Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1

Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1
Author: J.R. Gaines
Publisher: Elsevier
Total Pages: 0
Release: 2024-08-01
Genre: Science
ISBN: 0128233931

Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in design of vacuum systems for various vacuum deposition technologies. Topics covered include: Introduction to vaccum and end uses, molecular density in vacuum, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance. The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail. This volume also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultra-high vacuum, as well as trade-offs in system design, allowing for the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system. Covers vacuum pump technology, taking a system from atmosphere down to high or ultra-high vacuum Discusses the fundamental descriptions of vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach Provides an overview of practical vacuum system operating techniques that will ensure optimal performance and troubleshooting methods to identify system deficiencies

Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2

Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2
Author: J.R. Gaines
Publisher: Elsevier
Total Pages: 0
Release: 2025-04-01
Genre: Technology & Engineering
ISBN: 9780443336041

Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2: Creating and Measuring Vacuum reviews the many specialized components that must be effectively integrated to create, support, and measure vacuum. This includes pipes, valves, flexible bellows, and several types of vacuum pumps, including rotary vane, dry scroll, turbomolecular, and cryogenic varieties. Pressure sensors are also reviewed with specific attention to their operating principles, pressure range, accuracy, reproducibility, and calibration. The unique features of various vacuum components are highlighted to aid in the selection of devices appropriate for specific pressure ranges and operating conditions. This volume informs the reader about critical vacuum components and how they can be integrated in a complete, dynamically pumped, vacuum system. The specific nuances related to pressure ranges and vacuum component characteristics are featured. Design considerations, such as vacuum gauge placement relative to active gas flows, pressure differentials, and pressure control approaches are also discussed.

Basic Vacuum Technology, 2nd edition

Basic Vacuum Technology, 2nd edition
Author: A. Chambers
Publisher: CRC Press
Total Pages: 214
Release: 1998-01-01
Genre: Science
ISBN: 9780585254913

Vacuum technology is widely used in many manufacturing and developmental processes and its applications grow in scope and sophistication. It is an inter-disciplinary subject, embracing aspects of mechanical, electrical and chemical engineering, chemistry, and materials science while having a broad foundation in physics. In spite of its technological importance, and perhaps because of its cross-disciplinary nature, substantial teaching and training is not widely available. Basic Vacuum Technology aims to give readers a firm foundation of fundamental knowledge about the subject and the ability to apply it. This book is an introductory text on how to use vacuum techniques. It provides a good grounding in the basic scientific principles and concepts that underlie the production and measurement of vacua. The authors describe how these are applied in representative low, medium, high, and ultra-high vacuum systems and explain the most important practical aspects of the operation of a large variety of pumps, components, and measuring instrumentation. The book introduces numerical methods for analysis and prediction of the behavior of vacuum systems in terms of the properties of their individual elements and enables readers to recognize and resolve problems with malfunctioning systems.

Vacuum Science and Technology

Vacuum Science and Technology
Author: Dr. V.V. Rao
Publisher: Allied Publishers
Total Pages: 216
Release: 1998-10-17
Genre: Science
ISBN: 8170237637

This book presents a modern and balanced approach while discussing the conceptual and practical aspects of vacuum science and technology. The chapters in the book are planned in systematic fashion from basic concepts through vacuum production and measurement, vacuum components, trouble shooting and then providing applications. It would be useful to students, both at the under-graduate and graduate levels in physics and also in various branches of engineering. In addition, it would be of value to practicing scientists and engineers who have to deal will vacuum science and technology.

Vacuum Technique

Vacuum Technique
Author: L.N. Rozanov
Publisher: CRC Press
Total Pages: 364
Release: 2002-04-04
Genre: Science
ISBN: 9780415273510

Vacuum technology finds itself in many areas of industry and research. These include materials handling, packaging, gas sampling, filtration, degassing of oils and metals, thin-film coating, electron microscopy, particle acceleration, and impregnation of electrical components. It is vital to design systems that are appropriate to the application, and with so many potential solutions this can become overwhelming. Vacuum Technique provides an overview of vacuum technology, its different design methodologies, and the underlying theory. The author begins with a summary of the properties of low-pressure gases, then moves on to describe mathematical modeling of gas transfer in the vacuum system, the operation of pumps and gauges, computer-aided synthesis and analysis of systems, and the design of different vacuum systems. In particular, the author discusses the structure and characteristics of low, middle, high, and superhigh vacuum systems, as well as the characteristics of joints, materials, movement inputs, and all aspects of production technology and construction standards. Using specific examples rather than describing the various elements, Vacuum Technique supplies engineers, technicians, researchers, and students with needed expertise and a comprehensive guide to designing, selecting, and using an appropriate vacuum system for a specific purpose.

A User's Guide to Vacuum Technology

A User's Guide to Vacuum Technology
Author: John F. O'Hanlon
Publisher: John Wiley & Sons
Total Pages: 536
Release: 2005-02-18
Genre: Science
ISBN: 0471467154

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

Vacuum Technology

Vacuum Technology
Author: A. Roth
Publisher: Elsevier
Total Pages: 575
Release: 2012-12-02
Genre: Technology & Engineering
ISBN: 044459874X

This third updated and enlarged edition includes about 350 new papers added to the previous list of references. The contents have been revised and updated in the areas of: Thermonuclear pumping; Throughput; Transmission probability; Electronic circuit simulation; Sorption on charcoal; Desorption from porous materials; Desorption from stainless steel, A1 alloys (outgassing rates); Ion bombardment (glow discharge) cleaning; Clay - type pumps; Turbomolecular pumps-improvements; Cryosorption; NEG (Nonevaporable getter) linear pumps; Standards for measurement of pumping speed (Recommended practice, test domes); Spinning rotor gauges; Quartz friction gauges; Increase of sensitivity of thermocouple gauges; Lubrication in vacuum; Calibration of diffusion leaks; Improvements in leak detection. Besides its role in educational activities, the book will also serve as a handbook for those working in this field, or in fields connected to Vacuum Technology.Comments from the press on the second edition:"A valuable reference work for undergraduate libraries...well organized and clearly written and strikes an appropriate balance between completeness and attention to fundamentals. The index and references are unusually complete. Recommended." (Choice) "Roth's new book contains a comprehensive collection of information on rarefied-gas flow, physical and chemical phenomena associated with vacuum technology, the production and measurement of high vacuum and sealing and leak-detection techniques. One finds a wealth of equations, numerical examples, tables, graphs and monographs. The book is more a handbook than a source book of latest developments. It is suitable for teaching, but the wealth of organized data should also make the book highly useful to engineers..." (Physics Today)

Gases and Vacua

Gases and Vacua
Author: A. H. Beck
Publisher: Elsevier
Total Pages: 217
Release: 2017-09-09
Genre: Technology & Engineering
ISBN: 148313802X

Handbook of Vacuum Physics, Volume 1: Gases and Vacua provides information on the many aspects of vacuum technology, from material on the quantum theoretical aspects of the complex semi-conductors used for thermionic and photo-electric emission to data on the performance of commercially available pumps, gauges, and high-vacuum materials. The handbook satisfies the need of workers using vacuum apparatuses or works on the diverse applications of high-vacuum technology in research and industry. The book is a compilation of long articles prepared by experts in vacuum technology. Sufficient theoretical materials are provided to ensure that the underlying principles and formulas are well understood. On the practical side, the provision of accurate tables of physical constants; properties of materials; laboratory techniques; and properties of commercial pumps, gauges, and leak detectors are emphasized. The text will be a valuable reference material to physicists, chemists, engineers, students, and workers in industries using vacuum technology.