Foundry Microfabrication Of Deformable Mirrors For Adaptive Optics
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Author | : William D. Cowan |
Publisher | : |
Total Pages | : 285 |
Release | : 1998-04-01 |
Genre | : Founding |
ISBN | : 9781423560623 |
Microelectromechanical Systems (MEMS) is a rapidly emerging field of research in which batch fabrication processes are used to construct miniature devices. MEMS devices are particularly well suited to optical applications. Foundry microfabrication offers a substantial cost advantage for prototype system development. In this research, foundry MEMS processes are used to fabricate low-cost deformable mirror systems (MEM-DMs) for adaptive optics. The challenges and design trades associated with fabrication of continuous and segmented deformable mirrors in foundry processes are examined in detail. Micromirror surface figure is shown to be critically important. Beam steering and optical aberration correction experiments conclusively demonstrate the potential of low-cost MEM-DMs. The prototype MEM-DM systems are approximately 1/ 500th the cost of conventionally manufactured deformable mirrors. An innovative direct digital control scheme further reduces adaptive optic system cost by eliminating the digital to analog converter typically required for each controlled element. In addition to the MEM-DMs, other MEMS devices are shown. The thermally actuated piston micromirrors offer greater deflections for operation at longer optical wavelengths. Other MEMS devices examined include a series of tilting mirrors, pressure gauges, test structures, electrostatic scratch drive actuated rotors, and a new type of electrostatic cantilever motor with lateral motion output.
Author | : Raji Krishnamoorthy Mali |
Publisher | : |
Total Pages | : 294 |
Release | : 1999 |
Genre | : Microelectromechanical systems |
ISBN | : |
Author | : Hyunkyu Park |
Publisher | : |
Total Pages | : 310 |
Release | : 2009 |
Genre | : |
ISBN | : |
Author | : Zhizheng Wu |
Publisher | : Springer Science & Business Media |
Total Pages | : 323 |
Release | : 2012-10-21 |
Genre | : Technology & Engineering |
ISBN | : 364232228X |
Modeling and Control of Magnetic Fluid Deformable Mirrors for Adaptive Optics Systems presents a novel design of wavefront correctors based on magnetic fluid deformable mirrors (MFDM) as well as corresponding control algorithms. The presented wavefront correctors are characterized by their linear, dynamic response. Various mirror surface shape control algorithms are presented along with experimental evaluations of the performance of the resulting adaptive optics systems. Adaptive optics (AO) systems are used in various fields of application to enhance the performance of optical systems, such as imaging, laser, free space optical communication systems, etc. This book is intended for undergraduate and graduate students, professors, engineers, scientists and researchers working on the design of adaptive optics systems and their various emerging fields of application. Zhizheng Wu is an associate professor at Shanghai University, China. Azhar Iqbal is a research associate at the University of Toronto, Canada. Foued Ben Amara is an assistant professor at the University of Toronto, Canada.
Author | : Shaun Roger Hick |
Publisher | : |
Total Pages | : 104 |
Release | : 1996-12-01 |
Genre | : Electromechanical devices |
ISBN | : 9781423583363 |
This research conducted the first demonstrated use of a micro- electro-mechanical structure (MEMS) mirror array to correct a static optical aberration. A well developed technique in adaptive optics imaging systems uses a deformable mirror to reflect the incident wave front to the imaging stage of the system. By matching the surface of the deformable mirror to the shape of the wave front phase distortion, the reflected wave front will be less aberrated before it is imaged. Typical adaptive optics systems use piezo-electric actuated deformable mirrors. This research used an electrostatically actuated, segmented mirror array, constructed by standard MEMS fabrication techniques, to investigate its performance as a deformable mirror. The relatively cheap cost of MEMS fabrication promises new adaptive optics applications if a suitable design can be found. In the demonstration, the point spread function (PSF) of the corrected and uncorrected aberrated image were compared. A 43 percent improvement in the peak intensity of the PSF was noted in the corrected image.
Author | : Dhiraj Hiro Malkani |
Publisher | : |
Total Pages | : 148 |
Release | : 2000 |
Genre | : |
ISBN | : |
Author | : Emily Jo Carr |
Publisher | : |
Total Pages | : 362 |
Release | : 2006 |
Genre | : |
ISBN | : |
Author | : Harold Michael Dyson |
Publisher | : |
Total Pages | : |
Release | : 2002 |
Genre | : |
ISBN | : |
Author | : Domenico Bonaccini |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 506 |
Release | : 1998 |
Genre | : Science |
ISBN | : |
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Author | : |
Publisher | : |
Total Pages | : 512 |
Release | : 1998 |
Genre | : Astronomical instruments |
ISBN | : |