Introductory MEMS

Introductory MEMS
Author: Thomas M. Adams
Publisher: Springer Science & Business Media
Total Pages: 447
Release: 2009-12-08
Genre: Technology & Engineering
ISBN: 038709511X

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

Introductory MEMS

Introductory MEMS
Author: Thomas M. Adams
Publisher: Springer
Total Pages: 444
Release: 2008-11-01
Genre: Technology & Engineering
ISBN: 9780387560588

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

An Introduction to Microelectromechanical Systems Engineering

An Introduction to Microelectromechanical Systems Engineering
Author: Nadim Maluf
Publisher: Artech House
Total Pages: 312
Release: 2004
Genre: Technology & Engineering
ISBN: 9781580535915

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

MEMS Product Development

MEMS Product Development
Author: Alissa M. Fitzgerald
Publisher: Springer Nature
Total Pages: 282
Release: 2021-03-16
Genre: Technology & Engineering
ISBN: 3030617092

Drawing on their experiences in successfully executing hundreds of MEMS development projects, the authors present the first practical guide to navigating the technical and business challenges of MEMS product development, from the initial concept stage all the way to commercialization. The strategies and tactics presented, when practiced diligently, can shorten development timelines, help avoid common pitfalls, and improve the odds of success, especially when resources are limited. MEMS Product Development illuminates what it really takes to develop a novel MEMS product so that innovators, designers, entrepreneurs, product managers, investors, and executives may properly prepare their companies to succeed.

Handbook of Mems for Wireless and Mobile Applications

Handbook of Mems for Wireless and Mobile Applications
Author: Deepak Uttamchandani
Publisher: Elsevier
Total Pages: 640
Release: 2013-08-31
Genre: Technology & Engineering
ISBN: 0857098616

The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. - Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications - Discusses wireless techniques and applications of wireless MEMS, including biomedical applications - Describes monitoring structures and the environment with wireless MEMS

A Guide to Hands-on MEMS Design and Prototyping

A Guide to Hands-on MEMS Design and Prototyping
Author: Joel A. Kubby
Publisher: Cambridge University Press
Total Pages: 195
Release: 2011-08-25
Genre: Technology & Engineering
ISBN: 1139498800

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

Analysis and Design Principles of MEMS Devices

Analysis and Design Principles of MEMS Devices
Author: Minhang Bao
Publisher: Elsevier
Total Pages: 327
Release: 2005-04-12
Genre: Technology & Engineering
ISBN: 008045562X

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.

When AIAA Meets IEEE

When AIAA Meets IEEE
Author: Franklin Li Duan
Publisher: Springer Nature
Total Pages: 384
Release: 2023-02-23
Genre: Technology & Engineering
ISBN: 9811983941

This book is about the cooperation of AIAA and IEEE, two major engineering organizations from two distinct focus points of technologies: intelligent aero-engine and electrified aviation. AIAA and IEEE both have their intrinsic needs for each other and their co-working is a must-have in the rest of 21st century. AIAA needs IEEE to become smarter and greener and IEEE needs a much broader scope to enlarge its marketplace and playground. The topics related to AIAA's and IEEE's co-project are highly multi- and inter-disciplinary related and highly goal-oriented. The target audience of this book is IEEE, AIAA members and other related professionals from universities, industries and institutes in the fields of AI-driven smart systems and electric airplanes with the associated new electric aero-engines and mobile aviation electric powers. The key contents When AIAA is Meeting IEEE AIAA vs. IEEE How to interact and what to achieve The mindset analysis of AIAA and IEEE The smarter AIAA The AI - Smart brain, IoT, e-devices The smart sensors for AIAA -scenarios, fabrication, challenges, and testings Electric aviation Versatile, smarter, and green The evolution of aero-engines - pistol, gas turbine, electric aero-engine The integration of aero-engines and aero-craft Delta VTOLer and STOL for B787 Rotatable wing and VTOL operation The RDF jet – a new electric aero-engine The features: small, light, thrust The architecture: motor, fan, jet The principle: rim driven, Tai Chi fan, duct, and jet Aviation electric power grid Energy and weight Battery, LTG, and 3D HK SC