Fundamentals Of Vacuum Science And Technology
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| Author | : James M. Lafferty |
| Publisher | : Wiley-Interscience |
| Total Pages | : 0 |
| Release | : 1998-01-30 |
| Genre | : Science |
| ISBN | : 9780471175933 |
An indispensable resource for scientists and engineers concerned with high vacuum technology Vacuum technology has evolved significantly over the past thirty years and is now indispensable to various fields of scientific research as well as the medical technology, food processing, aerospace, and electronics industries. Foundations of Vacuum Science and Technology offers a comprehensive survey of the physical and chemical principles underlying the production, measurement, and use of high vacuums. It also provides a valuable critical survey of important developments that have occurred in the field over the past several decades. Comprising contributions from many of the world's leading specialists in vacuum techniques, Foundations of Vacuum Science and Technology: * Reviews the laws of kinetics, the principles of gas flow over a wide range of pressures, and the behaviors of both compressible and turbulent flows * Features exhaustive coverage of vacuum pump technology, including liquid ring pumps, dry pumps, turbo pumps, getter pumps, and cryo pumps * Describes leak detectors used in industry * Examines all types of pressure measurement techniques, including the latest quadrupole mass spectrometer techniques for partial pressure analysis * Explores the state of the art in calibration and standards.
| Author | : Pramod K. Naik |
| Publisher | : CRC Press |
| Total Pages | : 261 |
| Release | : 2018-03-22 |
| Genre | : Science |
| ISBN | : 0429995423 |
Vacuum plays an important role in science and technology. The study of interaction of charged particles, neutrals and radiation with each other and with solid surfaces requires a vacuum environment for reliable investigations. Vacuum has contributed to major advancements made in nuclear science, space, metallurgy, electrical/electronic technology, chemical engineering, transportation, robotics and many other fields. This book is intended to assist students, scientists, technicians and engineers with understanding the basics of vacuum science and technology for application in their projects. The fundamental theories, concepts, devices, applications, and key inventions are discussed.
| Author | : John F. O'Hanlon |
| Publisher | : John Wiley & Sons |
| Total Pages | : 536 |
| Release | : 2005-02-18 |
| Genre | : Science |
| ISBN | : 0471467154 |
In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.
| Author | : Dorothy Hoffman |
| Publisher | : Elsevier |
| Total Pages | : 861 |
| Release | : 1997-10-29 |
| Genre | : Science |
| ISBN | : 0080533752 |
The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. - User oriented with many useful tables, charts, and figures of use to the practitioner - Reviews new vacuum materials and equipment - Illustrates the design and maintenance of modern vacuum systems - Includes well referenced chapters
| Author | : David J. Hucknall |
| Publisher | : Elsevier |
| Total Pages | : 328 |
| Release | : 2013-10-22 |
| Genre | : Technology & Engineering |
| ISBN | : 1483103331 |
Vacuum Technology and Applications reviews the most commonly encountered methods for the production, containment, and measurement of subatmospheric pressure. This book also outlines a number of very important applications of this technology. This text is organized into eight chapters and begins with a brief survey of the fundamental principles of vacuum technology. The succeeding chapters deal with the pumps used for the production of rough-medium and high-ultra-high vacua. These chapters specifically cover their principles, performance, and applications. These topics are followed by a discussion of the devices for residual gas analysis and partial pressure measurement. Other chapters consider the aspects of leak detection using He-specific mass spectrometer and the materials, components, and fabrication of vacuum devices. The final chapters explore the application of vacuum technology in critical areas of industrial activity, such as thin-film technology, semiconductor, metallurgy, and chemical industry. This book will prove useful to practicing mechanical, chemical, and design engineers.
| Author | : Karl Jousten |
| Publisher | : John Wiley & Sons |
| Total Pages | : 1050 |
| Release | : 2016-06-14 |
| Genre | : Technology & Engineering |
| ISBN | : 3527688250 |
This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology. The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more. As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.
| Author | : Raymond L. Boxman |
| Publisher | : William Andrew |
| Total Pages | : 775 |
| Release | : 1996-12-31 |
| Genre | : Technology & Engineering |
| ISBN | : 0815517793 |
This is a comprehensive text describing the basic physics and technological applications of vacuum arcs. Part I describes basic physics of the vacuum arc, beginning with a brief tutorial review of plasma and electrical discharge physics, then describes the arc ignition process, cathode and anode spots which serve as the locus for plasma generation, and resultant interelectrode plasma. Part II describes the applications of the vacuum arc for depositing thin films and coatings, refining metals, switching high power, and as sources of intense electron, ion, plasma, and x-ray beams.
| Author | : G. F. Weston |
| Publisher | : Elsevier |
| Total Pages | : 297 |
| Release | : 2013-10-22 |
| Genre | : Technology & Engineering |
| ISBN | : 1483103323 |
Ultrahigh Vacuum Practice covers topics about components suitable for ultrahigh vacuum applications, their theory of operation, their assembly and use, and their performance and calibration. The book starts by discussing the fundamentals of vacuum science and technology. The text then describes the physical properties and methods of preparing the materials for ultrahigh vacuum and the various pumps and their performance and application to ultrahigh vacuum systems. The mechanism and performance of the various ultrahigh vacuum gauges and the problem of gauge calibration at low pressures, as well as the accuracy that can be expected are discussed as well. Partial pressure measurements, ultrahigh vacuum components, and liquid nitrogen replenisher are also considered. The book tackles the system requirements and applications, as well as methods for detecting leak. Users or potential users of ultrahigh vacuum equipment and expert vacuum engineers will find the book useful.
| Author | : Nagamitsu Yoshimura |
| Publisher | : Academic Press |
| Total Pages | : 575 |
| Release | : 2020-02-15 |
| Genre | : Technology & Engineering |
| ISBN | : 012819703X |
A Review: Ultrahigh-Vacuum Technology for Electron Microscopes provides information on the fundamentals of ultra-high vacuum systems. It covers the very subtle process that can help increase pressure inside the microscope (or inside any other ultra-high vacuum system) and the different behavior of the molecules contributing to this kind of process. Prof Yoshimura's book offers detailed information on electron microscope components, as well as UHV technology. This book is an ideal resource for industrial microscopists, engineers and scientists responsible for the design, operation and maintenance of electron microscopes. In addition, engineering students or engineers working with electron microscopes will find it useful. - Teaches how to incorporate diffusion pumps for UHV electron microscopy - Presents the work of an author who brings a lifetime of experience working on vacuum technology and electron microscopes
| Author | : L.N. Rozanov |
| Publisher | : CRC Press |
| Total Pages | : 364 |
| Release | : 2002-04-04 |
| Genre | : Science |
| ISBN | : 9780415273510 |
Vacuum technology finds itself in many areas of industry and research. These include materials handling, packaging, gas sampling, filtration, degassing of oils and metals, thin-film coating, electron microscopy, particle acceleration, and impregnation of electrical components. It is vital to design systems that are appropriate to the application, and with so many potential solutions this can become overwhelming. Vacuum Technique provides an overview of vacuum technology, its different design methodologies, and the underlying theory. The author begins with a summary of the properties of low-pressure gases, then moves on to describe mathematical modeling of gas transfer in the vacuum system, the operation of pumps and gauges, computer-aided synthesis and analysis of systems, and the design of different vacuum systems. In particular, the author discusses the structure and characteristics of low, middle, high, and superhigh vacuum systems, as well as the characteristics of joints, materials, movement inputs, and all aspects of production technology and construction standards. Using specific examples rather than describing the various elements, Vacuum Technique supplies engineers, technicians, researchers, and students with needed expertise and a comprehensive guide to designing, selecting, and using an appropriate vacuum system for a specific purpose.
