology and automotive engineering - Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

Portable Spectroscopy and Spectrometry, Technologies and Instrumentation

Portable Spectroscopy and Spectrometry, Technologies and Instrumentation
Author: Richard A. Crocombe
Publisher: John Wiley & Sons
Total Pages: 608
Release: 2021-03-31
Genre: Science
ISBN: 1119636337
GET BOOK

Provides complete and up-to-date coverage of the foundational principles, enabling technologies, and specific instruments of portable spectrometry Portable Spectroscopy and Spectrometry: Volume One is both a timely overview of the miniature technologies used in spectrometry, and an authoritative guide to the specific instruments employed in a wide range of disciplines. This much-needed resource is the first comprehensive work to describe the enabling technologies of portable spectrometry, explain how various handheld and portable instruments work, discuss their potential limitations, and provide clear guidance on optimizing their utility and accuracy in the field. In-depth chapters—written by a team of international authors from a wide range of disciplinary backgrounds—have been carefully reviewed both by the editors and by third-party experts to ensure their quality and completeness. Volume One begins with general discussion of portable spectrometer engineering before moving through the electromagnetic spectrum to cover x-ray fluorescence (XRF), UV-visible, near-infrared, mid-infrared, and Raman spectroscopies. Subsequent chapters examine microplasmas, laser induced breakdown spectroscopy (LIBS), nuclear magnetic resonance (NMR) spectroscopy, and a variety of portable mass spectrometry instrument types. Featuring detailed chapters on DNA instrumentation and biological analyzers—topics of intense interest in light of the global coronavirus pandemic—this timely volume: Provides comprehensive coverage of the principles and instruments central to portable spectroscopy Includes contributions by experienced professionals working in instrument companies, universities, research institutes, the military, and hazardous material teams Discusses special topics such as smartphone spectroscopy, optical filter technology, stand-off detection, and MEMS/MOEMS technology Covers elemental spectroscopy, optical molecular spectroscopy, mass spectrometry, and molecular and imaging technologies Portable Spectroscopy and Spectrometry: Volume One is an indispensable resource for developers of portable instruments, civilian and government purchasers and operators, and teachers and students of portable spectroscopy. When combined with Volume Two, which focuses on the multitude of applications of portable instrumentation, Portable Spectroscopy and Spectrometry provides the most thorough coverage of the field currently available.