Design Fabrication And Characterization Of Torsional Micromachined Silicon Mirrors
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Micromachined Mirrors
Author | : Robert Conant |
Publisher | : Springer Science & Business Media |
Total Pages | : 150 |
Release | : 2013-04-17 |
Genre | : Technology & Engineering |
ISBN | : 1475737645 |
Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
Tunable Micro-optics
Author | : Hans P. Zappe |
Publisher | : Cambridge University Press |
Total Pages | : 477 |
Release | : 2016 |
Genre | : Science |
ISBN | : 1107032458 |
The first comprehensive survey of state-of-the-art tunable micro-optics, covering advances in materials, components and systems.
Analysis and Design of Mems Scan Mirrors Using Periodically Stiffened Silicon Nitride
Author | : Bert Jeffrey Lutzenberger |
Publisher | : |
Total Pages | : 266 |
Release | : 2006 |
Genre | : Microelectromechanical systems |
ISBN | : |
This research presents a novel fabrication method combining surface and bulk micromachining techniques to deposit mechanically stiffened silicon nitride films for use in MEMS fabrication. The stiffened silicon nitride film consists of a thin (~1.5 um) top sheet with stiffening fins molded to the back of the film. In the final configuration, the fins extend between 15 um and 40 um vertically from the back of the film. The molded fins are arranged into periodic square and hexagonal cell configurations ranging in size from 10 um to 250 um. The periodic cells significantly increase the bending stiffness of LPCVD silicon nitride films resulting in a film with a high strength-to-weight ratio. Larger aperture, silicon nitride micro mirrors are fabricated with the mechanically stiffened silicon nitride film. The mirrors demonstrate that deformation due to postrelease thermal strain and inertia during dynamic actuation can be mitigated by employing the proposed stiffening technique. Furthermore, the mirrors are fabricated with a minimal amount of processing making the proposed microfabrication technique an attractive solution for various MEMS applications Finally, homogenized material properties are obtained for the periodically stiffened silicon nitride film. The homogenized material properties are then used to simplify finite element models of biaxial and single axis torsion micro mirrors fabricated from the proposed film. The resulting finite element models are shown to be in excellent agreement with the experimental models. The presented numerical analysis method significantly simplifies model complexity while simultaneously reducing the computational cost associated with simulating MEMS built from a periodically stiffened thin film.
Micromachining and Imaging
Author | : Terry A. Michalske |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 166 |
Release | : 1997 |
Genre | : Science |
ISBN | : |
Mems/Nems
Author | : Cornelius T. Leondes |
Publisher | : Springer Science & Business Media |
Total Pages | : 2142 |
Release | : 2007-10-08 |
Genre | : Technology & Engineering |
ISBN | : 0387257861 |
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
MEMS Design, Fabrication, Characterization, and Packaging
Author | : Uwe F. W. Behringer |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 460 |
Release | : 2001 |
Genre | : Technology & Engineering |
ISBN | : |
MEMS: A Practical Guide of Design, Analysis, and Applications
Author | : Jan Korvink |
Publisher | : Springer Science & Business Media |
Total Pages | : 981 |
Release | : 2010-05-28 |
Genre | : Technology & Engineering |
ISBN | : 3540336559 |
A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.