MEMS and Nanotechnology, Volume 2

MEMS and Nanotechnology, Volume 2
Author: Tom Proulx
Publisher: Springer Science & Business Media
Total Pages: 272
Release: 2011-03-24
Genre: Technology & Engineering
ISBN: 1441988254

This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical Systems and Nanotechnology. It presents early findings from experimental and computational investigations on MEMS and Nanotechnology including contributions on Nanomechanical Standards, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for Energy Harvesting, and Linear and Nonlinear Mass Sensing.

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Author: Marc J. Madou
Publisher: CRC Press
Total Pages: 1983
Release: 2018-12-14
Genre: Technology & Engineering
ISBN: 1482274663

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Manufacturing Techniques for Microfabrication and Nanotechnology

Manufacturing Techniques for Microfabrication and Nanotechnology
Author: Marc J. Madou
Publisher: CRC Press
Total Pages: 672
Release: 2011-06-13
Genre: Technology & Engineering
ISBN: 1420055194

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications

From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications
Author: Marc J. Madou
Publisher: CRC Press
Total Pages: 650
Release: 2011
Genre: TECHNOLOGY & ENGINEERING
ISBN: 9780429109218

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms.

Advanced Micro- and Nano-manufacturing Technologies

Advanced Micro- and Nano-manufacturing Technologies
Author: Shrikrishna Nandkishor Joshi
Publisher: Springer Nature
Total Pages: 404
Release: 2021-10-01
Genre: Technology & Engineering
ISBN: 9811636451

This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The contents of this volume provide comprehensive coverage of the physical principles of advanced manufacturing technologies and the know-how of their applications in the fabrication of biomedical devices and systems. The book begins by documenting the journey of miniaturization and micro-and nano-fabrication. It then delves into the fundamentals of various advanced technologies such as micro-wire moulding, 3D printing, lithography, imprinting, direct laser machining, and laser-induced plasma-assisted machining. It also covers laser-based technologies which are a promising option due to their flexibility, ease in control and application, high precision, and availability. These technologies can be employed to process several materials such as glass, polymers: polycarbonate, polydimethylsiloxane, polymethylmethacrylate, and metals such as stainless steel, which are commonly used in the fabrication of biomedical devices, such as microfluidic technology, optical and fiber-optic sensors, and electro-chemical bio-sensors. It also discusses advancements in various MEMS/NEMS based technologies and their applications in energy conversion and storage devices. The chapters are written by experts from the fields of micro- and nano-manufacturing, materials engineering, nano-biotechnology, and end-users such as clinicians, engineers, academicians of interdisciplinary background. This book will be a useful guide for academia and industry alike.

Encyclopedia of Nanotechnology

Encyclopedia of Nanotechnology
Author: Elwood D. Carlson
Publisher:
Total Pages: 0
Release: 2009
Genre: Nanotechnology
ISBN: 9781606920794

Nanotechnology is a "catch-all" description of activities at the level of atoms and molecules that have applications in the real world. A nanometre is a billionth of a meter, about 1/80,000 of the diameter of a human hair, or 10 times the diameter of a hydrogen atom. Nanotechnology is now used in precision engineering, new materials development as well as in electronics; electromechanical systems as well as mainstream biomedical applications in areas such as gene therapy, drug delivery and novel drug discovery techniques. This book presents new and important research advances from around the globe.

MEMS and Nanotechnology, Volume 5

MEMS and Nanotechnology, Volume 5
Author: Gordon Shaw III
Publisher: Springer Science & Business Media
Total Pages: 135
Release: 2013-09-17
Genre: Technology & Engineering
ISBN: 3319007807

MEMS and Nanotechnology, Volume 5: Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics, the fifth volume of eight from the Conference, brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on a wide range of areas, including: Microelectronics Packaging Single Atom/Molecule Mechanical Testing MEMS Devices & Fabrication In-Situ Mechanical Testing Nanoindentation Experimental Analysis of Low-Dimensional Materials for Nanotechnology

Advanced MEMS/NEMS Fabrication and Sensors

Advanced MEMS/NEMS Fabrication and Sensors
Author: Zhuoqing Yang
Publisher: Springer Nature
Total Pages: 312
Release: 2021-10-12
Genre: Technology & Engineering
ISBN: 303079749X

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

Enabling Technology for MEMS and Nanodevices

Enabling Technology for MEMS and Nanodevices
Author: Henry Baltes
Publisher: John Wiley & Sons
Total Pages: 441
Release: 2013-03-27
Genre: Technology & Engineering
ISBN: 3527675043

Mikro- und Nanotechnik haben Wissenschaft und Forschung revolutioniert. In Zukunft werden sie auch den Alltag verändern. Nun liegt der erste Band einer neuen Buchreihe vor: Advanced Micro and Nano Systems 1. Henry Baltes und seine Co-Autoren knüpfen mit AMN an die Sensors Update-Reihe an. Das Autorenteam wurde um weitere Experten erweitert. AMN wird zwei Mal pro Jahr mit einem neuen Band die aktuellen Entwicklungen in der Mikro- und Nano-Welt begleiten. Die Erforschung und der Einsatz von Mikro- und Nanosystemen sind eines der brandaktuellen Themen im Wissenschaftsbereich. Die Forschungsergebnisse werden mehr und mehr auch konkret umgesetzt. Damit werden Mikro- und Nanotechnologie zu Wirtschaftsfaktoren. Aktuelle Entwicklungen, neue Technologien, Nano-Bauelemente und Systeme im Mikromaßstab - Advanced Micro and Nano Systems, die neue Buchreihe, wird Spiegel der spannenden und faszinierenden Mikro- und Nano-Welt sein. Zweimal pro Jahr wird es einen neuen AMN-Band geben. Die Autoren sind ausgewiesene Spezialisten. Zu den Herausgebern zählt Henry Baltes, Professor an der ETH Zürich. Er zeichnete bereits für die Bände der Sensors Update-Reihe verantwortlich. Die Artikel ermöglichen Neueinsteigern einen ersten Zugriff auf die Materie. Fachleute erhalten einen umfassenden Überblick. Anspruch der Herausgeber ist es, nicht nur die theoretischen Grundlagen von Mikro- und Nanosystemen zu reflektieren, sondern immer auch praktische Möglichkeiten und die Grenzen der Anwendung im Blick zu haben. Die AMN-Bände sind Handbücher und Nachschlagewerke in einem. Die Reihe richtet sich an Vertreter unterschiedlicher Fachrichtungen: Biologie, Chemie, Mathematik, Sensorindustrie und Materialwissenschaften.