Silicon Sensors and Actuators

Silicon Sensors and Actuators
Author: Benedetto Vigna
Publisher: Springer Nature
Total Pages: 988
Release: 2022-04-12
Genre: Technology & Engineering
ISBN: 3030801357

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

Piezoelectric MEMS Resonators

Piezoelectric MEMS Resonators
Author: Harmeet Bhugra
Publisher: Springer
Total Pages: 423
Release: 2017-01-09
Genre: Technology & Engineering
ISBN: 3319286889

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Smart Sensors and MEMS

Smart Sensors and MEMS
Author: S Nihtianov
Publisher: Woodhead Publishing
Total Pages: 606
Release: 2018-02-27
Genre: Technology & Engineering
ISBN: 0081020562

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications

CMOS - MEMS

CMOS - MEMS
Author: Henry Baltes
Publisher: John Wiley & Sons
Total Pages: 612
Release: 2008-07-11
Genre: Technology & Engineering
ISBN: 3527616934

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

Fundamentals of Nanomechanical Resonators

Fundamentals of Nanomechanical Resonators
Author: Silvan Schmid
Publisher: Springer
Total Pages: 183
Release: 2016-06-21
Genre: Technology & Engineering
ISBN: 3319286919

This authoritative book introduces and summarizes the latest models and skills required to design and fabricate nanomechanical resonators with a focus on nanomechanical sensing. It also establishes the theoretical foundation for courses on micro and nanomechanics. This book takes an applied approach to nanomechanics, providing a complete set of mechanical models, including strings and membrane resonators. Also discussed are quality factors, noise issues, transduction techniques, nanomechanical sensing, fabrication techniques, and applications for all common nanomechanical resonator types. It is an ideal book for students and researchers working with micro and nanomechanical resonators.

Piezoelectric Transducers and Applications

Piezoelectric Transducers and Applications
Author: Antonio Arnau
Publisher: Springer Science & Business Media
Total Pages: 348
Release: 2004
Genre: Technology & Engineering
ISBN: 9783540209980

Piezoelectric Transducers and Applications provides a guide for graduate students and researchers to the current state of the art of this complex and multidisciplinary area. The book fills an urgent need for a unified source of information on piezoelectric devices and their astounding variety of existing and emerging applications. Some of the chapters focus more on the basic concepts of the different disciplines involved and are presented in a didactic manner. Others go deeper into the complex aspects of specific fields of research, thus reaching the technical level of a scientific paper. Among other topics resonant sensors, especially bulk acoustic wave thickness shear mode resonators, chemical and bio-sensors, as well as broadband ultrasonic systems are treated in-depth.

Nanotechnology-Enabled Sensors

Nanotechnology-Enabled Sensors
Author: Kourosh Kalantar-zadeh
Publisher: Springer Science & Business Media
Total Pages: 502
Release: 2007-09-19
Genre: Technology & Engineering
ISBN: 0387680233

Nanotechnology provides tools for creating functional materials, devices, and systems by controlling materials at the atomic and molecular scales and making use of novel properties and phenomena. Nanotechnology-enabled sensors find applications in several fields such as health and safety, medicine, process control and diagnostics. This book provides the reader with information on how nanotechnology enabled sensors are currently being used and how they will be used in the future in such diverse fields as communications, building and facilities, medicine, safety, and security, including both homeland defense and military operations.

Social Transformation – Digital Way

Social Transformation – Digital Way
Author: Jyotsna Kumar Mandal
Publisher: Springer
Total Pages: 749
Release: 2018-08-23
Genre: Computers
ISBN: 9811313431

This book constitutes the refereed proceedings of the 52nd Annual Convention of the Computer Society of India, CSI 2017, held in Kolkata, India, in January 2018. The 59 revised papers presented were carefully reviewed and selected from 157 submissions. The theme of CSI 2017, Social Transformation – Digital Way, was selected to highlight the importance of technology for both central and state governments at their respective levels to achieve doorstep connectivity with its citizens. The papers are organized in the following topical sections: Signal processing, microwave and communication engineering; circuits and systems; data science and data analytics; bio computing; social computing; mobile, nano, quantum computing; data mining; security and forensics; digital image processing; and computational intelligence.

Transducers and Arrays for Underwater Sound

Transducers and Arrays for Underwater Sound
Author: Charles Sherman
Publisher: Springer Science & Business Media
Total Pages: 610
Release: 2007-01-05
Genre: Technology & Engineering
ISBN: 0387331395

The most comprehensive book on electroacoustic transducers and arrays for underwater sound Includes transducer modeling techniques and transducer designs that are currently in use Includes discussion and analysis of array interaction and nonlinear effects in transducers Contains extensive data in figures and tables needed in transducer and array design Written at a level that will be useful to students as well as to practicing engineers and scientists