Infrared Spectroscopic Ellipsometry
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| Author | : Mathias Schubert |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 216 |
| Release | : 2004-11-26 |
| Genre | : Science |
| ISBN | : 9783540232490 |
The study of semiconductor-layer structures using infrared ellipsometry is a rapidly growing field within optical spectroscopy. This book offers basic insights into the concepts of phonons, plasmons and polaritons, and the infrared dielectric function of semiconductors in layered structures. It describes how strain, composition, and the state of the atomic order within complex layer structures of multinary alloys can be determined from an infrared ellipsometry examination. Special emphasis is given to free-charge-carrier properties, and magneto-optical effects. A broad range of experimental examples are described, including multinary alloys of zincblende and wurtzite structure semiconductor materials, and future applications such as organic layer structures and highly correlated electron systems are proposed.
| Author | : Arnulf Röseler |
| Publisher | : VCH |
| Total Pages | : 168 |
| Release | : 1990 |
| Genre | : Ellipsometry |
| ISBN | : |
| Author | : Harland G. Tompkins |
| Publisher | : Momentum Press |
| Total Pages | : 138 |
| Release | : 2015-12-16 |
| Genre | : Technology & Engineering |
| ISBN | : 1606507281 |
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
| Author | : Hiroyuki Fujiwara |
| Publisher | : John Wiley & Sons |
| Total Pages | : 388 |
| Release | : 2007-09-27 |
| Genre | : Technology & Engineering |
| ISBN | : 9780470060186 |
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
| Author | : Maria Losurdo |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 740 |
| Release | : 2013-03-12 |
| Genre | : Technology & Engineering |
| ISBN | : 3642339565 |
This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
| Author | : Mitsuo Tasumi |
| Publisher | : John Wiley & Sons |
| Total Pages | : 403 |
| Release | : 2014-11-17 |
| Genre | : Science |
| ISBN | : 047066567X |
Infrared spectroscopy is generally understood to mean the science of spectra relating to infrared radiation, namely electromagnetic waves, in the wavelength region occurring intermediately between visible light and microwaves. Measurements of infrared spectra have been providing useful information, for a variety of scientific research and industrial studies, for over half a century; this is set to continue in the foreseeable future. Introduction to Experimental Infrared Spectroscopy is intended to be a handy guide for those who have no, or limited, experience in infrared spectroscopic measurements but are utilising infrared-related methods for their research or in practical applications. Written by leading researchers and experienced practitioners, this work consists of 22 chapters and presents the basic theory, methodology and practical measurement methods, including ATR, photoacoustic, IR imaging, NIR, 2D-COS, and VCD. The six Appendices will aid readers in understanding the concepts presented in the main text. Written in an easy-to-understand way this book is suitable for students, researchers and technicians working with infrared spectroscopy and related methods.
| Author | : R. M. A. Azzam |
| Publisher | : North Holland |
| Total Pages | : 570 |
| Release | : 1987 |
| Genre | : Science |
| ISBN | : |
Ellipsometry is a unique optical technique of great sensitivity for in situ non-destructive characterization of surface (inter-facial) phenomena (reactions) utilizing the change in the state of polarization of a light-wave probe. Although known for almost a century, the use of ellipsometry has increased rapidly in the last two decades. Among the most significant recent developments are new applications, novel and automated instrumentation and techniques for error-free data analysis. This book provides the necessary analytical and experimental tools needed for competent understanding and use of these developments. It is directed to those who are already working in the field and, more importantly, to the newcomer who would otherwise have to sift through several hundred published papers. The authors first present a comprehensive study of the different mathematical representations of polarized light and how such light is processed by optical systems, going on to show how these tools are applied to the analysis of ellipsometer systems. To relate ellipsometric measurements to surface properties, use is then made of electromagnetic theory. Experimental techniques and apparatus are described and the many interesting applications of ellipsometry to surface and thin-film phenomena are reviewed. This reference work is addressed to researchers and students with a strong interest in surface and thin-film physics and optics and their applications. It is a must for libraries in the fields of solid state physics, physical chemistry, electro-chemistry, metallurgy and optical engineering.
| Author | : Karsten Hinrichs |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 369 |
| Release | : 2013-10-24 |
| Genre | : Science |
| ISBN | : 3642401287 |
Ellipsometry is the method of choice to determine the properties of surfaces and thin films. It provides comprehensive and sensitive characterization in contactless and non-invasive measurements. This book gives a state-of-the-art survey of ellipsometric investigations of organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. In conjunction with the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices and fabrication advances, the ellipsometric analysis of their optical and material properties has progressed rapidly in the recent years.
| Author | : Pierre-Richard Dahoo |
| Publisher | : John Wiley & Sons |
| Total Pages | : 322 |
| Release | : 2021-10-26 |
| Genre | : Science |
| ISBN | : 1786306522 |
This book, Volume 4 in the series, is dedicated to the relationship between laboratory spectroscopy, recording ever-more-complex spectra using increasingly powerful instruments benefiting from the latest technology, and the development of observation using instruments that are embedded in mobile probes or nanosatellites. The theoretical models described in Volumes 1, 2 and 3 are used in this volume, applying the cumulant theorem in the mean-field theory framework to interpret the near and mid-infrared spectra of symmetric top molecules, such as ammonia (NH3) and spherical molecules, such as methane (CH4). These molecules can be isolated in their gaseous form or subjected to the environmental constraints of a nano-cage (a substitution site, clathrate, fullerene or zeolite) or surfaces. These methods are not only valuable in the fields of environmental sciences, planetology and astrophysics, but also fit into the framework of data processing and the concept of Big Data.
| Author | : Yukihiro Ozaki |
| Publisher | : John Wiley & Sons |
| Total Pages | : 500 |
| Release | : 2021-10-29 |
| Genre | : Science |
| ISBN | : 3527830324 |
An insightful exploration of cutting-edge spectroscopic techniques in polymer characterization In Spectroscopic Techniques for Polymer Characterization: Methods, Instrumentation, Applications, a team of distinguished chemists delivers a comprehensive exploration of the vast potential of spectroscopic characterization techniques in polymer research. The book offers a concise outline of the principles, advantages, instrumentation, experimental techniques, and noteworthy applications of cutting-edge spectroscopy. Covering a wide range of polymers, from nylon to complex polymeric nanocomposites, the author presents recent developments in polymer science to polymer, analytical, and material chemists, assisting them in keeping track of the progress in modern spectroscopy. Spectroscopic Techniques for Polymer Characterization contains contributions from pioneers in modern spectroscopic techniques from around the world. The included materials bridge the gap between spectroscopists, polymer scientists, and engineers in academia and industry. The book also offers: A thorough introduction to the progress in spectroscopic techniques, including polymer spectroscopy and near-infrared spectroscopy Comprehensive explorations of topical polymers studied by spectroscopy, including polymer thin films, fluoropolymers, polymer solutions, conductive polymers Practical discussions of infrared imaging, near-infrared imaging, two-dimensional correlation spectroscopy, and far-ultraviolet spectroscopy In-depth examinations of spectroscopic studies of weak hydrogen bonding in polymers Spectroscopic Techniques for Polymer Characterization: Methods, Instrumentation, Applications is a must-read reference for polymer, analytical, and physical chemists, as well as materials scientists and spectroscopists seeking a one-stop resource for polymer characterization using spectroscopic analyses.
