Guided-mode Resonant Filters and Reflectors

Guided-mode Resonant Filters and Reflectors
Author: Manoj Niraula
Publisher:
Total Pages: 110
Release: 2016
Genre: Electric filters
ISBN:

Thin-film structures incorporating wavelength-scale gratings provide functionalities for applications in various optical systems. Previously, spectral filters, wideband reflectors, and polarizers have been identified as potential application areas. In this dissertation, we overview the operational principles of these resonant periodic structures, discuss the methods of their design and fabrication, and propose and demonstrate novel functionalities for spatial and spectral filtering, and unpolarized wideband reflection. Fashioned with materially sparse gratings, these optical devices are easy to fabricate and integration friendly compared to their traditional multi-layer counterparts making their research and development critical for practical applications. We study, theoretically, modal properties and parametric dependence of resonant periodic bandpass filters operating in the mid- and near-infrared spectral domains. We investigate three different device architectures consisting of single, double, and triple layers based on all-transparent dielectric and semiconductor thin films. The three device classes show high-performance bandpass filter profiles with broad, flat low-transmission sidebands accommodating sharp transmission peaks with their efficiencies approaching 100% with appropriate blending of multiple guided modes. We present three modal coupling configurations forming complex mixtures of two or three distinct leaky modes coupling at different evanescent diffraction orders. These modal compositions produce various widths of sidebands ranging from ~30 nm to ~2100 nm and transmission peak-linewidths ranging from ~1 pm to ~10 nm. Our modal analysis demonstrates key attributes of subwavelength periodic thin-film structures in multiple-modal blending to achieve desired transmission spectra. We provide the first experimental demonstration of high-efficiency and narrow-linewidth resonant bandpass filter applying a single patterned silicon layer on a quartz substrate. Its performance corresponds to bandpass filters requiring 15 traditional Si/SiO2 thin-film layers. The feasibility of sparse narrowband, high-efficiency bandpass filters with extremely wide, flat, and low sidebands is thereby demonstrated. This class of devices is designed with rigorous solutions of Maxwell's equations while engaging the physical principles of resonant waveguide gratings. An experimental filter presented exhibits a transmittance of ~72%, bandwidth of ~0.5 nm, and low sidebands spanning ~100 nm. The proposed technology is integration-friendly and opens doors for further development in various disciplines and spectral regions where thin-film solutions are traditionally applied. We demonstrate concurrent spatial and spectral filtering as a new outstanding attribute of resonant periodic devices. This functionality is enabled by a unique, near-complete, reflection state that is discrete in both angular and spectral domains and realized with carefully crafted nanogratings operating in the non-subwavelength regime. We study the pathway and inter-modal interference effects inducing this intriguing reflection state. In a proof-of-concept experiment, we obtain angular and spectral bandwidths of ~4 mrad and ~1 nm, respectively. This filter concept can be used for focus-free spectral and spatial filtering in compact holographic and interferometric optical instruments. We report unpolarized broadband reflectors enabled by a serial arrangement of a pair of polarized subwavelength gratings. Optimized with inverse numerical methods, our elemental gratings consist of a partially etched crystalline-silicon film on a quartz substrate. The resulting reflectors exhibit extremely wide spectral reflection bands in one polarization. By arranging two such reflectors sequentially with orthogonal periodicities, there results an unpolarized spectral band possessing bandwidth exceeding those of the individual polarized bands. In the experiments reported herein, we achieve zero-order reflectance exceeding 97% under unpolarized light incidence over a 500-nm-wide wavelength band in the near-infrared domain. Moreover, the resonant unpolarized broadband accommodates an ultra-high-reflection band spanning ~85 nm and exceeding 99.9% in efficiency. The elemental polarization-sensitive reflectors based on one-dimensional resonant gratings have simple design, robust performance, and are straightforward to fabricate. Hence, this technology is a promising alternative to traditional multilayer thin-film reflectors especially at longer wavelengths of light where multilayer deposition may be infeasible or impractical. We demonstrate an interesting attribute of resonant bandpass filters which is high angular stability for fully conical light incidence. Fashioning an experimental bandpass filter with a subwavelength silicon grating on a quartz substrate, we show that fully conical incidence provides an angular full-width at half-maximum linewidth of ~9.5° compared to a linewidth of ~0.1° for classical incidence. Slow angular variation of the central wavelength with full conical incidence arises via a corresponding slow angular variation of the resonant second diffraction orders driving the pertinent leaky modes. Moreover, full conical incidence maintains a profile with a single passband as opposed to the formation of two passbands characteristic of resonant subwavelength gratings under classical incidence. Our experimental results demonstrate excellent stability in angle, spectral profile, linewidth, and efficiency. Finally, we propose a novel method of design and fabrication of photonic lattices that incorporates the best of both worlds: a polarized resonant grating can be designed and converted to its unpolarized lattice equivalent using the same design parameters to obtain a similar performance. We show this in context of a single-layer polarized bandpass filter operating at 1550 nm with ~100% transmission efficiency. An unpolarized square-hole lattice with identical parameters operates as a bandpass filter at ~1560 nm with ~70% transmission efficiency. Moreover, conventional laser interference lithography technique for mask patterning is limited to circular-hole photoresist lattice. We propose a method to lay down a metal hard-mask by lifting-off patterned photoresist in two steps for a square-hole lattice. Our comprehensive study provides new principles for easy design and fabrication of square-hole photonic lattices for unpolarized guided-mode resonance applications.

Guided-mode Resonance Devices

Guided-mode Resonance Devices
Author: Wenhua Wu
Publisher:
Total Pages:
Release: 2014
Genre:
ISBN:

In this thesis, a series of guided-mode resonance (GMR) devices are developed and optimized in the optical spectral region. Some of these devices are designed by inverse algorithms such as genetic algorithm and particle swarm optimization. One-dimensional subwavelength silicon and germanium gratings providing high omnidirectional reflectivity within specific band are designed respectively for TE and TM polarization. A simple amorphous silicon waveguide grating is proposed to enhance the absorbance for solar cells by 60 percent comparing with unpatterned structure. Another presented grating absorbs light nearly totally in the [tilde] 0.3-0.6 [micrometer] wavelength band for all incidence angles independent of polarization, namely wideband omnidirectional absorber. GMR photonic sensors are also discussed and demonstrated mainly on a post analysis method that can improve the testing accuracy. It is a back-fitting model that helps to differentiate the biochemical target from outside environmental disturbers. In addition, GMR filter showing extremely narrow linewidth [tilde]10 pm is also presented.

Guided-mode Resonant Solar Cells and Flat-top Reflectors

Guided-mode Resonant Solar Cells and Flat-top Reflectors
Author: Tanzina Khaleque
Publisher:
Total Pages: 96
Release: 2014
Genre: Nanoimprint lithography
ISBN:

This dissertation addresses the guided-mode resonance (GMR) effect and its applications. In particular, this study presents theoretical analysis and corresponding experiments on two important GMR devices that can be broadly described as GMR-enabled thin-film solar cells and flat-top reflectors. The GMR-induced enhanced absorption of input light is observed and quantified in a fabricated nano-patterned amorphous silicon (a-Si) thin-film. Compared to a reference homogeneous thin-film of a-Si, approximately 50% integrated absorbance enhancement is achieved in the patterned structure. This result motivates the application of these resonance effects in thin-film solar cells where enhanced solar absorbance is a crucial requirement. Light trapping in thin-film solar cells through the GMR effect is theoretically explained and experimentally demonstrated. Nano-patterned solar cells with 300-nm periods in one-dimensional gratings are designed, fabricated, and characterized. Compared to a planar reference solar cell, around 35% integrated absorption enhancement is observed over the 450-750-nm wavelength range. This light-management method results in enhanced short-circuit current density of 14.8 mA/cm2, which is a ~40% improvement over planar solar cells. The experimental demonstration proves the potential of simple and well-designed guided-mode resonant features in thin-film solar cells. In order to complement the research on GMR thin-film solar cells, a single-step, low-cost fabrication method for generating resonant nano-grating patterns on poly-methyl-methacrylate (PMMA; plexiglas) substrates using thermal nano-imprint lithography is reported. The imprinted structures of both one and two dimensional nano-grating patterns with 300 nm period are fabricated. Thin films of indium-tin-oxide and silicon are deposited over patterned substrates and the absorbance of the films is measured. Around 25% and 45% integrated optical absorbance enhancement is observed over the 450-nm to 900-nm wavelength range in one- and two-dimensional patterned samples, respectively. In addition, two types of GMR flat-top reflectors have been designed, analyzed, fabricated and experimentally demonstrated. The first one is GMR broadband reflector in the spectral domain whereas the second is a Rayleigh reflector in the angular domain. The designed broadband reflector exhibits more than 99% reflectance over a spectral width of 380 nm ranging from 1440 to 1820 nm wavelength. Experimental reflectance greater than 90% is achieved over a ~360-nm bandwidth. The reported reflector bandwidth exceeds comparable published results for two-part periodic structures working in transverse electric polarization. In the Rayleigh reflector, the interaction of GMR and Rayleigh anomaly creates an extraordinary photonic response and results in a flat-top angularly delimited optical filter. The physical process of the rapid energy exchange between the reflected zero-order wave and a propagating substrate wave across a small angular change is investigated with numerical computations. An experimental proof of the Rayleigh reflector concept is presented. The combined GMR-Rayleigh anomaly effect holds the potential to portend a new research area of novel photonic devices with interesting and useful attributes.

Design and Fabrication of Guided-mode Resonance Devices

Design and Fabrication of Guided-mode Resonance Devices
Author: Guoliang Chen
Publisher:
Total Pages: 84
Release: 2016
Genre: Diffraction gratings
ISBN:

Guided-mode resonance (GMR) effect based on waveguide grating structure has been attracting plenty of attention in recent years due to its abundant application in energy, information technology, and sensors. This dissertation aims to develop new GMR devices and apply them in the above fields. Initially thermoelectric devices integrated with optical resonance absorbers are demonstrated. We design the absorbers with rigorous numerical methods and fashion experimental prototypes by thin-film deposition, patterning, and etching. A ~2.5-mm-thick p-type heavily doped polysilicon film on a ~2-mm layer of thermally grown SiO2 enables guided-mode resonance. The SiO2 layer additionally serves to thermally insulate the polysilicon layer from the Si substrate. A grating layer is etched into the polysilicon film to form the absorber. Thus, the polysilicon film works as a functional material for both the absorber and the thermoelectric converter itself. Numerical simulations show that the resonance segment enhances absorption by ~30% in the visible spectral range and by ~40% in the infrared range relative to unpatterned devices. Moreover, experimental results demonstrate significantly increased electrical output over reference devices. These simple devices can be applied as compact voltage generators and IR sensors. Thereafter GMR multiline devices are investigated. As a preliminary study, a glass-sub multiline guided-mode resonance (GMR) filter is applied as a reflector in order to implement an external cavity laser. We design the resonant element using rigorous numerical methods and fashion an experimental prototype by thin-film deposition, patterning, and etching. A ~100-nm TiO2 grating layer on a ~170-micrometer-thick glass slab supports thousands of resonant modes. We detect ~10 narrow resonance peaks within a ~10-nm wavelength range centered at the 840-nm wavelength. We apply this multiline GMR device to a gain chip and obtain several simultaneous resonant laser lines that compete for the gain. Precise tuning enables a stable laser line that can be selected from the multiple available resonant lines. Furthermore we investigate GMR multiline devices in more detail and with better performances. GMR multiline filters exhibiting resonance lines on a dense spectral grid in a broad near infrared (NIR) wavelength range are demonstrated. We design the filters using rigorous numerical methods and then proceed with experimental verification by patterning, etching, and collecting spectral data. In one embodiment, we design and fabricate thick Si slab-based multiline filters within a wavelength range centered at the 1550 nm with potential application in high sensitivity gas sensors and signal processing system. Devices with two types of gratings, Si grating and TiO2 grating, are demonstrated experimentally with TiO2 grating devices exhibiting better performances. For TiO2 grating devices we can detect 12 narrow resonance peaks within a 10 nm wavelength range centered at the 1550 nm. The spectral width of each resonance peak is ~0.1 nm with free spectral range of ~0.8 nm. High efficiency of ~0.9 and low sideband of ~0.01 can be obtained for individual device output. Design of polarization independent multiline filter and Brewster multiline filter are also presented. Finally, we apply GMR devices to implement the return-to-zero (RZ) and nonreturn- to-zero (NRZ) formats conversion. We realize the conversion by two solutions. For solution one RZ toNRZ conversion is done by 2 cascading filters - GMR multiline filter and Gauss filter. We simulate the complete conversion flow using MATLAB where the spectral data of the GMR multiline device is directly input into the MATLAB codes. We successfully obtained a converted NRZ signal. For solution two we prove that an individual filter possessing Gaussian shape can also realize the conversion. Furthermore we design GMR filters to possess spectral shape matched to the referred optimal FBG filter spectrum. By doing this we can theoretically prove that one individual GMR filter (reflection or transmission) can implement RZtoNRZ conversion with good performance.

Silicon Nanomembranes

Silicon Nanomembranes
Author: John A. Rogers
Publisher: John Wiley & Sons
Total Pages: 365
Release: 2016-04-08
Genre: Technology & Engineering
ISBN: 3527690999

Edited by the leaders in the fi eld, with chapters from highly renowned international researchers, this is the fi rst coherent overview of the latest in silicon nanomembrane research. As such, it focuses on the fundamental and applied aspects of silicon nanomembranes, ranging from synthesis and manipulation to manufacturing, device integration and system level applications, including uses in bio-integrated electronics, three-dimensional integrated photonics, solar cells, and transient electronics. The first part describes in detail the fundamental physics and materials science involved, as well as synthetic approaches and assembly and manufacturing strategies, while the second covers the wide range of device applications and system level demonstrators already achieved, with examples taken from electronics and photonics and from biomedicine and energy.

Fundamentals of Guided-Wave Optoelectronic Devices

Fundamentals of Guided-Wave Optoelectronic Devices
Author: William S. C. Chang
Publisher: Cambridge University Press
Total Pages: 213
Release: 2010
Genre: Science
ISBN: 0521868238

Uniquely combines both the optical and electrical properties of guided-wave optoelectronic devices, providing key concepts and practical analytical techniques.

Principles of Optics for Engineers

Principles of Optics for Engineers
Author: William S. C. Chang
Publisher: Cambridge University Press
Total Pages: 239
Release: 2015-05-28
Genre: Science
ISBN: 1107074908

Unites classical and modern photonics approaches, providing a thorough understanding of the interplay between plane waves, diffraction and modal analysis.

Design, Fabrication and Chacterization of Guided-mode Resonance Transmission Filters

Design, Fabrication and Chacterization of Guided-mode Resonance Transmission Filters
Author: Mohammad Shyiq Amin
Publisher:
Total Pages: 96
Release: 2014
Genre: Diffraction gratings
ISBN:

This dissertation addresses photonic devices enabled by the guided-mode resonance (GMR) effect. As periodic phototonic structures can become highly reflective or transmissive at resonance, this effect has been utilized to design suites of optical elements including reflection filters, transmission filters, broadband mirrors, polarizers, and absorbers with a plethora of possible deployment venues. Even though there has been considerable research on the reflection type GMR elements, attendant transmission filters have less explored experimentally, as there is material limitation to design this kind of filters with simple architecture and they also may require coupling to multiple resonances simultaneously. Apart from the design issues, experimental realization of these filters is challenging. There have not been any experimental reports on optical transmission filters with narrow transmission band and high efficiency and well defined low sidebands. In this Dissertation, we design, fabricate and characterize narrow band guided-mode resonance transmission filters. Initially we study a way to engineer the optical constants of amorphous silicon (a- Si) suitable for different applications. Rapid thermal annealing is applied to induce crystallization of sputtered amorphous silicon deposited on thermally grown oxide layers. The influence of annealing temperatures in the range of 600°C-980°C is systematically investigated. Using scanning-electron microscopy, ellipsometry and x-ray diffraction techniques, the structural and optical properties of the films are determined. An order-ofmagnitude reduction of the extinction coefficient is achieved. We show that the optical constants can be tuned for different design requirements by controlling the process parameters. For example, we obtain a refractive index of ~3.66 and an extinction coefficient of ~0.0012 at the 1550-nm wavelength as suitable for GMR transmission filter applications where a high refractive index and low extinction coefficient is desired. We design transmission filters for both transverse electric (TE) and transverse magnetic (TM) polarizations and experimentally demonstrate a simple and geometrically tunable narrowband transmission filter for TM polarization using a one-dimensional silicon grating. We interpret the response in terms of symmetry of the guided modes in a dielectric slab waveguide, with numerical analysis and experimental results. The filter exhibits a 50-nm wide transmission peak with 60% efficiency at off-normal incidence in the telecommunication wavelength region. We can achieve higher efficiency with broader linewidths from larger incidence angles. We also explain the challenges that the experimental realization of these devices entail such as susceptibility to extinction coefficient, mode confinement, and surface irregularities. Moreover, we provide a new principle for optical transmission filters based on the GMR effect cooperating with the Rayleigh anomaly in a subwavelength nanograting. We theoretically and experimentally show that the onset of higher diffraction orders at the Rayleigh anomaly can dramatically sharpen a GMR transmission peak in both spectral and angular domains. There results a unique transmission spectrum that is tightly delimited in angle and wavelength as demonstrated with a precisely fabricated device. Finally, we report experimental research on GMR transmission filters based on a Fabry-Perot cavity. We achieve a resonance linewidth of close to 3 nm with attendant free spectral range (FSR) of 7 nm. Even though the efficiency of the resonance peak is not high, we can improve the results by applying low-loss materials and generate broad low sidebands by decreasing the cavity length with a micro-control translation stage.