Electrostatic And Electromagnetic Actuation Of Micromechanical Mirrors
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MEMS Mirrors
Author | : Huikai Xie |
Publisher | : MDPI |
Total Pages | : 217 |
Release | : 2018-05-04 |
Genre | : Technology & Engineering |
ISBN | : 3038428671 |
This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines
Modulation of Electrostatic Microelectromechanical Mirrors Using a CMOS Controller
Author | : Paul Rounsavall |
Publisher | : |
Total Pages | : 104 |
Release | : 1999-03-01 |
Genre | : |
ISBN | : 9781423545897 |
Microelectromechanical Systems (MEMS) is a rapidly growing technology that lends itself particularly well to optical applications. An example of an optical MEMS device is the piston-action mirror that modulates the phase of reflected light. The phase of reflected light can be varied using thermal or electrostatic actuation to control the position of the mirror. In previous research, a modulation method to control thermally actuated mirrors was developed. This thesis presents the development, implementation, fabrication, and testing of a complimentary metal oxide semiconductor (CMOS) controller capable of directly interfacing between a digital system, such as a computer, and an electrostatically actuated MEMS mirror device. The controller pulse width modulates a supply voltage to vary the power applied to the MEMS mirror device. The MEMS mirror device responds with negligible position ripple to the applied average power of the pulse width modulation signal. By varying the duty cycle of the pulse width modulation signal, the position of the mirror is varied. This controller can be adapted to control other electrostatically actuated devices using the design and methodology described in this thesis. The implementation of this controller is a step toward the monolithic integration of a MEMS deformable mirror array with CMOS control electronics.
Advances in Structures Analysis
Author | : Moussa Karama |
Publisher | : Trans Tech Publications Ltd |
Total Pages | : 112 |
Release | : 2011-06-08 |
Genre | : Technology & Engineering |
ISBN | : 303813533X |
Volume is indexed by Thomson Reuters BCI (WoS). Various research topics fall under the rubric of Structure: e.g. material damage leading to crack growth and/or fatigue of structures under dynamic loading or impact, durability and reliability of structures, numerical simulation and experimental work involving large deformations and impact associated with various experimental techniques. With regard to experimental studies, many non-destructive tests have been developed during recent years in order to deliver more accurate data. Therefore, papers dealing with the processing, characterization and physical properties determination of materials and structures fall under this heading. Finally, it also covers aspects of computer software, numerical models and advanced simulation algorithms. Specific applications of modeling and simulation in science and engineering, together with the relevant applied mathematical techniques, are also covered.
Optical MEMS, Nanophotonics, and Their Applications
Author | : Guangya Zhou |
Publisher | : CRC Press |
Total Pages | : 548 |
Release | : 2017-12-14 |
Genre | : Technology & Engineering |
ISBN | : 1351647601 |
This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
Optical MEMS
Author | : Huikai Xie |
Publisher | : MDPI |
Total Pages | : 176 |
Release | : 2019-08-06 |
Genre | : Technology & Engineering |
ISBN | : 3039213032 |
This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines
Mems/Nems
Author | : Cornelius T. Leondes |
Publisher | : Springer Science & Business Media |
Total Pages | : 2142 |
Release | : 2007-10-08 |
Genre | : Technology & Engineering |
ISBN | : 0387257861 |
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
MEMS Linear and Nonlinear Statics and Dynamics
Author | : Mohammad I. Younis |
Publisher | : Springer Science & Business Media |
Total Pages | : 463 |
Release | : 2011-06-27 |
Genre | : Technology & Engineering |
ISBN | : 1441960201 |
MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.