Handbook of Thin-film Deposition Processes and Techniques

Handbook of Thin-film Deposition Processes and Techniques
Author: Krishna Seshan
Publisher:
Total Pages: 629
Release: 2002
Genre: Chemical vapor deposition
ISBN: 9786612253195

The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook of Thin Film Technology

Handbook of Thin Film Technology
Author: Hartmut Frey
Publisher: Springer Science & Business Media
Total Pages: 385
Release: 2015-05-06
Genre: Technology & Engineering
ISBN: 3642054307

“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Optical Thin Films

Optical Thin Films
Author: James D. Rancourt
Publisher: SPIE Press
Total Pages: 308
Release: 1996
Genre: Science
ISBN: 9780819422859

Practical, user-oriented reference for engineers who must incorporate and specify coatings for filters, antiglare effects, polarization, or other purposes in optical or electro-optical systems design. It focuses on preparation techniques and characteristics of commercially available products and provides information needed to determine what type of filter is needed to solve a particular problem, what its limitations are, and how to care for it.

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
Author: Kiyotaka Wasa
Publisher: William Andrew
Total Pages: 657
Release: 2012-12-31
Genre: Technology & Engineering
ISBN: 1437734847

This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. - A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available - All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique - 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere

Handbook of Crystal Growth

Handbook of Crystal Growth
Author: Tom Kuech
Publisher: Elsevier
Total Pages: 1384
Release: 2014-11-02
Genre: Science
ISBN: 0444633057

Volume IIIA Basic TechniquesHandbook of Crystal Growth, Second Edition Volume IIIA (Basic Techniques), edited by chemical and biological engineering expert Thomas F. Kuech, presents the underpinning science and technology associated with epitaxial growth as well as highlighting many of the chief and burgeoning areas for epitaxial growth. Volume IIIA focuses on major growth techniques which are used both in the scientific investigation of crystal growth processes and commercial development of advanced epitaxial structures. Techniques based on vacuum deposition, vapor phase epitaxy, and liquid and solid phase epitaxy are presented along with new techniques for the development of three-dimensional nano-and micro-structures.Volume IIIB Materials, Processes, and TechnologyHandbook of Crystal Growth, Second Edition Volume IIIB (Materials, Processes, and Technology), edited by chemical and biological engineering expert Thomas F. Kuech, describes both specific techniques for epitaxial growth as well as an array of materials-specific growth processes. The volume begins by presenting variations on epitaxial growth process where the kinetic processes are used to develop new types of materials at low temperatures. Optical and physical characterizations of epitaxial films are discussed for both in situ and exit to characterization of epitaxial materials. The remainder of the volume presents both the epitaxial growth processes associated with key technology materials as well as unique structures such as monolayer and two dimensional materials.Volume IIIA Basic Techniques - Provides an introduction to the chief epitaxial growth processes and the underpinning scientific concepts used to understand and develop new processes. - Presents new techniques and technologies for the development of three-dimensional structures such as quantum dots, nano-wires, rods and patterned growth - Introduces and utilizes basic concepts of thermodynamics, transport, and a wide cross-section of kinetic processes which form the atomic level text of growth process Volume IIIB Materials, Processes, and Technology - Describes atomic level epitaxial deposition and other low temperature growth techniques - Presents both the development of thermal and lattice mismatched streams as the techniques used to characterize the structural properties of these materials - Presents in-depth discussion of the epitaxial growth techniques associated with silicone silicone-based materials, compound semiconductors, semiconducting nitrides, and refractory materials

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
Author: Peter M. Martin
Publisher: William Andrew
Total Pages: 932
Release: 2009-12-01
Genre: Technology & Engineering
ISBN: 0815520328

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.

Thin Film Technology Handbook

Thin Film Technology Handbook
Author: Aicha Elshabini
Publisher: McGraw Hill Professional
Total Pages: 680
Release: 1998
Genre: Electronic packaging
ISBN: 9780070190252

The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in multichip modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use. It provides and develops design guidelines to realize multilayer structures in microcircuits, thus addressing a critical and rapidly growing area.

Handbook of Thin Film Deposition

Handbook of Thin Film Deposition
Author: Krishna Seshan
Publisher: William Andrew
Total Pages: 472
Release: 2018-02-23
Genre: Technology & Engineering
ISBN: 0128123125

Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. - Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes - Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries - Features a new chapter discussing Gates Dielectrics

Handbook of Infrared Spectroscopy of Ultrathin Films

Handbook of Infrared Spectroscopy of Ultrathin Films
Author: Valeri P. Tolstoy
Publisher: John Wiley & Sons
Total Pages: 710
Release: 2003-07-21
Genre: Technology & Engineering
ISBN: 0471461830

Because of the rapid increase in commercially available Fouriertransform infrared spectrometers and computers over the past tenyears, it has now become feasible to use IR spectrometry tocharacterize very thin films at extended interfaces. At the sametime, interest in thin films has grown tremendously because ofapplications in microelectronics, sensors, catalysis, andnanotechnology. The Handbook of Infrared Spectroscopy of UltrathinFilms provides a practical guide to experimental methods,up-to-date theory, and considerable reference data, critical forscientists who want to measure and interpret IR spectra ofultrathin films. This authoritative volume also: Offers informationneeded to effectively apply IR spectroscopy to the analysis andevaluation of thin and ultrathin films on flat and rough surfacesand on powders at solid-gaseous, solid-liquid, liquid-gaseous,liquid-liquid, and solid-solid interfaces. Provides full discussion of theory underlying techniques Describes experimental methods in detail, including optimumconditions for recording spectra and the interpretation ofspectra Gives detailed information on equipment, accessories, andtechniques Provides IR spectroscopic data tables as appendixes, includingthe first compilation of published data on longitudinal frequenciesof different substances Covers new approaches, such as Surface Enhanced IR spectroscopy(SEIR), time-resolved FTIR spectroscopy, high-resolutionmicrospectroscopy and using synchotron radiation