He Mechanical Properties Of Amorphous Silicon Carbide Films Deposited By Pecvd And Rf Sputtering For Application As A Structural Layer In Microbridge Based Rf Mems
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| Author | : Rocco John Parro (III.) |
| Publisher | : |
| Total Pages | : 124 |
| Release | : 2010 |
| Genre | : |
| ISBN | : |
The purpose of this thesis was to characterize the relevant mechanical properties of amorphous silicon carbide in order to evaluate its application to microbridge-based RF MEMS switches. For the study, Young's modulus and residual stress were determined by load deflection testing of bulk micromachined thin film diaphragms of SiC deposited by plasma-enhanced chemical vapor deposition (PECVD) and radio-frequency magnetron sputtering. The effects of film thickness, a silicon or silicon dioxide substrate material, and metallization with chromium and gold on the values of Young's modulus and residual stress were quantified for 300 and 500 nm-thick PECVD SiC films annealed at 450 @C. For bi-layered, 500 nm-thick sputtered SiC films on silicon, the effects of thermal annealing at 350@C and 450@C on the values of Young's modulus, residual stress, and Poisson's ratio were determined.
| Author | : Tiong Yew Ong |
| Publisher | : |
| Total Pages | : 296 |
| Release | : 1998 |
| Genre | : Semiconductors |
| ISBN | : |
| Author | : |
| Publisher | : |
| Total Pages | : |
| Release | : 1975 |
| Genre | : |
| ISBN | : |
| Author | : Mariana Amorim Fraga |
| Publisher | : |
| Total Pages | : 0 |
| Release | : 2011 |
| Genre | : Amorphous semiconductors |
| ISBN | : 9781613247747 |
Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.
| Author | : James B. Summers |
| Publisher | : |
| Total Pages | : 208 |
| Release | : 2007 |
| Genre | : |
| ISBN | : |
| Author | : Kok Weng Lam (ld) |
| Publisher | : |
| Total Pages | : 70 |
| Release | : 2009 |
| Genre | : |
| ISBN | : |
| Author | : Jay S. Mitchell |
| Publisher | : |
| Total Pages | : 254 |
| Release | : 2001 |
| Genre | : |
| ISBN | : |
| Author | : Christopher L. Muhlstein |
| Publisher | : ASTM International |
| Total Pages | : 333 |
| Release | : 2001 |
| Genre | : Gold films |
| ISBN | : 0803128894 |
Recent advances in the mechanical properties of structural films are described in these papers from a November 2000 symposium held in Orlando, Florida. Papers are organized in sections on fracture and fatigue of structural films, elastic behavior and residual stress in thin films, tensile testing of
| Author | : Mahmud M. Rahman |
| Publisher | : |
| Total Pages | : 256 |
| Release | : 1989 |
| Genre | : Silicon carbide |
| ISBN | : |
| Author | : Reza Ghodssi |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 1211 |
| Release | : 2011-03-18 |
| Genre | : Technology & Engineering |
| ISBN | : 0387473181 |
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
